UL3000 Fab ULTRA (***NEW***)

and UL3000 Fab Mobile Helium Leak Detector

 

ULTRATEST ™ sensor  technology

 

Specifically designed for the needs of leak checking in semiconductor applications.

 

It features flexibility, mobility, fast start up, high sensitivity, fast and precise test results, and reliability.

 

OUTSTANDING ADVANTAGES FOR THE UL3000 FAB ULTRA MODEL (NEW)

 

  • Faster pump down (evacuation) times due to higher air pumping speed.
  • Lower total cost of ownership (TCO) due to low maintenance roots roughing pump.
  • Start leak checking earlier as HYDRO·S software eliminates the water vapor background, making it possible to quickly reach sensitive measurement ranges
  • The UL3000 Fab ULTRA offers also an improved sniffer capability by using the well proven sniffer line SL3000 which has up to 10 m length. The SL3000 has a separate connection port, thus no connection to the vacuum inlet is required.

 

Both models feature

 

FAST RESULTS

 

The improved vacuum system with low maintenance vacuum pumps allows the detection of leaks starting from atmospheric pressure. The rugged mass spectrometer system ensures long running time and low maintenance costs.

 

ROTATABLE DISPLAY AND REMOTE CONTROLLABLE USER INTERFACE

 

The new touch screen display shows test results and status information even from a long distance. Easy operation via user guided menu structure, even for inexperienced operators. A wireless control of the UL3000 Fab (ULTRA) is possible via smartphone or tablet - without special software or Apps. Recording and storage of test results via push button can be transferred to other storage media for further analysis.

 

SLIM DESIGN FOR ADVANCED MANEUVERABILITY

 

A low center of gravity, big wheels, ergonomically designed handle and the slim housing enable good mobility of the UL3000 Fab (ULTRA) even in tight spaces.

 

Specifications

UL3000 Fab

UL3000 Fab ULTRA

Min. detectable leak rate for helium (vacuum method) <5 x 10-12 mbar l/s
Min. detectable leak rate for helium (sniffer mode) <5 x 10-8 mbar l/s
Max. inlet pressure (MASSIVE mode) 1000 mbar
Pumping speed during evacuation >32 m³/h >36 m³/h
Evacuation time of 1000 l to 1 mbar from atm. ~ 18 min. ~ 13 min.
Helium pumping speed (high sensitive mode ULTRA) 4 l/s
Response time <1 s
Time until ready for operation <3 min
Detectable masses (ULTRATEST Sensor Technology) 2, 3, 4 (H2, 3He, He)
Ion source 2 filaments, iridium/yttria oxide coated
Test port DN 25 KF
Adjustable triggers 4
Interface 2 x USB, Ethernet / LAN
Supply voltage 100 to 240 V 50/60 Hz (AC)
Power consumption typ. 700 VA, max. 1500 VA
Dimensions (L x W x H) 1050 x 472 x 987 mm (42 x 21 x 34 in.)
Weight 118 kg 132 kg
Permissable ambient temperature range (during operation) 10 to 40 °C

UL3000 Fab ULTRA

Additional Features

-

HYDRO·S, separate port for sniffer line SL3000, vacuum hose holder

Advantages

  • Save Time with I·CAL software algorithm for fast measurements in the range of 10-9 to 10-12 mbar·l/s
  • Most efficient leak checking using I·ZERO 2.0 with improved intelligent function for fast background suppression while maintaining high measurement sensitivity
  • Applicable for vacuum and sniffer leak search
  • Minimize leak checking efforts through quick evacuation and response time
  • Time saved by easy maneuverability through slim design
  • Low total cost of ownership (TCO) enabled by robust ion source (3 year warranty) and counterflow vacuum system
  • Easy to use, operator-guided HMI with full color high resolution rotatable display
  • UL3000 Fab ULTRA: Start leak checking earlier as HYDRO·S software eliminates the water vapor background, making it possible to quickly reach sensitive measurement ranges
  • UL3000 Fab ULTRA: Faster pump down (evacuation) times due to higher air pumping speed of roots pump
  • UL3000 Fab ULTRA: Lower total cost of ownership (TCO) due to low maintenance roots roughing pump.
  • UL3000 Fab ULTRA: The leak detector offers also an improved sniffer capability by using the well proven sniffer line SL3000 which has up to 10 m length. The SL3000 has a separate connection port, thus no connection to the vacuum inlet is required.

Typical Applications

  • Semiconductor Fabs
  • Flat Panel Display manufacturing
  • Solar Cell fabrication
  • Glass and Web (roll to roll) coating
  • General vacuum coating & applications

Specifications

Type UL3000 Fab / UL3000 Fab ULTRA (***NEW***)
Min. detectable leak rate for helium (vacuum method) mbar•L/s < 5 x 10-12
Min. detectable leak rate for helium (sniffer mode) mbar•L/s < 5 x 10-8
Max. Inlet pressure (MASSIVE mode) mbar 1000
Pumping speed during evacuation m³/h >32                          >36
Evacuation time of 1000 l to 1 mbar from atm. min ~18                           ~13
Helium pumping speed (high sensitive mode ULTRA) L/s 4
Response time s <1
Time until ready for operation min <3
Detectable masses (ULTRATEST Sensor Technology) 2, 3, 4 (H2, 3He, He)
Ion source 2 filaments, iridium/yttria oxide coated
Test port DN 25 KF
Adjustable triggers 4
Interfaces 2 x USB, Ethernet / LAN
Supply voltage 100 to 240 V 50/60 Hz (AC)
Power consumption typ. 700 VA, max. 1500 VA
Dimensions (L x W x H) 1050 x 472 x 987
Weight kg 118                           132
Permissable ambient temperature range (during operation) °C 10 to 40
Additional Features Roots dry pump with highest air pumping speed, HYDRO·S, separate sniffer line port for SL3000, vacuum hose holder

Part Number

UL3000 Fab / UL3000 Fab ULTRA (***NEW***)
Part Number Description
550-200 UL3000 Fab
550-260 UL3000 Fab ULTRA

Accessories

UL3000 Fab / UL3000 Fab ULTRA (***NEW***)
Part Number Description
551-010 Remote Control RC1000C, wired, with 4m coiled cable
560-334 Data Cable for IO1000,BM1000, 0.5m
560-332 Data Cable 2 m
560-335 Data Cable 5 m
560-340 Data Cable 10 m
551-005 TC1000Test Chamber,DN25KF,ESD wrist band
551-201 Helium Bottle Holder for UL3000 Fab (ULTRA)
551-202 Vaccuum Hose Holder for UL3000 Fab (incl. for ULTRA version)
551-015 Remote Control RC1000WL, wireless, incl. wireless transmitter
14005 SL200, Sniffer Probe for UL1000/5000/Modul1000, 4m length (Extension cable 551-205 required)
551-205 extension cable for TC1000/SL200, UL3000
525-001 SL3000-3, sniffer line 3 m length
525-002 SL3000-5, sniffer line 5 m length
525-003 SL3000-10, sniffer line 10 m length
551-203 Bracket for SL3000
560-310 I/O 1000 module
560-315 BM1000 Profibus module
560-316 BM1000 PROFINET IO module
560-317 BM1000 DeviceNet module
560-318 BM1000 Ethernet/IP module
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