Transpector® CPM 3 紧凑型过程监控器

 

快速、现场就绪过程监测系统

 

性能、可靠性和通用性

 

十多年来,INFICON Transpector CPM 一直是半导体行业市场领先的残余气体分析仪 (RGA) 过程监测系统。现在,Transpector CPM 3 通过集成经实践验证的泵送和进口系统与新型传感器和电子元件,达到业内领先的测量速度和灵敏度。Transpector CPM 3 是新型和现有半导体过程(例如,ALD、CVD、PVD 和蚀刻)的理想 RGA 过程监控器。


Transpector CPM 3 通过以下特性为合作伙伴提供经实践证实的投资回报率:

  • 业内领先的测量技术
  • 稳健的适应性架构
  • 易于维护
  • 出色的产品支持

功能

  • ALD、蚀刻、CVD 和 300 mm 除气残余气体分析仪 — 实现实时过程监测和分析
  • ALD 就绪,测量速度为每点 1.8 ms(每秒 555 点)
  • 在大多数苛刻 CVD 和蚀刻应用中,展现出经实践验证的耐久性和可靠性
  • 应用集成 — Transpector CPM 集成 FabGuard 软件,由 INFICON 世界级应用专家提供支持,是一款强大的过程监测与诊断工具
  • 紧凑尺寸 — 允许轻松集成到半导体生产设备
  • Hexblock™ 含三个压力进口并减少表面积,以最小化表面反应时间和响应时间
  • 电容隔膜计 (CDG) — CDG 允许用户监测过程压力,并自动保护系统不出现压力偏移
  • 自动校准 — 确保长期数据稳定性和精度,以便进行各传感器和工具的腔室匹配

规格

类型 100 AMU CPM 200 AMU CPM 300 AMU CPM
分辨率 1 amu wide @ 10% peak height 1 amu wide @ 10% peak height 1 amu wide @ 10% peak height
总压力范围¹ 5E-7 - 1E-3 Torr 5E-7 - 1E-3 Torr 5E-7 - 1E-3 Torr
总压力精度² +/- 25% 1E-6 - 1E-3 Torr +/- 25% 1E-6 - 1E-3 Torr +/- 25% 1E-6 - 1E-3 Torr
最大离子源工作压力³ 1E-3 Torr 1E-3 Torr 1E-3 Torr
标称工作压力⁴ 2E-4 Torr 2E-4 Torr 2E-4 Torr
系统工作压力 1E-8 Torr - 1.2 atm 1E-8 Torr - 1.2 atm 1E-8 Torr - 1.2 atm
灵敏度(低发射) > 4E-6 Amps/Torr > 2E-6 Amps/Torr > 1E-6 Amps/Torr
灵敏度(高发射) > 2E-5 Amps/Torr > 1E-5 Amps/Torr > 5E-6 Amps/Torr
最小可检测分压⁵ 1E-13 Torr 2E-13 Torr 4E-13 Torr
最大数据速率 1.8 ms/point (555 points/sec) 1.8 ms/point (555 points/sec) 1.8 ms/point (555 points/sec)
丰度灵敏度⁶ < 5 ppm < 10 ppm < 100 ppm
零冲击⁷ < 2 ppm < 25 ppm < 200 ppm
检测限值⁸ < 1 ppm < 2 ppm < 4 ppm
线性度⁹ +/- 20% +/- 20% +/- 20%
最小背景压力 1E-8 Torr 1E-8 Torr 1E-8 Torr
最大传感器和进气温度 °C 150 150 150

