BAG302 Medium to Ultra High Vacuum Gauge

 

The INFICON single Bayard-Alpert Hot Ion gauge BAG302 covers a wide measurement range from 1.3 × 10-9 to 6.7×10-2 mbar (1 × 10-9 to 5 × 10-2 Torr). The compact All-In-One Hot Ion gauge BAG302 offers an easy to exchange dual filament sensor, a built in OLED display, set-point relay and a log-linear analog output as well as an integrated RS485 digital interface for increased integration flexibility. These features combined with the rugged design makes the BAG302 an affordable and repeatable process to base pressure measurement instrument of its own and provides a high value/ low cost of ownership choice.

INFICON's BAG302 Hot Ion Gauges are direct drop-in replacements for the listed MKS/ GP part numbers below. This includes also older legacy MKS 354 Micro-Ion
® Modules.
 MKS
 series
 MKS
 part number
DisplayUnitsOutput Flange typeFilament INFICON
 part number
355 Micro-Ion®
355400-0-YD-TnoTorranalogDN 16 ISO-KFYttria coated iridium 352-050
355 Micro-Ion®
355400-0-YE-TnoTorranalogDN 25 ISO-KFYttria coated iridium 352-051
355 Micro-Ion®355400-0-YK-TnoTorranalogDN 40 ISO-KFYttria coated iridium 352-052
355 Micro-Ion®355400-0-YF-TnoTorranalogDN 16 CF-RYttria coated iridium 352-053
355 Micro-Ion®355400-0-YG-TnoTorranalogDN 40 CF-RYttria coated iridium 352-054
355 Micro-Ion®
355400-0-YD-TnombaranalogDN 16 ISO-KFYttria coated iridium 352-050
355 Micro-Ion®
355400-0-YE-TnombaranalogDN 25 ISO-KFYttria coated iridium 352-051
355 Micro-Ion®355400-0-YK-TnombaranalogDN 40 ISO-KFYttria coated iridium 352-052
355 Micro-Ion®355400-0-YF-TnombaranalogDN 16 CF-RYttria coated iridium 352-053
355 Micro-Ion®355400-0-YG-TnombaranalogDN 40 CF-RYttria coated iridium 352-054
355 Micro-Ion®
355400-0-YD-TnoPascalanalogDN 16 ISO-KFYttria coated iridium 352-050
355 Micro-Ion®
355400-0-YE-TnoPascalanalogDN 25 ISO-KFYttria coated iridium 352-051
355 Micro-Ion®355400-0-YK-TnoPascalanalogDN 40 ISO-KFYttria coated iridium 352-052
355 Micro-Ion®355400-0-YF-TnoPascalanalogDN 16 CF-RYttria coated iridium 352-053
355 Micro-Ion®355400-0-YG-TnoPascalanalogDN 40 CF-RYttria coated iridium 352-054
355 Micro-Ion®
355600-0-YD-TLEDTorranalogDN 16 ISO-KFYttria coated iridium 352-050
355 Micro-Ion®
355600-0-YE-TLEDTorranalogDN 25 ISO-KFYttria coated iridium 352-051
355 Micro-Ion®355600-0-YK-TLEDTorranalogDN 40 ISO-KFYttria coated iridium 352-052
355 Micro-Ion®355600-0-YF-TLEDTorranalogDN 16 CF-RYttria coated iridium 352-053
355 Micro-Ion®355600-0-YG-TLEDTorranalogDN 40 CF-RYttria coated iridium 352-054
355 Micro-Ion®
355600-0-YD-TLEDmbaranalogDN 16 ISO-KFYttria coated iridium 352-050
355 Micro-Ion®
355600-0-YE-TLEDmbaranalogDN 25 ISO-KFYttria coated iridium 352-051
355 Micro-Ion®355600-0-YK-TLEDmbaranalogDN 40 ISO-KFYttria coated iridium 352-052
355 Micro-Ion®355600-0-YF-TLEDmbaranalogDN 16 CF-RYttria coated iridium 352-053
355 Micro-Ion®355600-0-YG-TLEDmbaranalogDN 40 CF-RYttria coated iridium 352-054
355 Micro-Ion®
355600-0-YD-TLEDPascalanalogDN 16 ISO-KFYttria coated iridium 352-050
355 Micro-Ion®
355600-0-YE-TLEDPascalanalogDN 25 ISO-KFYttria coated iridium 352-051
355 Micro-Ion®355600-0-YK-TLEDPascalanalogDN 40 ISO-KFYttria coated iridium 352-052
355 Micro-Ion®355600-0-YF-TLEDPascalanalogDN 16 CF-RYttria coated iridium 352-053
355 Micro-Ion®355600-0-YG-TLEDPascalanalogDN 40 CF-RYttria coated iridium 352-054
355 Micro-Ion®
355410-0-YD-TnoTorrRS485DN 16 ISO-KFYttria coated iridium 352-050
355 Micro-Ion®
355410-0-YE-TnoTorrRS485DN 25 ISO-KFYttria coated iridium 352-051
355 Micro-Ion®355410-0-YK-TnoTorrRS485DN 40 ISO-KFYttria coated iridium 352-052
355 Micro-Ion®355410-0-YF-TnoTorrRS485DN 16 CF-RYttria coated iridium 352-053
355 Micro-Ion®355410-0-YG-TnoTorrRS485DN 40 CF-RYttria coated iridium 352-054
        
