SKY® CDG025D 0.1 ... 1000 托 / 毫巴

The INFICON SKY CDG025D Capacitance Diaphragm Gauge line of highly accurate temperature compensated manometers is designed for stable performance in harsh manufacturing tool environments. Advanced digital electronics improve gauge performance and offer easy handling features such as one pushbutton zero function and setpoint adjustment. The corrosion resistant ceramic sensor provides excellent zero stability with a long life expectancy of several million pressure cycles, including atmospheric bursts. A unique sensor shielding (patent pending) protects the gauge from process contamination. A robust mechanical design and digital electronics improve EMC compatibility, long term stability and temperature compensation. The CDG025D sets new standards for fast stability after power on and fast recovery from atmospheric pressure exposure.

INFICON's CDG025D are direct drop-in replacements for the listed part numbers below and many other drop-in products are available on request.
 MKS
 part number
 MKS
 part number
 Oerlikon
  Leybold
 part number
 Flange type Full scale INFICON
 part number
 INFICON
 part number
 626 series AA01 CTR 100   [Torr] CDG025D CDG025D X3*
 626C13TDE AA01A13TGAS3B 230 300 DN16 ISO-KF 1000 375-001 3CB1-F51-2300
 626C12TDE AA01A12TGAS3B 230 301  100 376-001 3CB1-C51-2300
 626C21TDE AA01A21TGAS3B 230 340 V01  20 383-001 3CB1-A51-2300
 626C11TDE AA01A11TGAS3B 230 302  10 377-001 3CB1-951-2300
 626C01TDE AA01A01TGAS3B 230 303  1 378-001 3CB1-651-2300
 626C.1TDE  230 304V01  0.1 379-001 3CB1-351-2300
       
 626C13TCE AA01A13THAS3B 230 305 DN16 CF-R 1000 375-002 3CB1-F53-2300
 626C12TCE AA01A12THAS3B 230 306  100 376-002 3CB1-C53-2300
 626C11TCE AA01A11THAS3B 230 307  10 377-002 3CB1-953-2300
 626C01TCE AA01A01THAS3B 230 308  1 378-002 3CB1-653-2300
 626C.1TCE  230 309 V01  0.1 379-002 3CB1-353-2300
       
 626C13TBE AA01A13TCES3B 230 310 Cajon 8 VCR 1000 375-003 3CB1-F5E-2300
 626C12TBE AA01A12TCES3B 230 311  100 376-003 3CB1-C5E-2300
 626C11TBE AA01A11TCES3B 230 312  10 377-003 3CB1-95E-2300
 626C01TBE AA01A01TCES3B 230 313  1 378-003 3CB1-65E-2300
 626C.1TBE  230 314 V01  0.1 379-003 3CB1-35E-2300
       
 626C13TAE AA01A13TBAS3B 230 315 1/2" tube 1000 375-000 3CB1-F59-2300
 626C12TAE AA01A12TBAS3B 230 316  100 376-000 3CB1-C59-2300
 626C11TAE AA01A11TBAS3B 230 317  10 377-000 3CB1-959-2300
 626C01TAE AA01A01TBAS3B 230 318  1 378-000 3CB1-659-2300
 626C.1TAE  230 319 V01  0.1 379-000 3CB1-359-2300
  * SEMI version pure ceramic, double bag
             listed companies: MKS Instruments, Andover, MA, USA;  Leybold GmbH, Cologne, Germany)

好处

  • Fully compatible with competive products
  • 全刻度范围从 100 毫托 … 1000 托
  • 电源接通后快速稳定
  • 暴露于大气压后快速恢复
  • 防腐陶瓷传感器
  • 卓越的长期信号稳定性
  • 温度补偿
  • 传感器防污染保护
  • 一键调零功能
  • 电源范围广

典型应用

  • 用于刻蚀、CVD、PVD、ALD 的半导体生产设备
  • 数据存储和显示制造设备
  • 工业真空设备
  • 常规高精度压力测量
  • CDG025D dimensions

