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Edge™ CDG025D2 with EtherCAT 0.1 … 1000Torr / mbar
INFICON temperature compensated Edge CDG025D2 with EtherCAT Capacitance Diaphragm Gauge is a highly accurate vacuum measurement instrument designed for harsh manufacturing environments.
The proven temperature compensated , corrosion resistant, ultra-pure ceramic sensor provides superior span stability over many years paired with state-of-the-art zero stability. Edge comes with the INFICON patented unique sensor shield which protects the gauge from undesired process by-products. Advanced electronics offer a wide range of configurable signal conditioning for all applications with EtherCAT fieldbus interface.
Advantages
- Easy integration, EtherCAT, wide variety of full scales and flanges, standard with two set points
- Easy one push button or remote signal zero command, zero offset adjustable
- Diagnostic port for quick service and maintenance
- Corrosion resistant ceramic sensor
- Excellent long term signal stability
- Temperature compensated
- Sensor protected from contamination
- Compliance & standards: CE, EN, UL, SEMI, RoHS
Typical Applications
- Etch, PVD and other semiconductor production processes
- Data storage and display manufacturing equipment
- Industrial vacuum equipment
- General high accuracy pressure measurement
Specifications
Type | 1000 Torr, 1100 mbar | 500 ... 10 Torr / mbar | 1 Torr / mbar | 0.25 Torr / mbar | 0.1 Torr / mbar | |
---|---|---|---|---|---|---|
Accuracy (1) | % of reading | 0.2 | 0.2 | 0.2 | 0.25 | 0.5 |
Temperature effect | ||||||
on zero | percent FS/°C | 0.005 | 0.005 | 0.015 | 0.02 | 0.02 |
on span | % of reading / °C | 0.01 | 0.01 | 0.01 | 0.03 | 0.03 |
Pressure, max. | kPa (absolute) | 400 | 260 | 260 | 130 | 130 |
Resolution | percent FS | 0.003 | 0.003 | 0.003 | 0.003 | 0.003 |
Lowest reading | percent FS | 0.01 | 0.01 | 0.01 | 0.01 | 0.01 |
Lowest suggested reading | percent FS | 0.05 | 0.05 | 0.05 | 0.05 | 0.05 |
Lowest suggested control pressure | percent FS | 0.5 | 0.5 | 0.5 | 0.5 | 0.5 |
Temperature | ||||||
Sensor | °C | 25 | 25 | 25 | 25 | 25 |
Operation (ambient) | °C | +5 … +50 | +5 … +50 | +5 … +50 | +5 … +50 | +5 … +50 |
Bakeout at flange (4) | °C | ≤110 | ≤110 | ≤110 | ≤110 | ≤110 |
Storage | °C | –20 … +65 | –20 … +65 | –20 … +65 | –20 … +65 | –20 … +65 |
Supply voltage | +14 … +30 VDC or ±15 V (±5%) | +14 … +30 VDC or ±15 V (±5%) | +14 … +30 VDC or ±15 V (±5%) | +14 … +30 VDC or ±15 V (±5%) | +14 … +30 VDC or ±15 V (±5%) | |
Power consumption | ||||||
At operating temperature | W | ≤1 | ≤1 | ≤1 | ≤1 | ≤1 |
Output signal (analog) | V (dc) | 0 … +10 | 0 … +10 | 0 … +10 | 0 … +10 | 0 … +10 |
Response time (2) | ms | 30 | 30 | 30 | 130 | 130 / 30 (3) |
Degree of protection | IP 40 | IP 40 | IP 40 | IP 40 | IP 40 | |
Standards | ||||||
CE conformity | EN 61000‑6‑2/-6-3, EN 61010 & RoHS | EN 61000‑6‑2/-6-3, EN 61010 & RoHS | EN 61000‑6‑2/-6-3, EN 61010 & RoHS | EN 61000‑6‑2/-6-3, EN 61010 & RoHS | EN 61000‑6‑2/-6-3, EN 61010 & RoHS | |
ETL certification | UL 61010‑1, CSA 22.2 No.61010‑1 | UL 61010‑1, CSA 22.2 No.61010‑1 | UL 61010‑1, CSA 22.2 No.61010‑1 | UL 61010‑1, CSA 22.2 No.61010‑1 | UL 61010‑1, CSA 22.2 No.61010‑1 | |
SEMI compliance | SEMI S2 | SEMI S2 | SEMI S2 | SEMI S2 | SEMI S2 | |
Electrical connection | D-sub, 15 pole, male | D-sub, 15 pole, male | D-sub, 15 pole, male | D-sub, 15 pole, male | D-sub, 15 pole, male | |
Setpoint | ||||||
Number of setpoints | 2 (SP1,SP2) | 2 (SP1,SP2) | 2 (SP1,SP2) | 2 (SP1,SP2) | 2 (SP1,SP2) | |
Relay contact | ≤30 | ≤30 | ≤30 | ≤30 | ≤30 | |
Hysteresis | percent FS | 1 | 1 | 1 | 1 | 1 |
Diagnostic port | ||||||
Protocol | RS232-C | RS232-C | RS232-C | RS232-C | RS232-C | |
Read | pressure, status, ID | pressure, status, ID | pressure, status, ID | pressure, status, ID | pressure, status, ID | |
Set | set points, filter, zero adjust, factory reset, DC offset | set points, filter, zero adjust, factory reset, DC offset | set points, filter, zero adjust, factory reset, DC offset | set points, filter, zero adjust, factory reset, DC offset | set points, filter, zero adjust, factory reset, DC offset | |
