UHV 可烘烤传感器

INFICON UHV 可烘烤晶体传感器拥有经实践检验的可靠性和耐用性,提供超越当前市场上的任何传感器头的最佳热稳定性。可烘烤传感器由 304 号不锈钢、钼、铬镍铁合金、镍和氧化铝材料制成,设计为可承受连续烘烤温度高达 450° C(仅适用于烘烤,实际沉积监控需要水流)。前装式设计允许在侧面插入空间不足的应用中轻松插入晶体支架。

功能

  • 高温铜焊和焊接结构
  • 烘烤温度高达 450℃
  • 晶体闸(选件)
  • 前装式晶体支架
  • 易于安装
  • CF40 馈入装置
  • 馈入件不需要铜焊或焊接
  • 焊接为客户指定长度的传感器/馈入装置组合

规格

类型 Bakeable Sensor w/ Shutter Bakeable Sensor w/out Shutter
最高温度 400° C continuous (for bake only; water flow recommended for actual deposition monitoring) 450°C continuous (for bake only; water flow recommended for actual deposition monitoring)
传感器头部尺寸(最大外壳) 1.35 in. x 1.38 in. x 1.21 in. high (34 mm x 35 mm x 31 mm high 1.35 in. x 1.38 in. x 0.94 in. high (34 mm x 35 mm x 24 mm high)
晶体交换 Front loading, self-contained package for ease of exchange. Cam-type locking handle allows easy removal and good thermal contact. Pneumatically operated shutter flips up for easy crystal exchange. Front loading, self-contained package for ease of exchange. Cam-type locking handle allows easy removal and good thermal contact.
安装

a) Standard—four #4-40 tapped holes on the back of the body

b) Optional—right angle bracket; IPN 007-108

Four #4-40 tapped holes on the back of the body
馈入件

2¾ in. ConFlat®, integral with sensor head

Water, air and coax tubes are semi-rigid, but easily formed (2.0 in. [50.8 mm] minimum bend radius)

2¾ in. ConFlat, integral with sensor head

Water and coax tubes are semi-rigid, but easily formed. (2.0 in. [50.8 mm] minimum bend radius)

实用工具

1) Minimum water flow 150-200 cc/min, 30° C max. (Do not allow to freeze.) (Customer should provide means of easily disconnecting the ¼ in. water tubes during bakeout.)

2) Filtered, oil-free air, regulated at 80 PSIG (5.5 bar) [552 kPa]

3) Solenoid valve, 750-420-G1, 24 VAC or VDC, or equivalent valve required

Minimum water flow 150-200 cc/min, 30° C max. (Do not allow to freeze.) (Customer should provide means of easily disconnecting the ¼ in. water tubes during bakeout.)
材料    
主体和支架 304 type stainless steel 304 type stainless steel
弹簧 Molybdenum and Inconel X-750 Molybdenum and Inconel X-750
水、空气和同轴管线 0.125 in. (3 mm) O.D. water and air x 0.015 in. (0.4 mm) wall thickness seamless 304 stainless steel; 0.188 in. (5 mm) O.D. coax  
其他机械部件 18-8 or 304 stainless 18-8 or 304 stainless
绝缘体 >99% Al2O3 in vacuum; other high density ceramics used elsewhere >99% Al2O3 in vacuum; other high density ceramics used elsewhere
电线

1) Ni (in vacuum)

2) Ni plated Cu (elsewhere)

1) Ni (in vacuum)

2) Ni plated Cu (elsewhere)

铜焊 Vacuum process high temperature Ni-Cr alloy Vacuum process high temperature Ni-Cr alloy
晶体 0.550 in. (13.97 mm) diameter 0.550 in. (13.97 mm) diameter
UHV PN.png

附件

零件号 明细
750-420-G1 电磁阀,24 伏(与带闸门和多晶体传感器配合使用)

耗材

名称 说明
石英监控器晶体 石英监控器晶体

备件

零件号 明细
007-007 止动弹簧(用于晶体支架)
007-064 陶瓷夹持器
007-094 Clamping Sring, UHV Bakeable Sensor
007-095 Handle, UHV Bakeable Sensor
007-098 母型连接器(包括套圈和螺母)
007-099 可烘烤头部触点
007-100 High Temperature BNC Insulator
007-103 Insulator, UHV Bakeable Sensor
007-104 High Temperature BNC Body, Bakeable
007-147 Vented Screw, 4-40 x 3/8 in.
007-155 BRAZE ASM 12 IN. 206-804-G1
007-156 BRAZE ASM 20 IN 206-804-G2
007-157 BRAZE ASM 30 IN 206-804-G3
007-228 SPEC,4-40 X 5/8 VENTED SHC SC
007-267-P2 Spreader Bar, UHV Bakeable Sensor
007-268-P1 Shoulder Washer, UHV Bakeable Sensor
007-269-P1 Shoulder Washer, UHV Bakeable Sensor
008-007 CRYSTAL SNATCHER
059-0084 Gasket, Copper, Bakeable Sensor Actuator
070-201 #4 开口紧锁垫圈
084-069-P1 SCREW 4-40 x .187 LG PHIL FLAT HD SS
750-018-P3 SPLIT CLAMP {THD} {CLEAN} @
750-018-P5 SPLIT CLAMP {CLEAN} @
750-022-G5 ACTR/AIR LINE 12 IN {CLEAN}
750-022-G6 ACTR/AIR LINE 20 IN {CLEAN}
750-022-G7 Actuator/Air Line 76.2 cm (30 in.),Clean
750-028-G5 BK XTAL SNS/FT/AIR 12 IN CLEAN
750-028-G6 BK XTAL SNS/FT/AIR 20 IN CLEAN
750-028-G7 BK XTAL SNS/FT/AIR 30 IN CLEAN
750-115-P4 联轴器(安装到波纹管组件)
750-118-P4 ACT SUPPORT W/ DOWEL
750-120-G3 ASSY,SHAFT
750-216-G1 闸门组件(闸门模块的组成部分)
750-218-G1 Crystal Holder, Bakeable Sensor
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