354 Micro-Ion®
354001-YD-T (legacy product)noTorranalogDN 16 ISO-KFYttria coated iridium 352-050
354 Micro-Ion®
354001-YE-T (legacy product)noTorranalogDN 25 ISO-KFYttria coated iridium 352-051
354 Micro-Ion®354001-YK-T (legacy product)noTorranalogDN 40 ISO-KFYttria coated iridium 352-052
354 Micro-Ion®354001-YF-T (legacy product)noTorranalogDN 16 CF-RYttria coated iridium 352-053
354 Micro-Ion®354001-YG-T (legacy product)noTorranalogDN 40 CF-RYttria coated iridium 352-054
354 Micro-Ion®
354001-YD-M (legacy product)nombaranalogDN 16 ISO-KFYttria coated iridium 352-050
354 Micro-Ion®
354001-YE-M (legacy product)nombaranalogDN 25 ISO-KFYttria coated iridium 352-051
354 Micro-Ion®354001-YK-M (legacy product)nombaranalogDN 40 ISO-KFYttria coated iridium 352-052
354 Micro-Ion®354001-YF-M (legacy product)nombaranalogDN 16 CF-RYttria coated iridium 352-053
354 Micro-Ion®354001-YG-M (legacy product)nombaranalogDN 40 CF-RYttria coated iridium 352-054
354 Micro-Ion®
354001-YD-P (legacy product)noPascalanalogDN 16 ISO-KFYttria coated iridium 352-050
354 Micro-Ion®
354001-YE-P (legacy product)noPascalanalogDN 25 ISO-KFYttria coated iridium 352-051
354 Micro-Ion®354001-YK-P (legacy product)noPascalanalogDN 40 ISO-KFYttria coated iridium 352-052
354 Micro-Ion®354001-YF-P (legacy product)noPascalanalogDN 16 CF-RYttria coated iridium 352-053
354 Micro-Ion®354001-YG-P (legacy product)noPascalanalogDN 40 CF-RYttria coated iridium 352-054
354 Micro-Ion®
354002-YD-T (legacy product)LEDTorranalogDN 16 ISO-KFYttria coated iridium 352-050
354 Micro-Ion®
354002-YE-T (legacy product)LEDTorranalogDN 25 ISO-KFYttria coated iridium 352-051
354 Micro-Ion®354002-YK-T (legacy product)LEDTorranalogDN 40 ISO-KFYttria coated iridium 352-052
354 Micro-Ion®354002-YF-T (legacy product)LEDTorranalogDN 16 CF-RYttria coated iridium 352-053
354 Micro-Ion®354002-YG-T (legacy product)LEDTorranalogDN 40 CF-RYttria coated iridium 352-054
354 Micro-Ion®
354002-YD-M (legacy product)LEDmbaranalogDN 16 ISO-KFYttria coated iridium 352-050
354 Micro-Ion®
354002-YE-M (legacy product)LEDmbaranalogDN 25 ISO-KFYttria coated iridium 352-051
354 Micro-Ion®354002-YK-M (legacy product)LEDmbaranalogDN 40 ISO-KFYttria coated iridium 352-052
354 Micro-Ion®354002-YF-M (legacy product)LEDmbaranalogDN 16 CF-RYttria coated iridium 352-053
354 Micro-Ion®354002-YG-M (legacy product)LEDmbaranalogDN 40 CF-RYttria coated iridium 352-054
354 Micro-Ion®
354002-YD-P (legacy product)LEDPascalanalogDN 16 ISO-KFYttria coated iridium 352-050
354 Micro-Ion®
354002-YE-P (legacy product)LEDPascalanalogDN 25 ISO-KFYttria coated iridium 352-051
354 Micro-Ion®354002-YK-P (legacy product)LEDPascalanalogDN 40 ISO-KFYttria coated iridium 352-052
354 Micro-Ion®354002-YF-P (legacy product)LEDPascalanalogDN 16 CF-RYttria coated iridium 352-053
354 Micro-Ion®354002-YG-P (legacy product)LEDPascalanalogDN 40 CF-RYttria coated iridium 352-054
354 Micro-Ion®
354005-YD-T (legacy product)noTorrRS485DN 16 ISO-KFYttria coated iridium 352-050
354 Micro-Ion®
354005-YE-T (legacy product)noTorrRS485DN 25 ISO-KFYttria coated iridium 352-051
354 Micro-Ion®354005-YK-T (legacy product)noTorrRS485DN 40 ISO-KFYttria coated iridium 352-052
354 Micro-Ion®354005-YF-T (legacy product)noTorrRS485DN 16 CF-RYttria coated iridium 352-053
354 Micro-Ion®354005-YG-T (legacy product)noTorrRS485DN 40 CF-RYttria coated iridium 352-054
354 Micro-Ion®
354005-YD-M (legacy product)nombarRS485DN 16 ISO-KFYttria coated iridium 352-050
354 Micro-Ion®
354005-YE-M (legacy product)nombarRS485DN 25 ISO-KFYttria coated iridium 352-051
354 Micro-Ion®354005-YK-M (legacy product) nombarRS485DN 40 ISO-KFYttria coated iridium 352-052
354 Micro-Ion®354005-YF-M (legacy product)nombarRS485DN 16 CF-RYttria coated iridium 352-053
354 Micro-Ion®354005-YG-M (legacy product)nombarRS485DN 40 CF-RYttria coated iridium 352-054
354 Micro-Ion®
354005-YD-P (legacy product)noPascalRS485DN 16 ISO-KFYttria coated iridium 352-050
354 Micro-Ion®
354005-YE-P (legacy product)noPascalRS485DN 25 ISO-KFYttria coated iridium 352-051
354 Micro-Ion®354005-YK-P (legacy product)noPascalRS485DN 40 ISO-KFYttria coated iridium 352-052
354 Micro-Ion®354005-YF-P (legacy product)noPascalRS485DN 16 CF-RYttria coated iridium 352-053
354 Micro-Ion®354005-YG-P (legacy product)noPascalRS485DN 40 CF-RYttria coated iridium 352-054

