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SKY® CDG025D 0.1 ... 1,000 Torr/mbar
The INFICON SKY CDG025D Capacitance Diaphragm Gauge line of highly accurate temperature compensated manometers is designed for stable performance in harsh manufacturing tool environments. Advanced digital electronics improve gauge performance and offer easy handling features such as one pushbutton zero function and setpoint adjustment. The corrosion resistant ceramic sensor provides excellent zero stability with a long life expectancy of several million pressure cycles, including atmospheric bursts. A unique sensor shielding (patent pending) protects the gauge from process contamination. A robust mechanical design and digital electronics improve EMC compatibility, long term stability and temperature compensation. The CDG025D sets new standards for fast stability after power on and fast recovery from atmospheric pressure exposure. INFICON's CDG025D are direct drop-in replacements for the listed part numbers below and many other drop-in products are available on request. | ||||||
MKS part number | MKS part number | Oerlikon Leybold part number | Flange type | Full scale | INFICON part number | INFICON part number |
626 series | AA01 | CTR 100 | [Torr] | CDG025D | CDG025D X3* | |
626C13TDE | AA01A13TGAS3B | 230 300 | DN16 ISO-KF | 1000 | 375-001 | 3CB1-F51-2300 |
626C12TDE | AA01A12TGAS3B | 230 301 | 100 | 376-001 | 3CB1-C51-2300 | |
626C21TDE | AA01A21TGAS3B | 230 340 V01 | 20 | 383-001 | 3CB1-A51-2300 | |
626C11TDE | AA01A11TGAS3B | 230 302 | 10 | 377-001 | 3CB1-951-2300 | |
626C01TDE | AA01A01TGAS3B | 230 303 | 1 | 378-001 | 3CB1-651-2300 | |
626C.1TDE | 230 304V01 | 0.1 | 379-001 | 3CB1-351-2300 | ||
626C13TCE | AA01A13THAS3B | 230 305 | DN16 CF-R | 1000 | 375-002 | 3CB1-F53-2300 |
626C12TCE | AA01A12THAS3B | 230 306 | 100 | 376-002 | 3CB1-C53-2300 | |
626C11TCE | AA01A11THAS3B | 230 307 | 10 | 377-002 | 3CB1-953-2300 | |
626C01TCE | AA01A01THAS3B | 230 308 | 1 | 378-002 | 3CB1-653-2300 | |
626C.1TCE | 230 309 V01 | 0.1 | 379-002 | 3CB1-353-2300 | ||
626C13TBE | AA01A13TCES3B | 230 310 | Cajon 8 VCR | 1000 | 375-003 | 3CB1-F5E-2300 |
626C12TBE | AA01A12TCES3B | 230 311 | 100 | 376-003 | 3CB1-C5E-2300 | |
626C11TBE | AA01A11TCES3B | 230 312 | 10 | 377-003 | 3CB1-95E-2300 | |
626C01TBE | AA01A01TCES3B | 230 313 | 1 | 378-003 | 3CB1-65E-2300 | |
626C.1TBE | 230 314 V01 | 0.1 | 379-003 | 3CB1-35E-2300 | ||
626C13TAE | AA01A13TBAS3B | 230 315 | 1/2" tube | 1000 | 375-000 | 3CB1-F59-2300 |
626C12TAE | AA01A12TBAS3B | 230 316 | 100 | 376-000 | 3CB1-C59-2300 | |
626C11TAE | AA01A11TBAS3B | 230 317 | 10 | 377-000 | 3CB1-959-2300 | |
626C01TAE | AA01A01TBAS3B | 230 318 | 1 | 378-000 | 3CB1-659-2300 | |
626C.1TAE | 230 319 V01 | 0.1 | 379-000 | 3CB1-359-2300 | ||
* SEMI version pure ceramic, double bag | ||||||
listed companies: MKS Instruments, Andover, MA, USA; Leybold GmbH, Cologne, Germany) |
장점
- Fully compatible with competive products
- 100mTorr … 1,000Torr의 풀 스케일 범위
- 전원을 켠 후 조기 안정화
- 대기압으로 부터 빠른 복원
- 내부식성 세라믹 센서
- 뛰어난 장시간 신호 안정성
- 온도 보상
- 오염 방지 센서
- 원 푸시 버튼 제로 기능
- 광범위한 전원 공급
일반적인 응용 분야
- Etch, CVD, PVD, ALD용 반도체 제조 장비
- 데이타 저장 장치 및 디스플레이 제조 장비
- 산업용 진공 장비
- 일반적인 고정밀 압력 측정
사양
유형 | 1000 Torr / 1100 mbar | 500 ... 10 Torr / mbar | 1 Torr / mbar | 0.25 Torr | 0.1 Torr / mbar | |
---|---|---|---|---|---|---|
