Crystal 12® 传感器

自动晶体切换最大限度地延长生产时间

INFICON Crystal 12 传感器与INFICON IC6 薄膜沉积控制器结合使用时,可自动更换其晶体,而无需中断过程。晶体不稳定或失效时,IC6 会立即向 Crystal 12 传感器旋转传送带发送信号,要求其立即将新晶体旋转到位,从而实现持续沉积速率监控。为进一步最小化停工时间,可以将晶体预先加载到另一个可选旋转传送带上,这样,可以直接轻松快速地更换装有失效晶体的旋转传送带,从而最大限度缩短系统打开的时间。

功能

  • 装有 12 颗晶体,可进行可靠的自动转换,从而最大限度延长过程运行时间
  • 易于拆卸的旋转传送带允许快速更换所有 12 颗晶体
  • 晶体转换由空气驱动完成(竞争产品是使用生热电机),因而晶体温度非常稳定
  • 易于拆卸的前沉积罩保护晶体和旋转传送带上不会积存材料,从而最大限度减少拆卸整个传感器以进行维护的必要性
  • 可选安装后套件允许用户根据公制硬件大小自行修改

规格

类型 Crystal 12 Sensor
无水时的最高烘烤温度 130°C
最小水流时的最高工作等温环境温度 300° C
尺寸(最大外壳) 4.0 in. (102 mm) dia. x 3.3 in. (84 mm) high 4.75 in. (121 mm) dia. x 3.46 in. (88 mm) with optional mounting posts installed
水管和空气管长度 Standard 30 in. (762 mm)
晶体交换 Front-loading
安装 Six #4-40 tapped holes on the back of the sensor body, six #4-40 tapped holes on outside circumference. Three #6-32 tapped holes with optional mounting kit (IPN 750-670-G1).
重量 4.92 lb. (2.23 kg)
安装要求  
馈入件

Qty (1) 2-3/4 in. ConFlat® with one coaxial feedthrough, two pass water, one air, IPN 750-685-G1,

or,

Qty (1) 750-685-G2, with one coaxial feedthrough three tube with Ultra-Torr compression fittings

or,

Qty (1) 1 in. bolt with one coaxial feedthrough, two pass water, one air IPN 750-030-G1

安装 User to provide mounting structure adequate to support weight of Crystal12 and designed to facilitate removal and replacement with minimal change in exact position. An optional mounting post kit, IPN 750-670-G1, may be purchased for this purpose.
空气和水连接 User to provide vacuum-tight braze joints or connectors for the water and air tubes. Valve assembly for air, IPN 750-420-G1 (not provided), with a 0.022 in. restrictor orifice installed by the user. (Orifice included with Crystal12 accessory kit.)
实用工具 Minimum water flow 150-200 cc/min, 30° C max (Do not allow water to freeze). Coolant should not contain chlorides as stress corrosion cracking may occur. Regulated air supply 80-90 PSIG (5.5 bar – 6.2 bar) [550 kPa - 620 kPa] 2 meter maximum length of 1/8 in. tubing between sensor head and the solenoid valve.
材料  
板、材料罩、机械部件、主体和圆盘 304 type stainless steel
弹簧、电气触点 Au plated Be-Cu, Au Plated 302 stainless steel
水管和空气管 S-304, 0.125 in. (3.2 mm) O.D. x .016 in. (0.4 mm) Wall Thickness x 30 in. Long (762 mm) seamless stainless steel tubing
连接器 Stainless steel
绝缘体 Teflon, Peek®
电缆 Teflon insulated copper plated steel
晶体 0.550 in. (13.97 mm) diameter
1 in. 螺栓和 Ultra-Torr(压缩接头)端接:  
材料 304 stainless steel, Teflon, ceramic, beryllium nickel, VITON®
温度 Operational environment to 300° C with water cooling or 165° C without
安装 1.015 in. ±0.010 in. diameter aperture
CF 40 焊接式端接:  
材料 304 stainless steel, Teflon, ceramic, beryllium nickel
温度 Operational environment to 450° C with water cooling or 165° C without
安装 Mates with 2 ¾ in. ConFlat type flanges with 1.375 in. I.D. min.
Crystal12_OrderChart_2013_web-01.png

附件

名称 说明
QCM 传感器馈入件 QCM 传感器馈入件
Crystal 12 Sensor
零件号 明细
750-420-G1 电磁阀,24 伏(与带闸门和多晶体传感器配合使用)

