UHV 베이커블 센서

INFICON UHV 베이커블 크리스탈 센서는 입증된 안정성과 내구성을 제공하며 시장의 모든 센서 헤드 중 최고의 열 안정성을 보유하고 있습니다. 304 스테인리스 스틸, 몰리브덴, 인코넬, 니켈 및 알루미나 재료로 만들어진 UHV 베이커블 센서는 최대 450°C의 연속 베이크아웃 온도를 견디도록 설계되었습니다(베이크아웃 전용, 실제 탈착 모니터링에 필요한 물 흐름). 프론트 로드 설계에서는 측면 삽입을 위한 공간이 충분하지 않은 응용 분야에서 크리스탈 홀더를 쉽게 삽입할 수 있습니다.

특징

  • 고온 납땜 및 용접 구조
  • 최고 450°C 베이크아웃 온도
  • 크리스탈 셔터(옵션)
  • 전면 장착 크리스탈 홀더
  • 쉬운 설치
  • CF40 피드스루
  • 피드스루에 대한 용접이나 납땜 필요 없음
  • 센서/피드스루 조합을 고객이 지정한 길이로 용접할 수 있음

사양

유형 Bakeable Sensor w/ Shutter Bakeable Sensor w/out Shutter
최대 온도 400° C continuous (for bake only; water flow recommended for actual deposition monitoring) 450°C continuous (for bake only; water flow recommended for actual deposition monitoring)
센서 헤드 크기(최대 엔벨로프) 1.35 in. x 1.38 in. x 1.21 in. high (34 mm x 35 mm x 31 mm high 1.35 in. x 1.38 in. x 0.94 in. high (34 mm x 35 mm x 24 mm high)
크리스탈 교환 Front loading, self-contained package for ease of exchange. Cam-type locking handle allows easy removal and good thermal contact. Pneumatically operated shutter flips up for easy crystal exchange. Front loading, self-contained package for ease of exchange. Cam-type locking handle allows easy removal and good thermal contact.
장착

a) Standard—four #4-40 tapped holes on the back of the body

b) Optional—right angle bracket; IPN 007-108

Four #4-40 tapped holes on the back of the body
피드스루

2¾ in. ConFlat®, integral with sensor head

Water, air and coax tubes are semi-rigid, but easily formed (2.0 in. [50.8 mm] minimum bend radius)

2¾ in. ConFlat, integral with sensor head

Water and coax tubes are semi-rigid, but easily formed. (2.0 in. [50.8 mm] minimum bend radius)

유틸리티

1) Minimum water flow 150-200 cc/min, 30° C max. (Do not allow to freeze.) (Customer should provide means of easily disconnecting the ¼ in. water tubes during bakeout.)

2) Filtered, oil-free air, regulated at 80 PSIG (5.5 bar) [552 kPa]

3) Solenoid valve, 750-420-G1, 24 VAC or VDC, or equivalent valve required

Minimum water flow 150-200 cc/min, 30° C max. (Do not allow to freeze.) (Customer should provide means of easily disconnecting the ¼ in. water tubes during bakeout.)
재료    
바디 및 홀더 304 type stainless steel 304 type stainless steel
스프링 Molybdenum and Inconel X-750 Molybdenum and Inconel X-750
워터, 에어 및 동축 라인 0.125 in. (3 mm) O.D. water and air x 0.015 in. (0.4 mm) wall thickness seamless 304 stainless steel; 0.188 in. (5 mm) O.D. coax  
기타 기계 부품 18-8 or 304 stainless 18-8 or 304 stainless
절연체 >99% Al2O3 in vacuum; other high density ceramics used elsewhere >99% Al2O3 in vacuum; other high density ceramics used elsewhere
와이어

1) Ni (in vacuum)

2) Ni plated Cu (elsewhere)

1) Ni (in vacuum)

2) Ni plated Cu (elsewhere)

납땜 Vacuum process high temperature Ni-Cr alloy Vacuum process high temperature Ni-Cr alloy
크리스탈 0.550 in. (13.97 mm) diameter 0.550 in. (13.97 mm) diameter
UHV PN.png

부속품

부품 번호 설명
750-420-G1 솔레노이드 밸브, 24V(셔터식 및 멀티크리스털 센서에서 사용)

소비재

이름 명세
석영 모니터 크리스탈 석영 모니터 크리스탈

예비 부품

부품 번호 설명
007-007 (크리스탈 홀더용) 리테이너 스프링
007-064 Ceramic Retainer, Bakeable Sensor
007-094 Clamping Sring, UHV Bakeable Sensor
007-095 Handle, UHV Bakeable Sensor
007-098 암 커넥터(페럴 및 너트 포함)
007-099 Head Contact, UHV Bakeable Sensor
007-100 High Temperature BNC Insulator
007-103 Insulator, UHV Bakeable Sensor
007-104 High Temperature BNC Body, Bakeable
007-147 Vented Screw, 4-40 x 3/8 in.
007-155 BRAZE ASM 12 IN. 206-804-G1
007-156 BRAZE ASM 20 IN 206-804-G2
007-157 BRAZE ASM 30 IN 206-804-G3
007-228 SPEC,4-40 X 5/8 VENTED SHC SC
007-267-P2 Spreader Bar, UHV Bakeable Sensor
007-268-P1 Shoulder Washer, UHV Bakeable Sensor
007-269-P1 Shoulder Washer, UHV Bakeable Sensor
008-007 CRYSTAL SNATCHER
059-0084 Gasket, Copper, Bakeable Sensor Actuator
070-201 #4 SPLIT LOCKWASHER SS
084-069-P1 SCREW 4-40 x .187 LG PHIL FLAT HD SS
750-018-P3 SPLIT CLAMP {THD} {CLEAN} @
750-018-P5 SPLIT CLAMP {CLEAN} @
750-022-G5 ACTR/AIR LINE 12 IN {CLEAN}
750-022-G6 ACTR/AIR LINE 20 IN {CLEAN}
750-022-G7 Actuator/Air Line 76.2 cm (30 in.),Clean
750-028-G5 BK XTAL SNS/FT/AIR 12 IN CLEAN
750-028-G6 BK XTAL SNS/FT/AIR 20 IN CLEAN
750-028-G7 BK XTAL SNS/FT/AIR 30 IN CLEAN
750-115-P4 커플링(풀무 어셈블리에 설치)
750-118-P4 ACT SUPPORT W/ DOWEL
750-120-G3 ASSY,SHAFT
750-216-G1 셔터 어셈블리(셔터 모듈 부분)
750-218-G1 Crystal Holder, Bakeable Sensor
친구에게 보내기


관련 제품