MKS Instruments, Andover, MA, USA;  Granville-Phillips®, Mini-Convectron®, Convectron®, Micro-Ion®, MicroPirani™, DualTrans™, UniMag™, DualMag™ and QuadroMag™ are registered trademarks of MKS Instruments, Andover, MA

장점

  • Wide measurement range from 1.3 × 10-9 to 6.7×10-2 mbar(1 × 10-9 to 5 × 10-2 Torr)
  • Two standard long-life yttrium oxide coated iridium filaments
  • All-in-One active gauge with built-in display, set-point, analog output and standard integrated RS485 digital interface
  • Bright digital OLED display with keypad for simple setup, operation and programming
  • User programmable set point relay
  • User programmable display units in mbar, Torr or Pa
  • User selectable Auto-ranging of emission current
  • Mechanical strength and ruggedness
  • Choice of various flange options
  • Easy to exchange sensing element
  • Compliance & standards: CE, RoHS
  • Direct drop in replaces Granville-Phillips® 354 Micro-Ion® Module – identical control functions including softwarecommands (RS485)

    (Granville-Phillips® and Micro-Ion® are registered trademarks of MKS Instruments, Andover, MA)

일반적인 응용 분야

  • Pressure measurement in semiconductor process and transfer chambers
  • Industrial coating
  • General vacuum measurement and control in the low to ultra high vacuum range

뉴스

We are accepting orders from now on!
  • BAG302 Dimensional drawing.png

사양

유형 BAG302
Messurement range 1.3 x 10-9 ... 6.7 x 10-2
Accuracy (N2)  
1.3×10-8 … 6.7 ×10-2 mbar % of reading ±15
1×10-8 … 5×10-2 Torr % of reading ±15
Repeatability % of reading ±5
Degas  
p < 6.7 x 10-5 mbar electron bombardment, 2 min (default)
p < 5.00 x 10-5 Torr (programmable between 2 ... 10 min)
Temperature  
Operation (ambient) °C 0 ... +40
Storage °C -40 ... +70
Bakeout at flange (sensor only, electrics removed) °C 200
Supply voltage V (dc) +20 ... +28
Output signal analog V 0 ... +9 (log-linear)
Voltage vs. pressure volts per decade 1
Setpoint relay 1 (single-pole double-throw relay (SPDT))
1 A at 30 V (dc) resistive, or V (ac) non-inductive
Electrical connection D-Sub, 9-pin, male for analog, D-Sub, 9-pin, female for RS485
Interface (digital) RS485
Emission control manual
Filament two Yt2O2 coated Ir
Filament status display / digital output
Digital functions degas, filament on/off and emission control
Materials exposed to vacuum Yt2O3, Ir, W, Ta, stainless steel, glass, Ni
Mounting orientation any
Internal volume cm³ (in.³) 16.4 (1.0)
Weight KF / CF 270
  • BAG302 Ordering Information.PNG

부품 번호

BAG302
부품 번호 설명
352-050 BAG302-S 9DSub,1SP,OLED,16KF
352-051 BAG302-S 9DSub,1SP,OLED,25KF
352-052 BAG302-S 9DSub,1SP,OLED,40KF
352-053 BAG302-S 9DSub,1SP,OLED,16CFR
352-054 BAG302-S 9DSub,1SP,OLED,40CFR
352-055 BAG302-S 9DSub,1SP,OLED,3/4in. Tube
352-056 BAG302-S 9DSub,1SP,OLED,8VCR

예비 부품

BAG302
부품 번호 설명
352-060 BAG302 Spare sensor 16KF
352-061 BAG302 Spare sensor 25KF
352-062 BAG302 Spare sensor 40KF
352-063 BAG302 Spare sensor 16CFR
352-064 BAG302 Spare sensor 40CFR
352-065 BAG302 Spare sensor 3/4in. Tube
352-066 BAG302 Spare sensor 1/8NPT
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