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Edge™ CDG025D2 with EtherCAT 0.1 … 1000Torr / mbar

 

INFICON temperature compensated Edge CDG025D2 with EtherCAT Capacitance Diaphragm Gauge is a highly accurate vacuum measurement instrument designed for harsh manufacturing environments.

The proven temperature compensated , corrosion resistant, ultra-pure ceramic sensor provides superior span stability over many years paired with state-of-the-art zero stability. Edge comes with the INFICON patented unique sensor shield which protects the gauge from undesired process by-products. Advanced electronics offer a wide range of configurable signal conditioning for all applications with EtherCAT fieldbus interface.

Benefits

  • Easy integration, EtherCAT, wide variety of full scales and flanges, standard with two set points
  • Easy one push button or remote signal zero command, zero offset adjustable
  • Diagnostic port for quick service and maintenance
  • Corrosion resistant ceramic sensor
  • Excellent long term signal stability
  • Temperature compensated
  • Sensor protected from contamination
  • Compliance & standards: CE, EN, UL, SEMI, RoHS

Typical Applications

  • Etch, PVD and other semiconductor production processes
  • Data storage and display manufacturing equipment
  • Industrial vacuum equipment
  • General high accuracy pressure measurement
  • CDG025D2 dimensions

Specifications

Type 1000 Torr, 1100 mbar 500 ... 10 Torr / mbar 1 Torr / mbar 0.25 Torr / mbar 0.1 Torr / mbar
Accuracy (1) % of reading 0.2 0.2 0.2 0.25 0.5
Temperature effect          
on zero percent FS/°C 0.005 0.005 0.015 0.02 0.02
on span % of reading / °C 0.01 0.01 0.01 0.03 0.03
Pressure, max. kPa (absolute) 400 260 260 130 130
Resolution percent FS 0.003 0.003 0.003 0.003 0.003
Lowest reading percent FS 0.01 0.01 0.01 0.01 0.01
Lowest suggested reading percent FS 0.05 0.05 0.05 0.05 0.05
Lowest suggested control pressure percent FS 0.5 0.5 0.5 0.5 0.5
Temperature          
Sensor °C 25 25 25 25 25
Operation (ambient) °C +5 … +50 +5 … +50 +5 … +50 +5 … +50 +5 … +50
Bakeout at flange °C ≤110 ≤110 ≤110 ≤110 ≤110
Storage °C –20 … +65 –20 … +65 –20 … +65 –20 … +65 –20 … +65
Supply voltage +14 … +30 VDC or ±15 V (±5%) +14 … +30 VDC or ±15 V (±5%) +14 … +30 VDC or ±15 V (±5%) +14 … +30 VDC or ±15 V (±5%) +14 … +30 VDC or ±15 V (±5%)
Power consumption          
At operating temperature W ≤1 ≤1 ≤1 ≤1 ≤1
Output signal (analog) V (dc) 0 … +10 0 … +10 0 … +10 0 … +10 0 … +10
Response time (2) ms 30 30 30 130 130 / 30 (3)
Degree of protection IP 40 IP 40 IP 40 IP 40 IP 40
Standards          
CE conformity EN 61000‑6‑2/-6-3, EN 61010 & RoHS EN 61000‑6‑2/-6-3, EN 61010 & RoHS EN 61000‑6‑2/-6-3, EN 61010 & RoHS EN 61000‑6‑2/-6-3, EN 61010 & RoHS EN 61000‑6‑2/-6-3, EN 61010 & RoHS
ETL certification UL 61010‑1, CSA 22.2 No.61010‑1 UL 61010‑1, CSA 22.2 No.61010‑1 UL 61010‑1, CSA 22.2 No.61010‑1 UL 61010‑1, CSA 22.2 No.61010‑1 UL 61010‑1, CSA 22.2 No.61010‑1
SEMI compliance SEMI S2 SEMI S2 SEMI S2 SEMI S2 SEMI S2
Electrical connection D-sub, 15 pole, male D-sub, 15 pole, male D-sub, 15 pole, male D-sub, 15 pole, male D-sub, 15 pole, male
Setpoint          
Number of setpoints 2 (SP1,SP2) 2 (SP1,SP2) 2 (SP1,SP2) 2 (SP1,SP2) 2 (SP1,SP2)
Relay contact ≤30 ≤30 ≤30 ≤30 ≤30
Hysteresis percent FS 1 1 1 1 1
Diagnostic port          
Protocol RS232-C RS232-C RS232-C RS232-C RS232-C
Read pressure, status, ID pressure, status, ID pressure, status, ID pressure, status, ID pressure, status, ID
Set set points, filter, zero adjust, factory reset, DC offset set points, filter, zero adjust, factory reset, DC offset set points, filter, zero adjust, factory reset, DC offset set points, filter, zero adjust, factory reset, DC offset set points, filter, zero adjust, factory reset, DC offset
Materials exposed to vacuum Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4)) Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4)) Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4)) Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4)) Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4))
Internal volume          
I. volume 1/2'' tube cm³ (in.³) 4.2 (0.26) 4.2 (0.26) 4.2 (0.26) 4.2 (0.26) 4.2 (0.26)
I. volume DN 16 ISO KF cm³ (in.³) 4.2 (0.26) 4.2 (0.26) 4.2 (0.26) 4.2 (0.26) 4.2 (0.26)
I. volume DN 16 CF-R cm³ (in.³) 4.2 (0.26) 4.2 (0.26) 4.2 (0.26) 4.2 (0.26) 4.2 (0.26)
I. volume 8 VCR® cm³ (in.³) 4.2 (0.26) 4.2 (0.26) 4.2 (0.26) 4.2 (0.26) 4.2 (0.26)
Weight          
Weight 1/2'' tube g 837 837 837 837 837
Weight DN 16 ISO KF g 852 852 852 852 852
Weight DN 16 CF-R g 875 875 875 875 875
Weight 8 VCR® g 897 897 897 897 897
   
