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QCM Sensor Feedthroughs
INFICON offers a variety of Quartz Crystal Monitor (QCM) sensor feedthroughs to accommodate many QCM sensor and chamber configurations. CF40 (2.75 in. ConFlat®) and 2.54 cm (1 in.) bolt style feedthroughs are available with various combinations of electrical connections, water cooling, and air tubes. INFICON feedthroughs may also be equipped with Ultra-Torr O-ring compression fittings for easy installation and sensor length adjustment. Other feedthrough styles may be available on request (KF40, etc), so contact INFICON with your feedthrough needs.
Unless noted, a typical feedthrough electrical connection consists of a coaxial BNC connector on the atmosphere side and a Microdot® connector on the vacuum side. This style of electrical connection is meant for use with in-vacuum cable sensors such as INFICON Front Load single, Front Load dual, Sputtering, CrystalSix, and Crystal 12 sensors.
Note: Feedthrough water and air tubes are 4.8 mm (3/16 in.) OD.
The following table is a quick reference for feedthrough requirements and part numbers based on sensor type.
Features
- 2.54 cm (1 in.) bolt or CF40 (2.75 in. ConFlat®) styles available
- Available Ultra-Torr O-ring compression fittings
- Custom feedthrough configurations available
- Other feedthrough styles available on request
Part Number
| QCM Sensor Feedthroughs | |
|---|---|
| Part Number | Description |
| 2.54 cm (1 in.) Bolt Feedthroughs | (Includes VITON® O-ring) |
| 002-042 | 1 in. Bolt Feedthrough, 1 Coax, 2 Tubes |
| 750-030-G1 | 1 in. Bolt Feedthrough, 1 Coax, 3 Tubes |
| 750-707-G1 | 1 in. Bolt Feedthrough, 2 Coax, 3 Tubes |
| 750-624-G1 | 1 in. Bolt Feedthrough, 1 Coax, 2 Tubes |
| 783-501-013 | 1 in. Bolt Feedthrough, 1 Coax, 2 Tubes, Ultra-Torr O-ring compression fittings |
| CF40 (2.75 in. ConFlat) Feedthroughs | (Includes copper gasket) |
| 002-043 | CF40 Feedthrough, 1 Coax, 2 Tubes |
| 750-685-G1 | CF40 Feedthrough, 1 Coax,3 Tubes |
| 002-080 | CF40 Feedthrough, 2 Coax, 3 Tubes |
| 750-683-G1 | CF40 Feedthrough, 1 Coax, 4 Tubes |
| 206-878-G2 | CF40 Feedthrough, 1 Coax, 2 Tubes, Ultra-Torr O-ring compression fittings |
| 750-685-G2 | CF40 Feedthrough, 1 Coax, 3 Tubes, Ultra-Torr O-ring compression fittings |
| 206-890-G2 | CF40 Feedthrough, 2 Coax, 3 Tubes, Ultra-Torr O-ring compression fittings |
| KF40 Feedthroughs | (Does not include centering ring or clamp) |
| 130246 | KF40 Feedthrough, 1 Coax, 2 Tubes |
| 130239 | KF40 Feedthrough, 1 Coax, 3 Tubes |
Accessories
| Name | Description |
|---|---|
| Clamping Ring with Wing Nut | Clamping Ring with Wing Nut |
| QCM Sensor Feedthroughs | |
|---|---|
| Part Number | Description |
| 782-902-022 | BNC to Microdot® adapter cable, 15.2 cm (6 in.) |
Spare Parts
| QCM Sensor Feedthroughs | |
|---|---|
| Part Number | Description |
| 002-064 | Quad Ring Gasket, VITON®, CF40 |
| 012-328 | Gasket, Copper, CF40 |
| 070-0237 | O-ring, VITON®, 2.54 cm (1 in.) bolt |
| 211-003 | Clamping ring DN 32-40 ISO-KF |
| 211-070 | Centering ring DN 40 ISO-KF,SS/FPM |
