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XTC/3 Thin Film Deposition Controller
Advanced, Affordable Rate Control for Single or Multiple Layers
Now get everything you want in a thin film deposition controller for single and multiple-layer processes. The XTC/3 with patented ModeLock provides proven mode hop prevention for consistent quality. With the XTC/3 Thin Film Deposition Controller, you get highly accurate control of deposition rate and thickness, the capacity for virtually any number of layers, easy installation, and extremely high reliability to ensure productivity.
INFICON, the global leader in thin film deposition control, now offers an instrument with a remarkably low cost of ownership for unprecedented value.
Whether your control needs reflect production or research and development use, you will find a precise match in the INFICON XTC/3.
Worldwide INFICON Support
No matter where you are, you get fast answers, attentive service, and maximum uptime. With offices around the world, INFICON is the only manufacturer of thin film deposition controllers to offer you local service and technical support around the world.
Features
- Available in single-layer and multiple-layer models
- Patented ModeLock technology prevents film thickness errors caused by mode-hopping
- Supports INFICON Crystal 12®, Crystal Six®, and dual sensor automatic crystal switching for maximum productivity
- XTC/3M multiple-layer model supports up to 99 processes, 999 layers, 32 films, 2 sensors, and two sources
- XTC/3S single-layer model supports up to 9 films, 2 sensors, and two sources
- Easy-to-read TFT LCD graphics displays
- Films and processes can be assigned unique, descriptive names for easy retrieval
- Ethernet connection available
- Free-standing (no computer necessary) or optional Windows® software for PC operation
- Plug-and-play replacement for INFICON XTC/2 controllers (limited to XTC/2 features and command set)
Typical Applications
- High End Optical Coatings
News
The XTC/3 front panel has been re-designed to meet our new INFICONcorporate standards.
The XTC/3M is the first thin film product to incorporate the new design and
is currently shipping on new products. The new front panel design on the
XTC/3S will start shipping in late 2013. Front panels for other thin
film products will be updated in 2014 and 2015.
Specifications
Type | XTC3/S | XTC3/M | |
---|---|---|---|
Frequency Resolution |
±0.028 Hz @ 6 MHz |
±0.028 Hz @ 6 MHz |
|
Measurement Frequency Range | 6.0 to 5.0 MHz (fixed) | 6.0 to 5.0 MHz (fixed) | |
Measurement Interval | 0.25 seconds | 0.25 seconds | |
Thickness & Rate Resolution / Measurement (1) | ±0.034 Å | ±0.034 Å | |
Measurement Technology | ModeLock | ModeLock | |
Number of Processes | 1 | 99 | |
Number of Layers | 1 | 999 | |
Number of Material Programs (or Films) | 9 | 32 | |
Number of Sensor Inputs | 2 | 2 | |
CrystalSix / Crystal 12 Sensor Support | Yes | Yes | |
Support XTAL 2 Switch | Yes | Yes | |
Number of Source Outputs | 2 | 2 | |
Computer Communications | RS232 standard, Ethernet TCP/IP optional | RS232 standard, Ethernet TCP/IP optional | |
Max RS232 Baud Rate | 115.2 KBaud | 115.2 KBaud | |
Automatic Crystal Switch | Yes | Yes | |
Number of Relays | 12, Not Event Assignable | 12, Event Assignable | |
Number of Programmable Relay Functions | 1 | 1 | |
Functions per Relay | 1 | 1 | |
Relay Voltage Rating | 30VDC or 30VAC RMS or 42V peak at 2.5 Amps | 30VDC or 30VAC RMS or 42V peak at 2.5 Amps | |
Number of Inputs | 8 TTL, 24VDC Max | 8 TTL, 24VDC Max | |
Number of Programmable Input Functions | 1, Not Event Assignable | 1, Event Assignable | |
Number of Recorder Outputs | 1 | 1 | |
Manual Power / Hand Held Controller | Yes | Yes | |
Exhaust Fan | No Exhaust Fan | No Exhaust Fan | |
Test Mode | Yes | Yes | |
Shutter Delay | Yes | Yes | |
Secondary Tooling | Yes | Yes | |
Case Dimensions | half rack, 2U high | half rack, 2U high | |
Rate and Thickness Display Resolution | 0.1 A/s for 0.0 to 99.9 A/s, 1 A/s for 100 to 999 A/s, display thickness resolution = 1 A | 0.1 A/s for 0.0 to 99.9 A/s, 1 A/s for 100 to 999 A/s, display thickness resolution = 1 A | |
Film Select via Inputs | Yes | No | |
User Guide Languages | English, Chinese | English, Chinese | |
Control Loops | PID | PID | |
Software to Operate from PC | Yes | Yes | |
Datalogging | Yes | Yes | |
Quality and Stability Function | Yes | Yes | |
Sample and Hold (RateWatcher™) | Yes | Yes | |
Crucible Selection | Yes | Yes | |
Crucible Feedback Input | Yes | Yes | |
