Gemini™ MxG5xx 大气压至超高真空真空计

 

INFICON Gemini™ 倒置磁控管真空计是所有真空测量应用(专利申请中)的动力源泉。Gemini将两个传感器系统整合在一个小装置中,测量范围从大气压至 1x10 – 9 毫巴。获得专利的超低杂散磁场设计为全新的应用领域开启了大门。独特的可互换式双室传感器单元不用清洗并减少了维护,这使使Gemini成为同类产品中最坚稳和经济的真空计。

Gemini冷阴极和组合真空计配备了完全集成的数字电子设备,使系统集成具有很强的灵活性。冷阴极和皮拉尼组合选项提供了跨越多个应用领域的无缝转换、可靠性、实用性和灵活性。

好处

  • Long lifetime in harsh environments

  • 在恶劣环境下,使用寿命长

  • 低杂散磁场
  • 零维护 - 可换插头
  • 超紧凑尺寸
  • 抗腐蚀馈入装置
  • 可选测量电流
  • 2 relay setpoints (in conjunction with MxG55x EtherCAT Version)
  • EtherCAT and RS232/ RS485 digital interace

典型应用

  • 基本压力监视和控制,在蒸发和溅射镀膜应用中从大气压到高真空。
  • 一般真空测量 - 工业炉、建筑玻璃、半导体、冰箱和空调。
  • 分析和研发应用 – 质谱分析、电子显微镜、医疗、眼科、光学和高能物理。

新闻

新一代冷阴极/冷阴极-皮拉尼组合真空计现在开放订购!

  • Massbild Gemin plus EtherCAT_15.02.2019.PNG

规格

类型 MAG5xx MPG5xx
测量系统 Cold cathode ionization measurement system (according to the inverted magnetron principle) Pirani and cold cathode ionization measurement system (according to the inverted magnetron principle)
测量范围(空气、氮气) 1×10-9 … 1×10-2 1×10-9 … 1000
准确度 (N2)    
1×10-8 … 1×10-2 毫巴 % of reading 30

-

1×10-2 … 100 毫巴 % of reading - 30
100 … 1000 毫巴 % of reading - 50
可重复性 (N2)    
1×10-8 … 1×10-2 毫巴 % of reading 5 -
1×10-8 … 100 毫巴 % of reading - 5
安装定位 any any
容许压力 bar (absolute) 10 (limited to inert gases <55°C) 10 (limited to inert gases <55°C)
容许温度    
运行(环境) °C +5 ... +55 +5 ... +55
法兰烘烤 (1) °C <150 <150
储存 °C -40 ... +70 -40 ... +70
灯丝温度 °C - 120
一年 30 天的相对湿度    
1×10-7 … 1×10-2 毫巴 % <95 (non-condensing) <95 (non-condensing)
1×10-8 … 1×10-2 毫巴 % <70 (non-condensing) <70 (non-condensing)
供电电压    
在量规 (2) V (dc) +14.5 ... +30 +14.5 ... +30
波纹 V (p-p)

<1

<1

功耗 W <2 <2
待连接的保险丝 AT <1 <1
电压范围    
模拟输出 V 0 ... +10.5 0 ... +10.5
测量范围    
3MAx-xxx-xxxN V <+0.5  
3MBx-xxx-xxxP V -  
3MAx-xxx-xxxQ V +0.667 ... +10  
电压比压力    
3MAx-xxx-xxxN volts per decade 1 (logarithmic)  
3MBx-xxx-xxxP volts per decade -  
3MAx-xxx-xxxQ volts per decade 1.33 (logaritmic)  
错误信号    
3MAx-xxx-xxxN V <+0.5  
3MA-xxx-xxxQ V <+0.3  
3MBx-xxx-xxxP V -  
Output impedance

2 x 4.7 (short circuit-proof)

 
Load impedance kΩ >10 (short circuit-proof)  
阶跃响应时间    
p > 10-6 毫巴 ms

<100

<100

p = 10-8 毫巴 s

~1

 
量规标识 (FCC connector gauges)    
3MAx-0xx-000N kΩ -  
3MAx-0xx-000Q kΩ 100  
3MBx-0xx-000P kΩ -  
状态(针 6)    
Current rating mA 100 (sink)  
High Voltage is ON V (dc) +14.5 ... +30 (depending on supply voltage)  
High Voltage is OFF V (dc) 0  
Status signal, digital output (D-sub connector)    
Supply voltage V (dc)

<30

 
Current rating mA 100  
High voltage ON V (dc)

0

 
High voltage OFF open  
电气连接    
3Mxx-0xx-000x FCC68, 8-pin, female  
3Mxx-0xx-010x D-sub, 9-pin, male  
3Mxx-0xx-04xx D-Sub HD, 15-pin, male (for RS232/485 version)  
3Mxx-xxx-x2Gx D-Sub HD, 15-pin, male (for EtherCAT Version)  
传感器电缆    
3Mxx-0xx-000x 8-pin, shielded  
3Mxx-0xx-010x 9-pin, shielded  
3Mxx-0xx-04xx D-Sub HD, 15-pin, male (for RS232/485 version)  
3Mxx-xxx-x2Gx D-Sub HD, 15-pin, male (for EtherCAT Version)  
电缆长度    
FCC connector cable m

<50 (0.14 mm2/ conductor)