规格

类型 1000 Torr / 1100 mbar 500 ... 10 Torr / mbar 1 Torr / mbar 0.25 Torr 0.1 Torr / mbar
精度 (1) % of reading 0.2 0.2 0.2 0.25 0.5
温度效应          
零点 percent FS/°C 0.005 0.005 0.015 0.02 0.02
满量程 % of reading / °C 0.01 0.01 0.01 0.03 0.03
分辨率 percent FS 0.003 0.003 0.003 0.003 0.003
压力,最大 kPa (absolute) 400 260 260 130 130
反应时间 (2) ms 30 30 30 130 130
最低读数 percent FS 0.01 0.01 0.01 0.01 0.01
建议的最低读数 percent FS 0.05 0.05 0.05 0.05 0.05
建议的最低控制压力 percent FS 0.5 0.5 0.5 0.5 0.5
温度          
运行(环境) °C +5 … +50 +5 … +50 +5 … +50 +5 … +50 +5 … +50
在法兰处烘烤 (3) °C ≤110 ≤110 ≤110 ≤110 ≤110
贮存 °C –40 … +65 –40 … +65 –40 … +65 –40 … +65 –40 … +65
电源电压 V (dc) +14 … +30 +14 … +30 +14 … +30 +14 … +30 +14 … +30
功耗 W ≤1 ≤1 ≤1 ≤1 ≤1
输出信号(模拟) V (dc) 0 … +10 0 … +10 0 … +10 0 … +10 0 … +10
保护等级 IP 30 IP 30 IP 30 IP 30 IP 30
标准          
CE 合规 EN 61000‑6‑2, EN 61000-6-3, EN 61010 & RoHS EN 61000‑6‑2, EN 61000-6-3, EN 61010 & RoHS EN 61000‑6‑2, EN 61000-6-3, EN 61010 & RoHS EN 61000‑6‑2, EN 61000-6-3, EN 61010 & RoHS EN 61000‑6‑2, EN 61000-6-3, EN 61010 & RoHS
ETL 认证 UL 61010‑1, CSA 22.2 No.61010‑1 UL 61010‑1, CSA 22.2 No.61010‑1 UL 61010‑1, CSA 22.2 No.61010‑1 UL 61010‑1, CSA 22.2 No.61010‑1 UL 61010‑1, CSA 22.2 No.61010‑1
电气连接 D-sub, 15 pole, male D-sub, 15 pole, male D-sub, 15 pole, male D-sub, 15 pole, male D-sub, 15 pole, male
暴露于真空的材料 Aluminum oxide ceramic (AI2O3), Vacon 70 (5), stainless steel (AISI 316L (6)), AgCuTi hard solder, sealing glass Aluminum oxide ceramic (AI2O3), Vacon 70 (5), stainless steel (AISI 316L (6)), AgCuTi hard solder, sealing glass Aluminum oxide ceramic (AI2O3), Vacon 70 (5), stainless steel (AISI 316L (6)), AgCuTi hard solder, sealing glass Aluminum oxide ceramic (AI2O3), Vacon 70 (5), stainless steel (AISI 316L (6)), AgCuTi hard solder, sealing glass Aluminum oxide ceramic (AI2O3), Vacon 70 (5), stainless steel (AISI 316L (6)), AgCuTi hard solder, sealing glass
内部容积          
1/2'' 管 cm³ (in.³)        
DN 16 ISO KF cm³ (in.³)        
DN 16 CF-R cm³ (in.³)        
8 VCR® cm³ (in.³)        
重量          
1/2'' 管 g        
DN 16 ISO KF g        
DN 16 CF-R g        
8 VCR® g        

(1) 非线性,迟滞,在 25 °C 环境工作温度中的可重复性,2 小时工作后无温度影响。

(2) 提高 10 … 90 % FS

(3) 非运行

(4) 仅限 CDG025D-S

(5) 28% 镍,23% 钼,49% 铁

(6) 18% 铬,10% 镍,3% 钼,69% 铁

  • CDG025D PN.png

零件号

1000 Torr / 1100 mbar
零件号 明细
375-000 CDG025D 1`000 Torr; 1/2¨tube
375-001 CDG025D型陶瓷薄膜规
375-002 CDG025D 1`000 Torr; DN16CF-R
375-003 CDG025D 1000 Torr; 8-VCR
376-000 CDG025D 100 Torr; 1/2¨tube
376-001 CDG025D 100 Torr; DN16ISO-KF
376-002 CDG025D 100 Torr; DN16CF-R
376-003 CDG025D 100 Torr; 8-VCR
377-000 CDG025D 10 Torr; 1/2¨tube
377-001 CDG025D型陶瓷薄膜规
377-002 CDG025D 10 Torr; DN16CF-R
377-003 CDG025D 薄膜规
378-000 CDG025D 1 Torr; 1/2¨tube
378-001 CDG025-D薄膜规
378-002 CDG025D 1 Torr; DN16CF-R
378-003 CDG025D型陶瓷薄膜规
379-000 CDG025D 0.1 Torr; 1/2¨tube
379-001 CDG025D 0.1 Torr; DN16ISO-KF
379-002 CDG025D 0.1 Torr; DN16CF-R
379-003 CDG025D 0.1 Torr; 8-VCR
383-001 CDG025D 20 Torr; DN16ISO-KF
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