Materials exposed to vacuum | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (5)) | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (5)) | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (5)) | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (5)) | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (5)) | |
Internal volume | ||||||
I. volume 1/2'' tube | cm³ (in.³) | 4.2 (0.26) | 4.2 (0.26) | 4.2 (0.26) | 4.2 (0.26) | 4.2 (0.26) |
I. volume DN 16 ISO KF | cm³ (in.³) | 4.2 (0.26) | 4.2 (0.26) | 4.2 (0.26) | 4.2 (0.26) | 4.2 (0.26) |
I. volume DN 16 CF-R | cm³ (in.³) | 4.2 (0.26) | 4.2 (0.26) | 4.2 (0.26) | 4.2 (0.26) | 4.2 (0.26) |
I. volume 8 VCR® | cm³ (in.³) | 4.2 (0.26) | 4.2 (0.26) | 4.2 (0.26) | 4.2 (0.26) | 4.2 (0.26) |
Weight | ||||||
Weight 1/2'' tube | g | 837 | 837 | 837 | 837 | 837 |
Weight DN 16 ISO KF | g | 852 | 852 | 852 | 852 | 852 |
Weight DN 16 CF-R | g | 875 | 875 | 875 | 875 | 875 |
Weight 8 VCR® | g | 897 | 897 | 897 | 897 | 897 |
EtherCAT | ||||||
Protocol EtherCAT | protocol specialized for EtherCAT | protocol specialized for EtherCAT | protocol specialized for EtherCAT | protocol specialized for EtherCAT | protocol specialized for EtherCAT | |
Communication standards | ETG.5003.1 S (R) V1.1.0 Common Device Profile ETG.5003.2080 S (R) V1.3.0 Specific Device Profile: Vacuum Gauge | ETG.5003.1 S (R) V1.1.0 Common Device Profile ETG.5003.2080 S (R) V1.3.0 Specific Device Profile: Vacuum Gauge | ETG.5003.1 S (R) V1.1.0 Common Device Profile ETG.5003.2080 S (R) V1.3.0 Specific Device Profile: Vacuum Gauge | ETG.5003.1 S (R) V1.1.0 Common Device Profile ETG.5003.2080 S (R) V1.3.0 Specific Device Profile: Vacuum Gauge | ETG.5003.1 S (R) V1.1.0 Common Device Profile ETG.5003.2080 S (R) V1.3.0 Specific Device Profile: Vacuum Gauge | |
Data rate | Kbps | 100000 | 100000 | 100000 | 100000 | 100000 |
Node address | Explicit Device Identification | Explicit Device Identification | Explicit Device Identification | Explicit Device Identification | Explicit Device Identification | |
Physical layer | 100BASE-Tx (IEEE 802.3) | 100BASE-Tx (IEEE 802.3) | 100BASE-Tx (IEEE 802.3) | 100BASE-Tx (IEEE 802.3) | 100BASE-Tx (IEEE 802.3) | |
Digital functions read | pressure, status, ID | pressure, status, ID | pressure, status, ID | pressure, status, ID | pressure, status, ID | |
Digital functions set | set points, filter, zero adjust, reset, DC offset | set points, filter, zero adjust, reset, DC offset | set points, filter, zero adjust, reset, DC offset | set points, filter, zero adjust, reset, DC offset | set points, filter, zero adjust, reset, DC offset | |
Process data | Fixed PDO mapping and configurable PDO mapping | Fixed PDO mapping and configurable PDO mapping | Fixed PDO mapping and configurable PDO mapping | Fixed PDO mapping and configurable PDO mapping | Fixed PDO mapping and configurable PDO mapping | |
Mailbox (CoE) | SDO requests, responses and information | SDO requests, responses and information | SDO requests, responses and information | SDO requests, responses and information | SDO requests, responses and information | |
EtherCAT connector | RJ45, 8-pin (socket), IN and OUT | RJ45, 8-pin (socket), IN and OUT | RJ45, 8-pin (socket), IN and OUT | RJ45, 8-pin (socket), IN and OUT | RJ45, 8-pin (socket), IN and OUT | |
Cable | shielded Ethernet CAT5e or higher | shielded Ethernet CAT5e or higher | shielded Ethernet CAT5e or higher | shielded Ethernet CAT5e or higher | shielded Ethernet CAT5e or higher | |
Cable length | m (ft.) | ≤100 (330) | ≤100 (330) | ≤100 (330) | ≤100 (330) | ≤100 (330) |
(1) Non-linearity, hysteresis, repeatability at 25 °C ambient operating temperature without temperature effects after 2 hours operation.
(2) Increase 10 … 90 percent FS
(3) For pressure control type only
(4) Non operation
(5) 18% Cr, 10% Ni, 3% Mo, 69% Fe
Datasheets
Brochures
Manuals
- Manual Edge CDG025D2 with EtherCAT |EN| |DE|
- Communication protocol EtherCAT new generation |EN| |DE|
- Communication protocol EtherCAT |EN|
- CDGxxxD Communication manual RS232C |EN|
3D Step Files
- Edge CDGxxxD2 16KF |EN|
- Edge CDGxxxD2 16CF |EN|
- Edge CDGxxxD2 8VCR |EN|
- Edge CDGxxxD2 4-VCR-f |EN|
- Edge CDGxxxD2 4-VCR-m |EN|
- Edge CDGxxxD2 tube |EN|