UL3000 Fab ULTRA (***NEW***)

and UL3000 Fab Mobile Helium Leak Detector

 

ULTRATEST ™ sensor  technology

 

Specifically designed for the needs of leak checking in semiconductor applications.

 

It features flexibility, mobility, fast start up, high sensitivity, fast and precise test results, and reliability.

 

OUTSTANDING ADVANTAGES FOR THE UL3000 FAB ULTRA MODEL (NEW)

 

  • Faster pump down (evacuation) times due to higher air pumping speed.
  • Lower total cost of ownership (TCO) due to low maintenance roots roughing pump.
  • Start leak checking earlier as HYDRO·S software eliminates the water vapor background, making it possible to quickly reach sensitive measurement ranges
  • The UL3000 Fab ULTRA offers also an improved sniffer capability by using the well proven sniffer line SL3000 which has up to 10 m length. The SL3000 has a separate connection port, thus no connection to the vacuum inlet is required.

 

Both models feature

 

FAST RESULTS

 

The improved vacuum system with low maintenance vacuum pumps allows the detection of leaks starting from atmospheric pressure. The rugged mass spectrometer system ensures long running time and low maintenance costs.

 

ROTATABLE DISPLAY AND REMOTE CONTROLLABLE USER INTERFACE

 

The new touch screen display shows test results and status information even from a long distance. Easy operation via user guided menu structure, even for inexperienced operators. A wireless control of the UL3000 Fab (ULTRA) is possible via smartphone or tablet - without special software or Apps. Recording and storage of test results via push button can be transferred to other storage media for further analysis.

 

SLIM DESIGN FOR ADVANCED MANEUVERABILITY

 

A low center of gravity, big wheels, ergonomically designed handle and the slim housing enable good mobility of the UL3000 Fab (ULTRA) even in tight spaces.

 

Specifications

UL3000 Fab

UL3000 Fab ULTRA

Min. detectable leak rate for helium (vacuum method) <5 x 10-12 mbar l/s
Min. detectable leak rate for helium (sniffer mode) <5 x 10-8 mbar l/s
Max. inlet pressure (MASSIVE mode) 1000 mbar
Pumping speed during evacuation >32 m³/h >36 m³/h
Helium pumping speed (high sensitive mode ULTRA) 4 l/s
Response time <1 s
Time until ready for operation <3 min
Detectable masses (ULTRATEST Sensor Technology) 2, 3, 4 (H2, 3He, He)
Ion source 2 filaments, iridium/yttria oxide coated
Test port DN 25 KF
Adjustable triggers 4
Interface 2 x USB, Ethernet / LAN
Supply voltage 100 to 240 V 50/60 Hz (AC)
Power consumption typ. 700 VA, max. 1500 VA
Dimensions (L x W x H) 1050 x 472 x 987 mm (42 x 21 x 34 in.)
Weight 118 kg 132 kg
Permissable ambient temperature range (during operation) 10 to 40 °C

UL3000 Fab ULTRA

Additional Features

-

HYDRO·S, separate port for sniffer line SL3000, vacuum hose holder

장점

  • Save Time with I·CAL software algorithm for fast measurements in the range of 10-9 to 10-12 mbar·l/s
  • Most efficient leak checking using I·ZERO 2.0 with improved intelligent function for fast background suppression while maintaining high measurement sensitivity
  • Applicable for vacuum and sniffer leak search
  • Minimize leak checking efforts through quick evacuation and response time
  • Time saved by easy maneuverability through slim design
  • Low total cost of ownership (TCO) enabled by robust ion source (3 year warranty) and counterflow vacuum system
  • Easy to use, operator-guided HMI with full color high resolution rotatable display
  • UL3000 Fab ULTRA: Start leak checking earlier as HYDRO·S software eliminates the water vapor background, making it possible to quickly reach sensitive measurement ranges
  • UL3000 Fab ULTRA: Faster pump down (evacuation) times due to higher air pumping speed of roots pump
  • UL3000 Fab ULTRA: Lower total cost of ownership (TCO) due to low maintenance roots roughing pump.
  • UL3000 Fab ULTRA: The leak detector offers also an improved sniffer capability by using the well proven sniffer line SL3000 which has up to 10 m length. The SL3000 has a separate connection port, thus no connection to the vacuum inlet is required.

