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Linear Motion Feedthroughs CF
INFICON's huge variety of mechanical feedthroughs offers the right device for all demanding applications, no matter if it serves e.g. in coating application chambers or in your applied research project under laboratory conditions.
The available flange designs ISO-KF / ISO-K and CF corresponds to our fitting line. All feedthroughs are suited to work in vacuum systems with leak rates up to 1 x 10-9 mbarl/s. For UHV an all metal designed feedthrough is also available.
Advantages
- With bellows for more demanding vacuum requirements
- Direct push and pull actuation
- High accuracy adjustment using micrometer screw
- 2011/65/EU RoHS compliant
Specifications
| Type | FPU016-H | FPU040-H | FPU016-Z | FPU040-Z | |
|---|---|---|---|---|---|
| Vacuum connection | DN 16 CF-R | DN 40 CF-R | DN 16 CF-R | DN 40 CF-R | |
| Feedthrough/seal | bellow | bellow | bellow | bellow | |
| Shaft connection | M4x16mm | M6x10mm, Ø10mm | M4x16mm | M6x10mm, Ø10mm | |
| Actuator | manual | manual | micrometer screw | micrometer screw | |
| Travel | mm | 25 | 50 | 20 | 50 |
| Travel per revolution | mm | | | 0.5 | 1 |
| Scale division | mm | 5 | 10 | 0.01 | 0.005 |
| Shaft load | |||||
| Radial force at max. | N | 20 | 100 | 20 | 100 |
| Axial force vacuum | N | 85 | 140 | 185 | 440 |
| Axial force against atm | N | 100 | 200 | 200 | 500 |
| Torsion torque | N•m | 0.2 | 0.5 | 0.2 | 0.5 |
| Tightness | mbar•L/s | 5 x 10-11 | 5 x 10-11 | 5 x 10-11 | 5 x 10-11 |
| Pressure (absolute) | 1 x 10-10 mbar ... 2 bar | 1 x 10-10 mbar ... 2 bar | 1 x 10-10 mbar ... 2 bar | 1 x 10-10 mbar ... 2 bar | |
| Bakeout temperature | |||||
| Feedtrough | °C | 300 | 300 | 300 | 300 |
| Micrometer screw | °C | | | 100 | 100 |
| Materials exposed to process media | stainless steel 304L/1.4306, stainless steel 316Ti/1.4571 | stainless steel 304L/1.4306, stainless steel 316Ti/1.4571 | stainless steel 304L/1.4306, stainless steel 316Ti/1.4571 | stainless steel 304L/1.4306, stainless steel 316Ti/1.4571 | |
| Weight | kg | 0.15 | 0.75 | 0.25 | 1 |
Part Number
| FPU016-H | |
|---|---|
| Part Number | Description |
| 214-330 | FPU016-H Linear feedthrough DN 16 CF-R |
| FPU040-H | |
| Part Number | Description |
| 214-332 | FPU040-H Linear feedthrough DN 40 CF-R |
| FPU016-Z | |
| Part Number | Description |
| 214-334 | FPU016-Z Linear feedthrough DN 16 CF-R |
| FPU040-Z | |
| Part Number | Description |
| 214-336 | FPU040-Z Linear feedthrough DN 40 CF-R |
