Wide Range Vacuum Gauges

 

The INFICON wide range vacuum gauges offer superior accuracy and reliability in compact designs. Four physical technologies cover the whole range of vacuum from ultra-high vacuum up to atmosphere.

 

The INFICON Pirani technology enables cost effective measurement in the low and medium vacuum range. The INFICON miniature capacitance diaphragm technology enables precise measurement in the low vacuum range, whereas the ultra- and high-vacuum ranges are covered by the hot or cold ionization technologies.

 

Each measurement technology is available as a stand-alone sensor or combined with complementary measurement technologies to enable optimum price to performance ratio over the complete vacuum range.

 

Wide Range Vacuum Gauges

NEW Convection Enhanced Pirani Gauges - advanced series

All-in-One Convection enhanced Pirani Gauge for higher accuracy between 100 mbar and atmosphere.

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Wide Range Vacuum Gauges

NEW Convection Enhanced Pirani Gauges - standard series

The PGE300 Convection enhanced Pirani Gauge offers the same sensor technology like PGE500 to yield same accuracy readings in the measurement range between 100 to 1000 mbar. It offers the most critical built in features to minimize cost.

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Wide Range Vacuum Gauges

NEW Convection Gauge Enhanced Pirani Gauges - passive

The Convection enhanced Pirani Gauge PGE050 for higher accuracy between 100 mbar and atmosphere is intended for use as gauge sensor in the classic "Passive Gauge - Controller combination". Our Passive Gauge Controller VGC031 and VGC083 are the counterparts of choice.

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Wide Range Vacuum Gauges

NEW Bayard Alpert Vacuum Gauge Heads - Passive

The INFICON Bayard-Alpert passive vacuum gauge heads BAG050, BAG051, BAG052 and BAG053 are designed for use with the INFICON Vacuum Gauge Controller VGC083A & VGC083B.

For the corresponding Controllers VGC083 A+B please check under chapter "Vaccum Gauge Controllers and Accessories"



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Wide Range Vacuum Gauges

NEW Inverted Magnetron Cold Cathode Gauge Heads - Passive

The INFICON Inverted Magnetron Cold Cathode passive vacuum gauge heads MAG050 and MAG060 are designed for use with the INFICON Vacuum Gauge Controller VGC083C.

 

For the corresponding Controllers VGC083C please check under chapter "Vaccum Gauge Controllers and Accessories"



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Wide Range Vacuum Gauges

NEW Bayard Alpert Hot Ion Gauge - standard

For applications that require a stand alone hot ion gauge, INFICON offers the single Technology Bayard Alpert Hot Ion Gauge with its NEW highly economical standard double filament solution.

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Wide Range Vacuum Gauges

NEW Bayard-Alpert Gauges

For applications that require stand alone hot ion gauge technology, INFICON offers the single technology Bayard Alpert Hot Ion Gauge.

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Wide Range Vacuum Gauges

Bayard - Alpert Pirani Gauges

Combination gauge technology for extremely wide measurement from ultra high vacuum to atmosphere

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Wide Range Vacuum Gauges

High Pressure Hot Ionization Pirani Gauges

Highly repeatable and reproducible measurement for accurate sputter process pressure control in the range of 2 x 10-6 mbar to atmosphere



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Wide Range Vacuum Gauges

Bayard Alpert Pirani Capacitance Diaphragm Gauges - Triple Gauge™

Combination Gauge Technology - 3 Gauges in one single unit to measure accurate process and base pressure from UHV to 1500 mbar

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Wide Range Vacuum Gauges

NEW Inverted Magnetron Pirani Gauges

The NEW Gemini™ Inverted Magnetron Vacuum Gauge is the workhorse for all vacuum measurement applications (pending) to measure from atmosphere to 1x10 – 9 mbar.

Beside the full line of analog output Versions thîs series is also available now with digital EtherCAT Interface nad RS232/ RS485 interface



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Wide Range Vacuum Gauges

Inverted Magnetron Pirani Gauges

The combination of the Inverted Magnetron and Priani Gauge principle provides pressure measurement from atmosphere to high vacuum range of 5 x 10-9 mbar

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Wide Range Vacuum Gauges

Penning Cold Cathode Gauges

The rugged Penning Cold Cathode Gauge provides reliable high vacuum measurement from 1 x 10-2 mbar to high vacuum range of down to 1 x 10-9 mbar. Field bus options are available too.



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Wide Range Vacuum Gauges

Pirani Standard Gauges

The most compact Pirani gauge for highly reliable measurement within the range of 5 x 10-4 mbar to atmosphere



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Wide Range Vacuum Gauges

Pirani Standard Gauges - advanced series

Compact Pirani gauge line with huge variety of features, including field bus options, that qualifies the right product for the specific vacuum measurement within the range of 5 x 10-4 mbar to atmosphere

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Wide Range Vacuum Gauges

Pirani Capacitance Diaphragm Gauges

Combination of Pirani and Capacitance Diaphrgam gauge to cover the measuring range of 5 x 10-4 mbar to atmosphere with an extra plus of accuracy in the `close to atmosphere`- range

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Wide Range Vacuum Gauges

EtherCAT Vacuum Instrumentation

INFICON is the first vacuum gauge supplier providing EtherCAT interfaces for its vacuum gauge line covering the whole vacuum pressure range with one of its products.

 

INFICON Vacuum Gauges with EtherCAT® interface are compliant to the EtherCAT specification of the EtherCAT technology Group (ETG) and the EtherCAT Semicondurctor Device Profile.

 

 

Therefore INFICON provides its EtherCAT- Interface Vacuum Gauges according the latest standards

ETG.5003. 1 S (R) V1.1.0 : Part 1 Common Device Profile (CDP)

ETG.5003.2080 S (R) V1.3.0 : Part 2080 : Specific Device Profile (SDP) : Vacuum Pressure Gauges

 

Vacuum Gauges, designed according the previous standard  still can be ordered and manufactured on request.

Please check out our ordering numbers for the product of your interest for further information.

 

 



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Calibration Service for Vacuum Gauges

Factory or DAkks calibration for Vacuum gauges

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Inspection Documents Service

The right inspection document for the specific need

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Service Documents

INFICON document templates for service transactions, which support information exchange to the INFICON service department

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Wide Range Vacuum Gauges

Catalog and brochures for Vacuum gauges and components

Vacuum Control product catalog and general documents/ brochures for download

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