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SKY® CDG025D-X3 0.1 ... 1000 Torr / mbar process gauge
The INFICON SKY CDG025D Capacitance Diaphragm Gauge line of highly accurate temperature compensated manometers is designed for stable performance in harsh manufacturing tool environments. Advanced digital electronics improve gauge performance and offer easy handling features such as one pushbutton zero function and setpoint adjustment. The corrosion resistant ultra pure ceramic sensor provides excellent zero stability with a long life expectancy of several million pressure cycles, including atmospheric bursts. A unique sensor shielding (patent pending) protects the gauge from process contamination. A robust mechanical design and digital electronics improve EMC compatibility, long term stability and temperature compensation. The CDG025D sets new standards for fast stability after power on and fast recovery from atmospheric pressure exposure.
Benefits
- Full scale ranges from 100 mTorr … 1000 Torr
- Fast stability after power on
- Fast recovery from atmospheric pressure
- Corrosion resistant ceramic sensor
- Excellent long term signal stability
- Temperature compensated
- Sensor double protected from contamination
- One pushbutton zero function
- Wide range power supply
- 2 setpoints
- RS232 interface
- Clean room compliant
Typical Applications
- Semiconductor manufacturing equipment for Etch, CVD, PVD, ALD
- Data storage and display manufacturing equipment
- Industrial vacuum equipment
- General high accuracy pressure measurement
Specifications
| Type | 1000 Torr / 1100 mbar | 500 ... 10 Torr / mbar | 1 Torr / mbar | 0.25 Torr | 0.1 Torr / mbar | |
|---|---|---|---|---|---|---|
| Accuracy (1) | % of reading | 0.2 | 0.2 | 0.2 | 0.25 | 0.5 |
| Temperature effect | ||||||
| on zero | percent FS/°C | 0.005 | 0.005 | 0.015 | 0.02 | 0.02 |
| on span | % of reading / °C | 0.01 | 0.01 | 0.01 | 0.03 | 0.03 |
| Resolution | percent FS | 0.003 | 0.003 | 0.003 | 0.003 | 0.003 |
| Pressure, max. | kPa (absolute) | 400 | 260 | 260 | 130 | 130 |
| Response time (2) | ms | 30 | 30 | 30 | 130 | 130 / 30 (3) |
| Lowest reading | percent FS | 0.01 | 0.01 | 0.01 | 0.01 | 0.01 |
| Lowest suggested reading | percent FS | 0.05 | 0.05 | 0.05 | 0.05 | 0.05 |
| Lowest suggested control pressure | percent FS | 0.5 | 0.5 | 0.5 | 0.5 | 0.5 |
| Temperature | ||||||
| Operation (ambient) | °C | +5 … +50 | +5 … +50 | +5 … +50 | +5 … +50 | +5 … +50 |
| Bakeout at flange (4) | °C | ≤110 | ≤110 | ≤110 | ≤110 | ≤110 |
| Storage | °C | –40 … +65 | –40 … +65 | –40 … +65 | –40 … +65 | –40 … +65 |
| Supply voltage | V (dc) | +14 … +30 | +14 … +30 | +14 … +30 | +14 … +30 | +14 … +30 |
| Power consumption | W | ≤1 | ≤1 | ≤1 | ≤1 | ≤1 |
| Output signal (analog) | V (dc) | 0 … +10 | 0 … +10 | 0 … +10 | 0 … +10 | 0 … +10 |
| Degree of protection | IP 30 | IP 30 | IP 30 | IP 30 | IP 30 | |
| Standards | ||||||
| CE conformity | EN 61000‑6‑2, EN 61000-6-3, EN 61010 & RoHS | EN 61000‑6‑2, EN 61000-6-3, EN 61010 & RoHS | EN 61000‑6‑2, EN 61000-6-3, EN 61010 & RoHS | EN 61000‑6‑2, EN 61000-6-3, EN 61010 & RoHS | EN 61000‑6‑2, EN 61000-6-3, EN 61010 & RoHS | |
| ETL certification | UL 61010‑1, CSA 22.2 No.61010‑1 | UL 61010‑1, CSA 22.2 No.61010‑1 | UL 61010‑1, CSA 22.2 No.61010‑1 | UL 61010‑1, CSA 22.2 No.61010‑1 | UL 61010‑1, CSA 22.2 No.61010‑1 | |
| Electrical connection | D-Sub, 15-pin, male | D-Sub, 15-pin, male | D-Sub, 15-pin, male | D-Sub, 15-pin, male | D-Sub, 15-pin, male | |
| Setpoint | ||||||
| Number of setpoints | 2 (SP1,SP2) | 2 (SP1,SP2) | 2 (SP1,SP2) | 2 (SP1,SP2) | 2 (SP1,SP2) | |
| Relay contact | 30 | 30 | 30 | 30 | 30 | |
| Hysteresis | percent FS | 1 | 1 | 1 | 1 | 1 |
| Materials exposed to vacuum | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (5)) | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (5)) | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (5)) | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (5)) | Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (5)) | |
| Internal volume | ||||||
| I. volume 1/2'' tube | cm³ (in.³) | 3.6 (0.22) | 3.6 (0.22) | 3.6 (0.22) | 3.6 (0.22) | 3.6 (0.22) |
| I. volume DN 16 ISO KF | cm³ (in.³) | 3.6 (0.22) | 3.6 (0.22) | 3.6 (0.22) | 3.6 (0.22) | 3.6 (0.22) |
| I. volume DN 16 CF-R | cm³ (in.³) | 3.6 (0.22) | 3.6 (0.22) | 3.6 (0.22) | 3.6 (0.22) | 3.6 (0.22) |
| I. volume 8 VCR® | cm³ (in.³) | 3.6 (0.22) | 3.6 (0.22) | 3.6 (0.22) | 3.6 (0.22) | 3.6 (0.22) |
| Weight | ||||||
| Weight 1/2'' tube | g | 310 | 310 | 310 | 310 | 310 |
| Weight DN 16 ISO KF | g | 330 | 330 | 330 | 330 | 330 |
| Weight DN 16 CF-R | g | 350 | 350 | 350 | 350 | 350 |
| Weight 8 VCR® | g | 370 | 370 | 370 | 370 | 370 |
(1) Non-linearity, hysteresis, repeatability at 25°C ambient operating temperature without temperature effects after 2 hours operation.
(2) Increase 10 ... 90 percent FS
(3) For pressure control type only
(4) Non operation
(5) 18% Cr, 10% Ni, 3% Mo, 69% Fe
