PCG55x 大气压至中真空真空计

 

INFICON Pirani 标准真空计 PSG500、PSG502-S、PSG510-S 和 PSG512-S 采用当今市场上最先进的数字 Pirani 技术,不锈钢传感器单元坚固耐用,结构设计紧凑,适用于半导体系统和标准应用,例如前级真空管。

好处

  • 轻松一键调节 ATM 和 HV
  • 节省空间的坚固设计
  • 铝质壳体
  • 可安装在任何方向
  • 不锈钢测量单元,带金属密封馈入装置
  • 对数信号输出,易于集成
  • 螺纹接头,具有 10 bar 绝对过压能力
  • 250°C 可烘烤装置
  • 镍丝选件,适用于腐蚀性应用
  • 陶瓷馈入装置,适用于腐蚀性极强的应用(PSG510 和 PSG512)
  • 可选设定点
  • 符合 RoHS 标准

典型应用

  • 高真空电离真空计控制
  • 前级真空压力监控
  • 真空系统中的安全电路
  • 高真空和低真空范围内的一般真空测量和控制
  • tiba29e1 Massbild.gif

规格

类型 PSG500 tungsten PSG500-S tungsten, setpoints PSG502-S nickel, setpoints PSG510-S tungsten, setpoints, ceramic feedthroughs PSG512-S nickel, setpoints, ceramic feedthroughs
测量原则 thermal conductance according to Pirani thermal conductance according to Pirani thermal conductance according to Pirani thermal conductance according to Pirani thermal conductance according to Pirani
精度 (N2)          
1 x 10-3 … 100 毫巴 % of reading ±15% ±15% ±15% ±15% ±15%
5 x 10-4 … 1 x 10-3 毫巴 % of reading ±50% ±50% ±50% ±50% ±50%
100 … 1000 毫巴 % of reading ±50% ±50% ±50% ±50% ±50%
可重复性(空气)          
1 x 10-3 … 100 毫巴 % of reading 2% 2% 2% 2% 2%
输出信号(测量信号)          
电压范围 V 0 … +10.3 0 … +10.3 0 … +10.3 0 … +10.3 0 … +10.3
测量范围 V +1.9 … +10.0 +1.9 … +10.0 +1.9 … +10.0 +1.9 … +10.0 +1.9 … +10.0
测量范围(空气、O2、CO、N2 mbar 5 x 10-4 to 1000 5 x 10-4 to 1000 5 x 10-4 to 1000 5 x 10-4 to 1000 5 x 10-4 to 1000
设定点          
设定点数量 none 2 2 2 2
设置范围 mbar 2 x 10-3 … 500 2 x 10-3 … 500 2 x 10-3 … 500 2 x 10-3 … 500
滞后 % of reading 10% above lower threshold 10% above lower threshold 10% above lower threshold 10% above lower threshold
继电器触点 30 30 30 30
继电器触点: 转换时间 ms <20 <20 <20 <20
电源电压          
真空计上 V (dc) +14 …+30 +14 …+30 +14 …+30 +14 …+30 +14 …+30
波纹 V (p-p) ≤1 ≤1 ≤1 ≤1 ≤1
电压与压强 logarithmic 1.286 Volts per decade logarithmic 1.286 Volts per decade logarithmic 1.286 Volts per decade logarithmic 1.286 Volts per decade logarithmic 1.286 Volts per decade
内部容积          
DN 16 ISO-KF,DN 16 CF-R,7/16-20 UNF cm³ (in.³) 1.5 (0.092) 1.5 (0.092) 1.5 (0.092) 1.5 (0.092) 1.5 (0.092)
DN 16 ISO-KF & DN 16 CF-R 长管 cm³ (in.³) 10 (0.61) 10 (0.61) 10 (0.61) 10 (0.61) 10 (0.61)
1/8'' NPT,4 VCR,8 VCR,1/2'' 管 cm³ (in.³) 2 (0.122) 2 (0.122) 2 (0.122) 2 (0.122) 2 (0.122)
容许温度          
运行 °C +5 … +60 +5 … +60 +5 … +60 +5 … +60 +5 … +60