1 使用总压强镜头获得的离子源压强读数 @ 低发射

2 总压强准确度 @ 低发射

3 离子源最大工作压强 @ 低发射

4 2x10-4 Torr 的离子源将在四极区域产生大约 1x10-5 Torr 的压强

5 EM 开启且保压时间为 1 秒时离子源处的 MDPP

6 质量数 40 对 41 AMU 的贡献

7 零冲击对 2 AMU 的贡献

8 空气中的氪的最小可检出浓度 @ 1 秒保压时间

9 适用于 1 Torr 孔板或更低设置。0.1 至 2 倍标称孔板压强条件下的线性 @ 低发射

耗材

100 AMU CPM
零件号 明细
059-0196 NI-4-VCR-2, 1/4" VCR GASKET NI
059-0400 Replacement c-ring, CPM
070-1042 O-Ring, 0.739 ID, 0.070 W, Viton, 75Duro (V4 only)
923-418-G1 CPM Replacement Diaphragm Kit
923-706-G10 Orifice Kit, CPM, 30 Torr
923-706-G3 Orifice Kit, CPM, 10 Torr
923-706-G4 Orifice Kit, CPM, 1 Torr
923-706-G6 Orifice Kit, CPM, 10 mTorr
923-706-G7 Orifice Kit, CPM, 360 mTorr
923-706-G8 Orifice Kit, CPM, 15 mTorr
923-706-G9 Orifice Kit, CPM, 3 Torr
923-707-G1 Sniffer Kit, CPM, 10 Torr, 5 cm
923-707-G2 Sniffer Kit, CPM, 100 Torr
923-707-G3 Sniffer Kit, CPM, 7 Torr, 30.5 cm
961-707-G1 Electron Multiplier Kit, Spare
964-710-G1 Filament Kit CPM Tungsten
964-710-G2 Filament Kit CPM Coated
964-711-G1 Ion Source Kit CPM Tungsten
964-711-G2 Ion Source Kit CPM Tungsten w/Liner
964-712-G1 Ion Source Kit CPM Coated
964-712-G2 Ion Source Kit CPM Coated w/Liner
200 AMU CPM
零件号 明细
059-0196 NI-4-VCR-2, 1/4" VCR GASKET NI
059-0400 Replacement c-ring, CPM
070-1042 O-Ring, 0.739 ID, 0.070 W, Viton, 75Duro (V4 only)
923-418-G1 CPM Replacement Diaphragm Kit
923-706-G10 Orifice Kit, CPM, 30 Torr
923-706-G3 Orifice Kit, CPM, 10 Torr
923-706-G4 Orifice Kit, CPM, 1 Torr
923-706-G6 Orifice Kit, CPM, 10 mTorr
923-706-G7 Orifice Kit, CPM, 360 mTorr
923-706-G8 Orifice Kit, CPM, 15 mTorr
923-706-G9 Orifice Kit, CPM, 3 Torr
923-707-G1 Sniffer Kit, CPM, 10 Torr, 5 cm
923-707-G2 Sniffer Kit, CPM, 100 Torr
923-707-G3 Sniffer Kit, CPM, 7 Torr, 30.5 cm
961-707-G1 Electron Multiplier Kit, Spare
964-710-G1 Filament Kit CPM Tungsten
964-710-G2 Filament Kit CPM Coated
964-711-G1 Ion Source Kit CPM Tungsten
964-711-G2 Ion Source Kit CPM Tungsten w/Liner
964-712-G1 Ion Source Kit CPM Coated
964-712-G2 Ion Source Kit CPM Coated w/Liner
300 AMU CPM
零件号 明细
059-0196 NI-4-VCR-2, 1/4" VCR GASKET NI
059-0400 Replacement c-ring, CPM
070-1042 O-Ring, 0.739 ID, 0.070 W, Viton, 75Duro (V4 only)
923-418-G1 CPM Replacement Diaphragm Kit
923-706-G10 Orifice Kit, CPM, 30 Torr
923-706-G3 Orifice Kit, CPM, 10 Torr
923-706-G4 Orifice Kit, CPM, 1 Torr
923-706-G6 Orifice Kit, CPM, 10 mTorr
923-706-G7 Orifice Kit, CPM, 360 mTorr
923-706-G8 Orifice Kit, CPM, 15 mTorr
923-706-G9 Orifice Kit, CPM, 3 Torr
923-707-G1 Sniffer Kit, CPM, 10 Torr, 5 cm
923-707-G2 Sniffer Kit, CPM, 100 Torr
923-707-G3 Sniffer Kit, CPM, 7 Torr, 30.5 cm
961-707-G1 Electron Multiplier Kit, Spare
964-710-G1 Filament Kit CPM Tungsten
964-710-G2 Filament Kit CPM Coated
964-711-G1 Ion Source Kit CPM Tungsten
964-711-G2 Ion Source Kit CPM Tungsten w/Liner
964-712-G1 Ion Source Kit CPM Coated
964-712-G2 Ion Source Kit CPM Coated w/Liner

