High Precision Vacuum Gauges
Precision vacuum measurement from 0.1mTorr to 2 bar
INFICON ceramic capacitance diaphragm gauges (CDG) are designed for demanding, highest accuracy (0.15%) applications in the vacuum industries. The corrosion resistant ultra pure alumina sensor guarantees superior performance and best long term span stability, high accuracy and years of maintenance free life time. INFICON offers a full line of CDGs starting with low priced Porter status gauges, ranging to world fastest CDG Stripe with less than 1ms measuring time, 200°C process gauges or the reference gauge Cube showing excellent stability. A large selection of flanges and interfaces, for example EtherCAT, make them the best choice for easy and cost effective integration.
Compact and rugged vacuum and differential pressure switches round up the product offering.
Visit our CDG selection guide CDG Selection .
Compact Capacitance Diaphragm GaugesBig performance - small size
Ambient Capacitance Diaphragm GaugesTemperature compensated, environmental independance
45°C Capacitance Diaphragm GaugesUnprecedented full scale stability
High speed heated 45 ... 200°C Capacitance Diaphragm GaugesSmart Inside - Fast Outside
Reference Capacitance Diaphragm GaugesThe reference
EtherCAT Vacuum Instrumentation
INFICON is the first vacuum gauge supplier providing EtherCAT interfaces for its vacuum gauge line covering the whole vacuum pressure range with one of its products.
INFICON Vacuum Gauges with EtherCAT® interface are compliant to the EtherCAT specification of the EtherCAT technology Group (ETG) and the EtherCAT Semicondurctor Device Profile.
Therefore INFICON provides its EtherCAT- Interface Vacuum Gauges according the latest standards
ETG.5003. 1 S (R) V1.1.0 : Part 1 Common Device Profile (CDP)
ETG.5003.2080 S (R) V1.3.0 : Part 2080 : Specific Device Profile (SDP) : Vacuum Pressure Gauges
Vacuum Gauges, designed according the previous standard still can be ordered and manufactured on request.
Please check out our ordering numbers for the product of your interest for further information.
- BAG402 Medium to Ultra-High Vacuum Gauge
- Edge™ CDG045D2 1 … 1000Torr / mbar
- Edge™ CDG100D2 1 … 1000Torr / mbar
- SKY® CDG045D 0.05 ... 1000Torr / mbar
- SKY® CDG100D 0.1 ... 1000 Torr / mbar
- SKY® CDG160D 1 ... 1000 Torr / mbar
- SKY® CDG200D 1 ... 1000 Torr / mbar
- Stripe™ CDG045Dhs 0.01 ... 1000Torr / mbar, new 10mTorr
- Stripe™ CDG100Dhs 0.1 ... 1000Torr / mbar
- PSG55x ATM to Medium Vacuum Gauge
- PCG55x ATM to Medium Vacuum Gauge
- BPG402-Sx ATM to Ultra-High Vacuum Gauge
- BCG450 ATM to Ultra-High Vacuum Triple-Gauge™
Service DocumentsINFICON document templates for service transactions, which support information exchange to the INFICON service department
Catalog and brochures for Vacuum gauges and componentsVacuum Control product catalog and general documents/ brochures for download
Calibration Service for Vacuum GaugesFactory or DAkks calibration for Vacuum gauges
Inspection Documents ServiceThe right inspection document for the specific need