真空连接 (1) °C 80 / 250 (2) 80 / 250 (2) 80 / 250 (2) 80 / 250 (2) 80 / 250 (2)
贮存 °C -20 … +65 -20 … +65 -20 … +65 -20 … +65 -20 … +65
重量          
DN 16 ISO-KF,7/16-20 UNF g 80 80 80 80 80
DN 16 CF-R,4 VCR g 100 100 100 100 100
1/8'' NPT,1/2'' 管 g 70 70 70 70 70
8 VCR,DN 16 ISO-KF 长管 g 130 130 130 130 130
DN 16 CF-R 长管 g 140 140 140 140 140
错误信号 V 0 … +0.5 (filament rupture) 0 … +0.5 (filament rupture) 0 … +0.5 (filament rupture) 0 … +0.5 (filament rupture) 0 … +0.5 (filament rupture)
输出电阻 2 x 4.7 2 x 4.7 2 x 4.7 2 x 4.7 2 x 4.7
最小负载电阻 kΩ 10, short-circuit proof 10, short-circuit proof 10, short-circuit proof 10, short-circuit proof 10, short-circuit proof
反应时间 ms 80 80 80 80 80
真空计识别 kΩ 27.0, referenced to supply common 27.0, referenced to supply common 27.0, referenced to supply common 27.0, referenced to supply common 27.0, referenced to supply common
调整 one tactile switch for ATM and HV adjustment one tactile switch for ATM and HV adjustment one tactile switch for ATM and HV adjustment one tactile switch for ATM and HV adjustment one tactile switch for ATM and HV adjustment
电流消耗 mA <500 (max. starting current) <500 (max. starting current) <500 (max. starting current) <500 (max. starting current) <500 (max. starting current)
功耗 W ≤1 ≤1 ≤1 ≤1 ≤1
电气连接 FCC 68 / RJ45 appliance connector, 8 poles, male FCC 68 / RJ45 appliance connector, 8 poles, male FCC 68 / RJ45 appliance connector, 8 poles, male FCC 68 / RJ45 appliance connector, 8 poles, male FCC 68 / RJ45 appliance connector, 8 poles, male
传感器电缆 8 poles plus shielding 8 poles plus shielding 8 poles plus shielding 8 poles plus shielding 8 poles plus shielding
电缆长度 m ≤100 (8 x 0.14 mm2) ≤100 (8 x 0.14 mm2) ≤100 (8 x 0.14 mm2) ≤100 (8 x 0.14 mm2) ≤100 (8 x 0.14 mm2)
暴露于真空的材料 glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435 glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435 glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435 AI2O3, Ni, DIN 1.3981 / 1.4305 / 1.4435 AI2O3, Ni, DIN 1.3981 / 1.4305 / 1.4435
单丝 W W Ni W Ni
容许压力 bar (absolute) 10, limited to inert gases 10, limited to inert gases 10, limited to inert gases 10, limited to inert gases 10, limited to inert gases
安装定位 any any any any any
保护等级 IP40 IP40 IP40 IP40 IP40