备件

100 AMU CPM
零件号 明细
032-0079 Turbo Molecular Pump (w/CF40 flange)
059-0400 Replacement c-ring, CPM
915-724-G1 Spare Ion Source Liner
922-204-G1 Capillary, CPM, 1.5 m
922-204-G3 Capillary, CPM, 3 m
923-403-P2 US18238, SMC VQ100 Manifold for CPM
923-417-G1 Foreline Protection Kit, CPM
923-710-G1 HexBlock Orifice Replacement tools
923-711-G1 HexBlock Valve Replacement Kit
923-712-G1 HexBlock Orifice Gasket, Quantity 5
923-723-G2 2 Stage Diaphragm Foreline Pump
964-208-G11 CPM CDG Pressure Gauge Kit (1 Torr)
964-208-G12 CPM CDG Pressure Gauge Kit (10 Torr)
964-208-G13 CPM CDG Pressure Gauge Kit (100 Torr)
964-208-G14 CPM CDG Pressure Gauge Kit (1000 Torr)
964-230-G1 CPM Cable Box Assembly
964-403-P1 CPM Manifold Heater
964-603-G2 CPM Controller Box
964-720-G1 CPM CDG Pressure Gauge Kit (1000 Torr) w/ Gauge Interface Cable
964-720-G2 CPM CDG Pressure Gauge Kit (100 Torr) w/ Gauge Interface Cable
964-720-G3 CPM CDG Pressure Gauge Kit (10 Torr) w/ Gauge Interface Cable
964-720-G4 CPM CDG Pressure Gauge Kit (1 Torr) w/ Gauge Interface Cable
200 AMU CPM
零件号 明细
032-0079 Turbo Molecular Pump (w/CF40 flange)
059-0400 Replacement c-ring, CPM
915-724-G1 Spare Ion Source Liner
922-204-G1 Capillary, CPM, 1.5 m
922-204-G3 Capillary, CPM, 3 m
923-403-P2 US18238, SMC VQ100 Manifold for CPM
923-417-G1 Foreline Protection Kit, CPM
923-710-G1 HexBlock Orifice Replacement tools
923-711-G1 HexBlock Valve Replacement Kit
923-712-G1 HexBlock Orifice Gasket, Quantity 5
923-723-G2 2 Stage Diaphragm Foreline Pump
964-208-G11 CPM CDG Pressure Gauge Kit (1 Torr)
964-208-G12 CPM CDG Pressure Gauge Kit (10 Torr)
964-208-G13 CPM CDG Pressure Gauge Kit (100 Torr)
964-208-G14 CPM CDG Pressure Gauge Kit (1000 Torr)
964-230-G1 CPM Cable Box Assembly
964-403-P1 CPM Manifold Heater
964-603-G2 CPM Controller Box
964-720-G1 CPM CDG Pressure Gauge Kit (1000 Torr) w/ Gauge Interface Cable
964-720-G2 CPM CDG Pressure Gauge Kit (100 Torr) w/ Gauge Interface Cable
964-720-G3 CPM CDG Pressure Gauge Kit (10 Torr) w/ Gauge Interface Cable
964-720-G4 CPM CDG Pressure Gauge Kit (1 Torr) w/ Gauge Interface Cable
300 AMU CPM
零件号 明细
032-0079 Turbo Molecular Pump (w/CF40 flange)
059-0400 Replacement c-ring, CPM
915-724-G1 Spare Ion Source Liner
922-204-G1 Capillary, CPM, 1.5 m
922-204-G3 Capillary, CPM, 3 m
923-403-P2 US18238, SMC VQ100 Manifold for CPM
923-417-G1 Foreline Protection Kit, CPM
923-710-G1 HexBlock Orifice Replacement tools
923-711-G1 HexBlock Valve Replacement Kit
923-712-G1 HexBlock Orifice Gasket, Quantity 5
923-723-G2 2 Stage Diaphragm Foreline Pump
964-208-G11 CPM CDG Pressure Gauge Kit (1 Torr)
964-208-G12 CPM CDG Pressure Gauge Kit (10 Torr)
964-208-G13 CPM CDG Pressure Gauge Kit (100 Torr)
964-208-G14 CPM CDG Pressure Gauge Kit (1000 Torr)
964-230-G1 CPM Cable Box Assembly
964-403-P1 CPM Manifold Heater
964-603-G2 CPM Controller Box
964-720-G1 CPM CDG Pressure Gauge Kit (1000 Torr) w/ Gauge Interface Cable
964-720-G2 CPM CDG Pressure Gauge Kit (100 Torr) w/ Gauge Interface Cable
964-720-G3 CPM CDG Pressure Gauge Kit (10 Torr) w/ Gauge Interface Cable
964-720-G4 CPM CDG Pressure Gauge Kit (1 Torr) w/ Gauge Interface Cable
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