 
High voltage (in the measuring chamber)    
Ignition voltage kV <4.5  
工作电压 kV <3.3 <3.3
Current (in the measuring chamber)    
High current µA <380  
Low current µA <130  
Setpoint relays (MxG55x)    
Range (N2) mbar bar 5x10-5 ... 1500  
Relay contact normally open (NO), potential free  
Hysteresis % of threshold 10  
Contact rating of mechanical relays V/A <30/ <1  
Switching time ms <30  
曝露在真空的材料    
3Mx0-xxx-xxxx Ni alloy, Mo, AI2O3, glass, stainless steels  
3Mx3-xxx-xxxx Mo, AI2O3, stainless steels  
3Mx0-11x-xxxx Ni alloy, Mo, Al2O3, glass, Ti, stainless steels  
3Mx3-11x-xxxx Mo, Al2O3, Ti, stainless steels  
内部容量    
DN 25 ISO-KF cm³
DN 40 ISO-KF cm³ ~20.9
DN 40 CF-F cm³ ~25.2  
DN 40 CF-R cm³ ~25.6  
内部容量 cm³ 22.8 22.8
重量 (MxG50x)    
DN 25 ISO-KF g

<280

<280

DN 40 ISO-KF g <320
DN 40 CF-F & CF-R g <570 <570
Weight (MxG55x)    
DN 25 ISO-KF g

<280

<280

DN 40 ISO-KF g <320
DN 40 CF-F & CF-R g <570 <570
防护等级 IP 40 IP 40
CE conformity    
RoHS 2011/65/EU  
EMC 2014/30/EU, EN 61000-6-2, EN 61000-6-3, EN 61326-1  
Safety EN 61010-1  
RS232C / 485C (MxG50x)    
Baud rates kBaud 9.6/ 19.2/ 38.4/ 57.6  
Address 2 switches (address 00 - 255)  
Digital functions Read pressure, select Units: Torr, mbar, Pa, micron, counts. Monitor gauge Status, detailed Alarm and warning Information, safe state allows Definition of behaviour in case of error.  
Connector for RS232 & RS485 D-Sub HD, 15-pin, male  
EtherCAT® (MxG55x)    
Protocol EtherCAT®

 

 
Communication standard

ETG.5003.1  S (R) V1.1.0 4)

ETG.5003.2080 S (R) V1.3.0 5)

 
Node address Explicit Device Identification  
Physical layer 100Base-Tx (IEEE 802.3)  
Digital functions Read pressure, select Units: Torr, mbar, Pa, micron, counts. Monitor gauge Status, detailed Alarm and warning Information, safe state allows Definition of behaviour in case of error.  
EtherCAT connector 2 x RJ45, 8-pin (socket), Input & output  
EtherCAT cable Special Ethernet Patch cable or crossover cable, shielded (CAT5e Quality or higher)  
Cable lenght m (ft.) <100 (330)  

1)没有电子元件。

2)电源单元的最小电压必须与传感器电缆的长度成比例地增加。

3)冷阴极点燃。

Gemini Ordering Information_13.03.2019.PNG

附件

MAG5xx
零件号 明细
211-098 细目过滤中心环组件DN 25 ISO-KF
351-550 MxG50x 点火单元
211-113 中心圈 with baffle DN 25 KF
353-512 Baffle for BPG400
MPG5xx
零件号 明细
211-098 细目过滤中心环组件DN 25 ISO-KF
351-550 MxG50x 点火单元
211-113 中心圈 with baffle DN 25 KF
353-512 Baffle for BPG400

备件

MAG5xx
零件号 明细
351-500 MAG500 spare sensor, 25KF, SS
351-556 Spare ion chamber ti
351-512 MAG500 spare sensor, 40KF, SS
351-536 MAG500 spare sensor, 40CF-R, SS
351-524 MAG500 spare sensor, 40CF-F, SS
351-502 MAG500 spare sensor, 25KF, TI
351-514 MAG500 spare sensor, 40KF, TI
351-538 MAG500 spare sensor, 40CF-R, TI
351-526 MAG500 spare sensor, 40CF-F, TI
351-501 MAG504 spare sensor, 25KF, SS
351-513 MAG504 spare sensor, 40KF, SS
351-537 MAG504 spare sensor, 40CF-R, SS
351-525 MAG504 spare sensor, 40CF-F, SS
351-503 MAG504 Ersatzsensor, 25KF, TI
351-515 MAG504 spare sensor, 40KF, TI
351-539 MAG504 spare sensor, 40CF-R, TI
351-527 MAG504 spare sensor, 40CF-F, TI
351-995 起辉器
351-555 Spare ion chamber ss
MPG5xx
零件号 明细
351-506 MPG500 spare sensor, 25KF, SS
351-518 MPG500 spare sensor, 40KF, SS
351-542 MPG500 spare sensor, 40CF-R, SS
351-530 MPG500 spare sensor, 40CF-F, SS
351-508 MPG500 spare sensor, 25KF, TI
351-520 MPG500 spare sensor, 40KF, TI
351-544 MPG500 spare sensor, 40CF-R, TI
351-532 MPG500 spare sensor, 40CF-F, TI
351-507 MPG504 spare sensor, 25KF, SS
351-519 MPG504 spare sensor, 40KF, SS
351-543 MPG504 spare sensor, 40CF-R, SS
351-531 MPG504 spare sensor, 40CF-F, SS
351-509 MPG504 spare sensor, 25KF, TI
351-521 MPG504 spare sensor, 40KF, TI
351-545 MPG504 spare sensor, 40CF-R, TI
351-533 MPG504 spare sensor, 40CF-F, TI
351-995 起辉器
351-555 Spare ion chamber ss
351-556 Spare ion chamber ti
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