(1) 在水平安装方向上

(2) 长管

零件号

PSG500 tungsten
零件号 明细
350-060 皮拉尼真空计
350-061 PSG500 1/8" NPT
350-062 PSG500规管
350-063 PSG500 1/2" Tube
350-064 PSG500 8-VCR (1/2")
350-065 PSG500 4-VCR (1/4")
350-066 PSG500 7/16-20 UNF
350-067 PSG500 DN 16 ISO-KF, ext. body
350-068 PSG500 DN 16 CF-R, ext. body
PSG500-S tungsten, setpoints
零件号 明细
350-080 PSG500-S真空计
350-081 PSG500-S 1/8" NPT
350-082 PSG500-S DN 16 CF-R
350-083 PSG500-S 1/2" Tube
350-084 PSG500-S 8-VCR (1/2")
350-085 PSG500-S 4-VCR (1/4")
350-086 PSG500-S 7/16-20 UNF
350-087 PSG500-S DN 16 ISO-KF, ext. body
350-088 PSG500-S DN 16 CF-R, ext. body
PSG502-S nickel, setpoints
零件号 明细
350-140 PSG502-S真空计
350-141 PSG502-S 1/8" NPT
350-142 PSG502-S DN 16 CF-R
350-143 PSG502-S 1/2" Tube
350-144 PSG502-S 8-VCR (1/2")
350-145 PSG502-S 4-VCR (1/4")
350-146 PSG502-S 7/16-20 UNF
350-147 PSG502-S DN 16 ISO-KF, ext. body
350-148 PSG502-S DN 16 CF-R, ext. body
PSG510-S tungsten, setpoints, ceramic feedthroughs
零件号 明细
350-200 PSG510-S DN 16 ISO-KF
PSG512-S nickel, setpoints, ceramic feedthroughs
零件号 明细
350-300 PSG512-S DN 16 ISO-KF

附件

PSG500 tungsten
零件号 明细
211-001 卡箍 DN 10-16 ISO-KF
PSG500-S tungsten, setpoints
零件号 明细
211-001 卡箍 DN 10-16 ISO-KF
PSG502-S nickel, setpoints
零件号 明细
211-001 卡箍 DN 10-16 ISO-KF
PSG510-S tungsten, setpoints, ceramic feedthroughs
零件号 明细
211-001 卡箍 DN 10-16 ISO-KF
PSG512-S nickel, setpoints, ceramic feedthroughs
零件号 明细
211-001 卡箍 DN 10-16 ISO-KF

备件

PSG500 tungsten
零件号 明细
350-920 PSG500备用传感器
350-921 PSG500 Spare Sensor 1/8" NPT
350-922 PSG500 Spare Sensor DN 16 CF-R
350-923 PSG500 Spare Sensor 1/2" Tube
350-924 PSG500 Spare Sensor 8-VCR (1/2")
350-925 PSG500 Spare Sensor 7/16-20 UNF
350-926 PSG500 Spare Sensor 4-VCR (1/4")
350-927 PSG500 Spare Sensor DN 16 KF,ext.body
350-928 PSG500 Spare Sensor DN 16 CF-R,ext.body
PSG500-S tungsten, setpoints
零件号 明细
350-920 PSG500备用传感器
350-921 PSG500 Spare Sensor 1/8" NPT
350-922 PSG500 Spare Sensor DN 16 CF-R
350-923 PSG500 Spare Sensor 1/2" Tube
350-924 PSG500 Spare Sensor 8-VCR (1/2")
350-925 PSG500 Spare Sensor 7/16-20 UNF
350-926 PSG500 Spare Sensor 4-VCR (1/4")
350-927 PSG500 Spare Sensor DN 16 KF,ext.body
350-928 PSG500 Spare Sensor DN 16 CF-R,ext.body
PSG502-S nickel, setpoints
零件号 明细
350-900 PSG502-S传感器
350-901 PSG502 Spare Sensor 1/8" NPT
350-902 PSG502 Spare Sensor DN 16 CF-R
350-903 PSG502 Spare Sensor 1/2" Tube
350-904 PSG502 Spare Sensor 8-VCR (1/2")
350-905 PSG502 Spare Sensor 7/16-20 UNF
350-906 PSG502 Spare Sensor 4-VCR (1/4")
350-907 PSG502 Spare Sensor DN 16 KF,ext.body
350-908 PSG502 Spare Sensor DN 16 CF-R,ext.body
PSG510-S tungsten, setpoints, ceramic feedthroughs
零件号 明细
350-930 PSG510 Spare Sensor DN 16 KF
PSG512-S nickel, setpoints, ceramic feedthroughs
零件号 明细
350-940 PSG512 Spare Sensor DN 16 KF
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