EBS-530 Electron Beam Sweep Controller


To Be Discontinued on January 31, 2018

EBS-530 Electron Beam Sweep Controller generates a large number of precision sweep patterns for use with electron beam (e-beam) deposition sources. The user may select from the basic shapes provided(circle, figure-8, line and point), or create user-defined patterns to optimize deposition control of metals and dielectric materials. Variations on the basic shapes can be created by applying the provided pattern modifiers. Pattern modifiers provided include power, sweep frequency, rotational speed and power profile.

Operation and programming is easy through the user-friendly touch screen LCD display. EBS-530 can store up to 32 different sweep patterns. Sweep patterns can easily be selected from the front panel, through remote input, or through the standard RS-232/RS-485 interface.

Starting with a fixed set of basic sweep patterns that are embedded in the Sweep Control, the user can design e-beam sweep patterns that are ideally suited to the characteristics of the source and deposition materials. The sweep patterns generated by EBS-530 produce dual current outputs which can drive the X and Y sweep coils of most electron beam deposition sources.

EBS-530 features a calibration function to compensate for differences between types and brands of e-beam guns and provides optimum heating of the deposition material.


  • Powerful, easy-to-use calibration function allows compensation for irregularities in gun magnetics
  • High output current: 0 to 5 Amps AC with 10 Ohm loads
  • Drives grounded or floating coils
  • High frequency response: 500 Hz for coils <8 mH, 200 Hz for coils = 33 mH
  • Pattern types: circle, figure-8, line, point, and user-defined
  • Handheld controller for manual beam control and calibration
  • RS-232/RS-485 communications inputs
  • Input power: 85 to 265 V (ac), 50/60 Hz
  • Power factor = 0.99 at maximum coil current


Type EBS-530
Coil output current -5.0 to 5.0 A peak per coil (3.5 A rms)
Coil configurations Two coild with one side grounded Two coils with each side floating
Output frequency response (X and Y) 500 Hz for coils <8 mH
200 Hz for coils = 33 mH
Maximum coild impedance @ 5 A peak 10 Ohms
Nominal cable length 6.1 m (20 ft.)
Pre-defined patterns Circle, figure-8, line, point
User patterns 32
X/Y points per user pattern 255
Pattern Parameters  
Gain 0 to 110%
Power profile Vary current density according to 1/Rx
Shape Circle, figure-8, line, point, user-defined
Spin speed (rate of shape rotation) 0 to 1000 RPM
Shape speed (time to draw one shape) 0 to 1000 ms
User interface 240 x 64 backlit LCD touchscreen with dedicated system keys
Mouse/remote input PS2
Digital inputs 9
Digital input type Contact closure
Digital input functions Interlock
Remote mode
Pattern select (1 to 32)
Sweep On/Off
Relay outputs 3
Relay output functions Sweep Ready
Sweep On
Beam in pocket
Relay rating SPST, 30 V (dc) or RMS, 2 Amp
Communicatons RS-232/RS-485
Operating temperature up to 50°C
Cooling Forced air, one internal fan
Size (H x W x D) 8.9 x 42.9 x 29.2 cm
(3.5 x 16.9 x 11.5 in.)
Weight 4.5 kg (10 lb.)
Input power 85 to 265 V (ac), 50/60 Hz
460 VA (10 Ohm coil R, 5 A peak current in each coil)
Power factor 0.99 at maximum coil current
Regulatory compliance CE, RoHS

Part Number

Part Number Description
EBS-530 EBS-530 Electron Beam Sweep Controller
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