일반적인 응용 분야

  • Semiconductor Fabs
  • Flat Panel Display manufacturing
  • Solar Cell fabrication
  • Glass and Web (roll to roll) coating
  • General vacuum coating & applications

사양

유형 UL3000 Fab / UL3000 Fab ULTRA (***NEW***)
Min. detectable leak rate for helium (vacuum method) mbar•L/s < 5 x 10-12
Min. detectable leak rate for helium (sniffer mode) mbar•L/s < 5 x 10-8
Max. Inlet pressure (MASSIVE mode) mbar 1000
Pumping speed during evacuation m³/h >32                          >36
Helium pumping speed (high sensitive mode ULTRA) L/s 4
Response time s <1
Time until ready for operation min <3
Detectable masses (ULTRATEST Sensor Technology) 2, 3, 4 (H2, 3He, He)
Ion source 2 filaments, iridium/yttria oxide coated
Test port DN 25 KF
Adjustable triggers 4
Interfaces 2 x USB, Ethernet / LAN
Supply voltage 100 to 240 V 50/60 Hz (AC)
Power consumption typ. 700 VA, max. 1500 VA
Dimensions (L x W x H) 1050 x 472 x 987
Weight kg 118                           132
Permissable ambient temperature range (during operation) °C 10 to 40
Additional Features Roots dry pump with highest air pumping speed, HYDRO·S, separate sniffer line port for SL3000, vacuum hose holder

부품 번호

UL3000 Fab / UL3000 Fab ULTRA (***NEW***)
부품 번호 설명
550-260 UL3000 Fab ULTRA
550-200 UL3000 Fab

부속품

UL3000 Fab / UL3000 Fab ULTRA (***NEW***)
부품 번호 설명
551-015 리모컨 RC1000WL, 무선
551-010 리모컨 RC1000C, 케이블 포함
551-202 Vaccuum Hose Holder for UL3000 Fab (incl. for ULTRA version)
525-001 SL3000-3, 3 m LENGTHS
525-002 SL3000-5, 5 m LENGTH
525-003 SL3000-10, 10 m LENGTH
551-203 Bracket for SL3000
551-201 HELIUM BOTTLE HOLDER for UL3000 Fab
560-310 I/O 1000 모듈
560-315 BM1000 Profibus 모듈
560-316 BM1000 PROFINET IO 모듈
560-317 BM1000 DeviceNet module
560-318 BM1000 Ethernet/IP module
560-334 Data Cable for IO1000,BM1000, 0.5m
560-332 데이터 케이블 2m
560-335 데이터 케이블 5m
560-340 데이터 케이블 10m
551-005 TC1000Test Chamber,DN25KF,ESD wrist band
551-205 extension cable for TC1000/SL200, UL3000

소비재

UL3000 Fab / UL3000 Fab ULTRA (***NEW***)
부품 번호 설명
200007656 Airfilter Kit UL3 Housing Ventilation

예비 부품

UL3000 Fab / UL3000 Fab ULTRA (***NEW***)
부품 번호 설명
200000683 SPARE FILTER (2 PCS.) FOR VENT AND PURGE
200000913 Exhaust filter UL1000
200001095 Spare part, flood filter
200001680 Filterset 10PCS P3000/XLadapter/T-Guard
200003801 Oil wick cartridge HiPace 50/80
200007617 Inlet flange UL3
200007624 Vacuum Hose DN25 UL3
200007631 TS620 + Inverter UL3
200007653 Fan 4414N 24 V DC UL3
200007655 Fan 8314H 24 V DC UL3
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