EtherCAT          
Protocol EtherCAT protocol specialized for EtherCAT protocol specialized for EtherCAT protocol specialized for EtherCAT protocol specialized for EtherCAT protocol specialized for EtherCAT
Communication standards ETG.5003 Part 1 "Semiconductor Device Profile" ETG.5003 Part 2080 "Specific Device Profile: Vacuum Pressure Gauge" ETG.5003 Part 1 "Semiconductor Device Profile" ETG.5003 Part 2080 "Specific Device Profile: Vacuum Pressure Gauge" ETG.5003 Part 1 "Semiconductor Device Profile" ETG.5003 Part 2080 "Specific Device Profile: Vacuum Pressure Gauge" ETG.5003 Part 1 "Semiconductor Device Profile" ETG.5003 Part 2080 "Specific Device Profile: Vacuum Pressure Gauge" ETG.5003 Part 1 "Semiconductor Device Profile" ETG.5003 Part 2080 "Specific Device Profile: Vacuum Pressure Gauge"
Data rate Kbps 100000 100000 100000 100000 100000
Node address Explicit Device Identification Explicit Device Identification Explicit Device Identification Explicit Device Identification Explicit Device Identification
Physical layer 100BASE-Tx (IEEE 802.3) 100BASE-Tx (IEEE 802.3) 100BASE-Tx (IEEE 802.3) 100BASE-Tx (IEEE 802.3) 100BASE-Tx (IEEE 802.3)
Digital functions read pressure, status, ID pressure, status, ID pressure, status, ID pressure, status, ID pressure, status, ID
Digital functions set set points, filter, zero adjust, reset, DC offset set points, filter, zero adjust, reset, DC offset set points, filter, zero adjust, reset, DC offset set points, filter, zero adjust, reset, DC offset set points, filter, zero adjust, reset, DC offset
Process data Fixed PDO mapping and configurable PDO mapping Fixed PDO mapping and configurable PDO mapping Fixed PDO mapping and configurable PDO mapping Fixed PDO mapping and configurable PDO mapping Fixed PDO mapping and configurable PDO mapping
Mailbox (CoE) SDO requests, responses and information SDO requests, responses and information SDO requests, responses and information SDO requests, responses and information SDO requests, responses and information
EtherCAT connector RJ45, 8-pin (socket), IN and OUT RJ45, 8-pin (socket), IN and OUT RJ45, 8-pin (socket), IN and OUT RJ45, 8-pin (socket), IN and OUT RJ45, 8-pin (socket), IN and OUT
Cable shielded Ethernet CAT5e or higher shielded Ethernet CAT5e or higher shielded Ethernet CAT5e or higher shielded Ethernet CAT5e or higher shielded Ethernet CAT5e or higher
Cable length m (ft.) ≤100 (330) ≤100 (330) ≤100 (330) ≤100 (330) ≤100 (330)

(1) Non-linearity, hysteresis, repeatability at 25 °C ambient operating temperature without temperature effects after 2 hours operation.

(2) Increase 10 … 90 percent FS  

(3) For pressure control type only

(4) 18% Cr, 10% Ni, 3% Mo, 69% Fe

CDG025D2 Edge Ordering Information
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