耗材

名称 说明
石英监控器晶体 石英监控器晶体

备件

Crystal 12 Sensor
零件号 明细
750-276-P3 XTAL12 ACTUATOR COVER PASSIVATED
750-644-G1 CAROUSEL HOUSING WELDMENT
750-658-G1 Deposition Shield Assembly, Crystal 12
750-286-P2 Pneumatic Actuator,CrystalSix/Crystal 12
750-291-P1 Detent, CrystalSix/Crystal 12
750-294-P2 Stop Ratchet, CrystalSix/Crystal 12
750-293-P2 Ratchet, CrystalSix/Crystal 12
750-256-P2 Extension Spring
750-252-P2 DET,SPRING POST
750-649-G1 Electrical Connection, Crystal 12
750-295-G1 Pawl/Actuator Stem, Crystal 12 Sensor
750-258-P2 DET - Bearing Shaft
070-0779 Ball Bearing, CrystalSix
750-652-G1 Crystal Carousel, Crystal 12 Sensor
750-650-P1 RESISTOR NETWORK APERTURE PLATE
070-1253 Dowel Pin, CrystalSix
750-651-P1 RESISTOR NETWORK SUPPORT
750-655-P1 RESISTOR NETWORK INSULATOR
750-642-G1 Resistor Network Grid Weldment
750-661-P1 Contact Terminal, Crystal 12
750-656-P1 CRYSTAL INSULATOR
321-038-P6 Leaf Spring, Crystal 12
750-657-P1 Leaf Spring, Grounding, Crystal 12
750-671-P1 Torsion Spring, Crystal 12
750-626-P1 Spring, Crystal 12 and Sputtering Sensor
750-647-P1 Carousel Spindle Body, Crystal 12
070-1268 Bearing, CrystalSix
070-1254 E-RING BOWED #H51310075STBtruarc
750-660-P1 Location Screw, 6-32, Crystal 12
007-126 DET-30"STN STL SEAMLESS TUBING
070-201 #4 开口紧锁垫圈
084-004 #4-40 X 0.187 内六角头螺钉
070-398 5103-12H,EXT CRESCENT RET RING
070-0867 B4-10,1/8"SHAFT SPACER .094TH
070-170 #2 SPLIT LOCKWASHER SS
070-177 #4-40 X 3.12 六角头螺钉
080-038 SCREW 0-80 x .375 LG PHIL PAN HD SS
082-032 Lock Washer, #2, Stainless Steel
082-045 #2-56 x 0.187 十字槽螺钉
084-054 开牙锁定垫片4号
082-022 Washer, #2, Flat, Stainless Steel
082-024 Screw, Socket Head, 2-56 x 0.250 in.
750-292-P2 Detent Spacer, CrystalSix/Crystal 12
080-013 开口垫片#0
080-007-P1 Flat Washer, Stainless Steel
080-009-P1 #0-80 X 0.188 凹头螺钉
084-048 SCREW 4-40 x .250 LG PHIL FLAT HD SS
750-665-P1 Shoulder Screw, 2-56, Torsion Spring
084-093 Screw, Socket Head, 4-40 x 1.125 in.
086-084-P2 #6-21 x 1/8 固定螺钉
086-041 #6 平垫圈
086-038 #6 开口紧锁垫圈
086-036 #6-32 x 3/8 凹头螺钉
In-vacuum cables
321-039-G12 真空电缆,15.2 厘米(6 英寸)
007-252 真空电缆,30.5 厘米(12 英寸)
321-039-G11 真空电缆,61.0 厘米(24 英寸)
007-044 真空电缆,78.1 厘米(30.75 英寸)
007-059 真空电缆,91.4 厘米(36 英寸)
007-061 真空电缆,121.9 厘米(48 英寸)- 需要 ModeLock 控制器
321-039-G13 真空电缆,154.2 厘米(60 英寸)- 需要 ModeLock 控制器
321-039-G14 真空电缆,182.9 厘米(72 英寸)- 需要 ModeLock 控制器
321-039-G15 真空电缆,3.5 米(137.8 英寸)- 需要 ModeLock 控制器和4 米 XIU
321-039-G16 真空电缆,4 米(157.5 英寸)- 需要 ModeLock 控制器和4 米 XIU
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