정확성 (1) | % of reading | 0.2 | 0.2 | 0.2 | 0.25 | 0.5 |
온도 영향 | ||||||
제로 | percent FS/°C | 0.005 | 0.005 | 0.015 | 0.02 | 0.02 |
스팬 | % of reading / °C | 0.01 | 0.01 | 0.01 | 0.03 | 0.03 |
해상도 | percent FS | 0.003 | 0.003 | 0.003 | 0.003 | 0.003 |
최대 압력 | kPa (absolute) | 400 | 260 | 260 | 130 | 130 |
응답 시간 (2) | ms | 30 | 30 | 30 | 130 | 130 |
최저 측정값 | percent FS | 0.01 | 0.01 | 0.01 | 0.01 | 0.01 |
권장 최저 측정값 | percent FS | 0.05 | 0.05 | 0.05 | 0.05 | 0.05 |
최저 권장 제어 압력 | percent FS | 0.5 | 0.5 | 0.5 | 0.5 | 0.5 |
온도 | ||||||
작동(주변) | °C | +5 … +50 | +5 … +50 | +5 … +50 | +5 … +50 | +5 … +50 |
플랜지에서 베이크 아웃 (3) | °C | ≤110 | ≤110 | ≤110 | ≤110 | ≤110 |
보관 | °C | –40 … +65 | –40 … +65 | –40 … +65 | –40 … +65 | –40 … +65 |
공급 전압 | V (dc) | +14 … +30 | +14 … +30 | +14 … +30 | +14 … +30 | +14 … +30 |
전력 소모량 | W | ≤1 | ≤1 | ≤1 | ≤1 | ≤1 |
출력신호(아날로그) | V (dc) | 0 … +10 | 0 … +10 | 0 … +10 | 0 … +10 | 0 … +10 |
보호 수준 | IP 30 | IP 30 | IP 30 | IP 30 | IP 30 | |
표준 | ||||||
CE 준수 | EN 61000‑6‑2, EN 61000-6-3, EN 61010 & RoHS | EN 61000‑6‑2, EN 61000-6-3, EN 61010 & RoHS | EN 61000‑6‑2, EN 61000-6-3, EN 61010 & RoHS | EN 61000‑6‑2, EN 61000-6-3, EN 61010 & RoHS | EN 61000‑6‑2, EN 61000-6-3, EN 61010 & RoHS | |
ETL 인증 | UL 61010‑1, CSA 22.2 No.61010‑1 | UL 61010‑1, CSA 22.2 No.61010‑1 | UL 61010‑1, CSA 22.2 No.61010‑1 | UL 61010‑1, CSA 22.2 No.61010‑1 | UL 61010‑1, CSA 22.2 No.61010‑1 | |
전기 연결 | D-sub, 15 pole, male | D-sub, 15 pole, male | D-sub, 15 pole, male | D-sub, 15 pole, male | D-sub, 15 pole, male | |
진공에 노출된 재료 | Aluminum oxide ceramic (AI2O3), Vacon 70 (5), stainless steel (AISI 316L (6)), AgCuTi hard solder, sealing glass | Aluminum oxide ceramic (AI2O3), Vacon 70 (5), stainless steel (AISI 316L (6)), AgCuTi hard solder, sealing glass | Aluminum oxide ceramic (AI2O3), Vacon 70 (5), stainless steel (AISI 316L (6)), AgCuTi hard solder, sealing glass | Aluminum oxide ceramic (AI2O3), Vacon 70 (5), stainless steel (AISI 316L (6)), AgCuTi hard solder, sealing glass | Aluminum oxide ceramic (AI2O3), Vacon 70 (5), stainless steel (AISI 316L (6)), AgCuTi hard solder, sealing glass | |
내부 용적 | ||||||
1/2" 튜브 | cm³ (in.³) | |||||
DN 16 ISO KF | cm³ (in.³) | |||||
DN 16 CF-R | cm³ (in.³) | |||||
8 VCR® | cm³ (in.³) | |||||
무게 | ||||||
1/2" 튜브 | g | |||||
DN 16 ISO KF | g | |||||
DN 16 CF-R | g | |||||
8 VCR® | g |
(1) 2시간 작동 후 온도 영향 없이 25°C 주변 작동 온도에서 비선형성, 이력현상, 반복성.
(2) 10 … 90% FS 증가
(3) 비작동
(4) CDG025D-S 전용
(5) 28% Ni, 23% Co, 49% Fe
(6) 18% Cr, 10% Ni, 3% Mo, 69% Fe
부품 번호
1000 Torr / 1100 mbar | |
---|---|
부품 번호 | 설명 |
375-000 | CDG025D 1`000 Torr; 1/2¨tube |
375-001 | CDG025D 1`000 TORR; DN16ISO-KF |
375-002 | CDG025D 1`000 Torr; DN16CF-R |
375-003 | CDG025D 1000 TORR; 8-VCR |
376-000 | CDG025D 100 Torr; 1/2¨tube |
376-001 | CDG025D 100 Torr; DN16ISO-KF |
376-002 | CDG025D 100 Torr; DN16CF-R |
376-003 | CDG025D 100 TORR; 8-VCR |
377-000 | CDG025D 10 Torr; 1/2¨tube |
377-001 | CDG025D 10 Torr; DN16ISO-KF |
377-002 | CDG025D 10 Torr; DN16CF-R |
377-003 | CDG025D 10 Torr; 8-VCR |
378-000 | CDG025D 1 Torr; 1/2¨tube |
378-001 | CDG025D 1 TORR; DN16ISO-KF |
378-002 | CDG025D 1 Torr; DN16CF-R |
378-003 | CDG025D 1 TORR; 8-VCR |
379-000 | CDG025D 0.1 Torr; 1/2¨tube |
379-001 | CDG025D 0.1 Torr; DN16ISO-KF |
379-002 | CDG025D 0.1 TORR; DN16CF-R |
379-003 | CDG025D 0.1 TORR; 8-VCR |
383-001 | CDG025D 20 Torr; DN16ISO-KF |