Select Control Voltage Polarity | Yes, +/- 2.5, 5, 10 Volts; 15-bit Resolution | Yes, +/- 2.5, 5, 10 Volts; 15-bit Resolution | |
Program Lock Code | Yes | Yes | |
Display with Graphics | Yes | Yes | |
User Labeled Processes (cell phone style alphanumeric entry) | No | No | |
User Labeled Films (cell phone style alphanumeric entry) | No | No | |
Transfer Sensor Control | Yes | Yes | |
XTC/2 RS232 Communications Compatibility | Yes (limited) | Yes (limited) |
(1) Tooling/density = 100/1, fundamental frequency = 6 MHz
Accessories
Name | Description |
---|---|
Front Load Single Sensor | Front Load Single Sensor |
Front Load Dual Sensor | Front Load Dual Sensor |
Cool Drawer Single Sensor | Cool Drawer Single Sensor |
Cool Drawer Dual Sensor | Cool Drawer Dual Sensor |
UHV Bakeable Sensor | UHV Bakeable Sensor |
Sputtering Sensor | Sputtering Sensor |
CrystalSix® Sensor | CrystalSix® Sensor |
Crystal 12® Sensor | Crystal 12® Sensor |
RSH-600 Rotary Sensor | RSH-600 Rotary Sensor |
Part Number | Description |
---|---|
780-700-G1 | Ethernet Computer Communications Module |
755-262-G1 | Handheld Power Controller (for manual power control) |
780-702-G1 | One unit rack mount kit - Provides all required materials to mount one XTC/3 unit in a standard 19 in. rack |
780-702-G2 | Two unit rack mount kit - Provides all required materials to mount two XTC/3 units side by side in a standard 19 in. rack |
780-032-G1 | XTC/3M or XTC/3S Editor / Monitor Software, on CD |
780-038-G1 | XTC/3M or XTC/3S Communications Library (DLL) on CD |
779-220-G1 | CrystalTwo® Switch, 15.2 cm (6 in.) BNC Cables |
779-220-G2 | CrystalTwo® Switch, 50.8 cm (20 in.) BNC Cables |
Oscillator kits | (Includes oscillator and cables) |
780-611-G15 | XIU PKG with 15 ft. (4.6 m) cable - Fore use with XTC/3 |
780-611-G30 | XIU PKG with 30 ft. (9.1 m) cable - For use with XTC/3 |
780-611-G50 | XIU PKG with 50 ft. (15.2 m) cable - For use with XTC/3 |
780-611-G100 | XIU PKG with 100 ft. (30.5 m) cable - For use with XTC/3 |
780-612-G15 | 4m XIU PKG with 15 ft. (4.6 m) XIU cable - Includes 4 m in-vacuum cable and 6 in. BNC (XIU to feedthrough) cable - For use with XTC/3 |
780-612-G30 | 4m XIU PKG with 30 ft. (9.1 m) XIU cable - Includes 4 m in-vacuum cable and 6 in. BNC (XIU to feedthrough) cable - For use with XTC/3 |
780-612-G50 | 4m XIU PKG with 50 ft. (15.2 m) XIU cable - Includes 4 m in-vacuum cable and 6 in. BNC (XIU to feedthrough) cable - For use with XTC/3 |
780-612-G100 | 4m XIU PKG with 100 ft. (30.5 m) XIU cable - Includes 4 m in-vacuum cable and 6 in. BNC (XIU to feedthrough) cable - For use with XTC/3 |
780-613-G15 | 4m XIU PKG with 15 ft. (4.6 m) XIU cable - Includes 3.5 m in-vacuum cable and 20 in. BNC (XIU to feedthrough) cable - For use with XTC/3 |
780-613-G30 | 4m XIU PKG with 30 ft. (9.1 m) XIU cable - Includes 3.5 m in-vacuum cable and 20 in. BNC (XIU to feedthrough) cable - For use with XTC/3 |
780-613-G50 | 4m XIU PKG with 50 ft. (15.2 m) XIU cable - Includes 3.5 m in-vacuum cable and 20 in. BNC (XIU to feedthrough) cable - For use with XTC/3 |
780-613-G100 | 4m XIU PKG with 100 ft. (30.5 m) XIU cable - Includes 3.5 m in-vacuum cable and 20 in. BNC (XIU to feedthrough) cable - For use with XTC/3 |
Oscillator Only | (No cables included) |
780-600-G1 | XTC/3 XIU (oscillator) - For XIU to sensor head cable lengths of 6 in. to 72 in. (15 cm to 183 cm) |
780-600-G2 | XTC/3 XIU (oscillator) - For XIU to sensor head cable lengths of 118 in. to 157 in. (3 m to 4 m) |
Cables | |
755-257-G6 | 15.2 cm (6 in.) BNC cable, XIU to vacuum feedthrough |
600-1261-P15 | 4.6 m (15 ft.) cable, Cgynus 2, IC6 or XTC/3 controller to XIU |
600-1261-P30 | 9.1 m (30 ft.) cable, Cygnus 2, IC6 or XTC/3 controller to XIU |
600-1261-P50 | 15.2 m (50 ft.) cable, Cygnus 2, IC6 or XTC/3 controller to XIU |
600-1261-P100 | 30.5 (100 ft.) cable, Cygnus 2, IC6 or XTC/3 controller to XIU |
Consumables
Name | Description |
---|---|
Quartz Monitor Crystals | Quartz Monitor Crystals |
Brochures
- XTC/3 Thin Film Deposition Controller (English) (492 kB)
- XTC/3 Thin Film Deposition Controller (Japanese) (492 kB)
Manuals
- XTC/3 Thin Film Deposition Controller Operating Manual (English) (7 MB)
- XTC/3 Thin Film Deposition Controller Operating Manual (German) (5 MB)
- XTC/3 Thin Film Deposition Controller Operating Manual (Chinese) (1 MB)
- XTC/3 Software Editor Operating Manual (English) (2 MB)
- XTC/3 Communications Library Operating Manual (English) (1 MB)
- CrystalTwo Switch Instruction Sheet (English) (469 kB)