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BAG302 Medium to Ultra High Vacuum Gauge
| The INFICON single Bayard-Alpert Hot Ion gauge BAG302 covers a wide measurement range from 1.3 × 10-9 to 6.7×10-2 mbar (1 × 10-9 to 5 × 10-2 Torr). The compact All-In-One Hot Ion gauge BAG302 offers an easy to exchange dual filament sensor, a built in OLED display, set-point relay and a log-linear analog output as well as an integrated RS485 digital interface for increased integration flexibility. These features combined with the rugged design makes the BAG302 an affordable and repeatable process to base pressure measurement instrument of its own and provides a high value/ low cost of ownership choice. INFICON's BAG302 Hot Ion Gauges are direct drop-in replacements for the listed MKS/ GP part numbers below. This includes also older legacy MKS 354 Micro-Ion® Modules. | |||||||
| MKS series | MKS part number | Display | Units | Output | Flange type | Filament | INFICON part number |
355 Micro-Ion® | 355400-0-YD-T | no | Torr | analog | DN 16 ISO-KF | Yttria coated iridium | 352-050 |
355 Micro-Ion® | 355400-0-YE-T | no | Torr | analog | DN 25 ISO-KF | Yttria coated iridium | 352-051 |
| 355 Micro-Ion® | 355400-0-YK-T | no | Torr | analog | DN 40 ISO-KF | Yttria coated iridium | 352-052 |
| 355 Micro-Ion® | 355400-0-YF-T | no | Torr | analog | DN 16 CF-R | Yttria coated iridium | 352-053 |
| 355 Micro-Ion® | 355400-0-YG-T | no | Torr | analog | DN 40 CF-R | Yttria coated iridium | 352-054 |
355 Micro-Ion® | 355400-0-YD-T | no | mbar | analog | DN 16 ISO-KF | Yttria coated iridium | 352-050 |
355 Micro-Ion® | 355400-0-YE-T | no | mbar | analog | DN 25 ISO-KF | Yttria coated iridium | 352-051 |
| 355 Micro-Ion® | 355400-0-YK-T | no | mbar | analog | DN 40 ISO-KF | Yttria coated iridium | 352-052 |
| 355 Micro-Ion® | 355400-0-YF-T | no | mbar | analog | DN 16 CF-R | Yttria coated iridium | 352-053 |
| 355 Micro-Ion® | 355400-0-YG-T | no | mbar | analog | DN 40 CF-R | Yttria coated iridium | 352-054 |
355 Micro-Ion® | 355400-0-YD-T | no | Pascal | analog | DN 16 ISO-KF | Yttria coated iridium | 352-050 |
355 Micro-Ion® | 355400-0-YE-T | no | Pascal | analog | DN 25 ISO-KF | Yttria coated iridium | 352-051 |
| 355 Micro-Ion® | 355400-0-YK-T | no | Pascal | analog | DN 40 ISO-KF | Yttria coated iridium | 352-052 |
| 355 Micro-Ion® | 355400-0-YF-T | no | Pascal | analog | DN 16 CF-R | Yttria coated iridium | 352-053 |
| 355 Micro-Ion® | 355400-0-YG-T | no | Pascal | analog | DN 40 CF-R | Yttria coated iridium | 352-054 |
355 Micro-Ion® | 355600-0-YD-T | LED | Torr | analog | DN 16 ISO-KF | Yttria coated iridium | 352-050 |
355 Micro-Ion® | 355600-0-YE-T | LED | Torr | analog | DN 25 ISO-KF | Yttria coated iridium | 352-051 |
| 355 Micro-Ion® | 355600-0-YK-T | LED | Torr | analog | DN 40 ISO-KF | Yttria coated iridium | 352-052 |
| 355 Micro-Ion® | 355600-0-YF-T | LED | Torr | analog | DN 16 CF-R | Yttria coated iridium | 352-053 |
| 355 Micro-Ion® | 355600-0-YG-T | LED | Torr | analog | DN 40 CF-R | Yttria coated iridium | 352-054 |
355 Micro-Ion® | 355600-0-YD-T | LED | mbar | analog | DN 16 ISO-KF | Yttria coated iridium | 352-050 |
355 Micro-Ion® | 355600-0-YE-T | LED | mbar | analog | DN 25 ISO-KF | Yttria coated iridium | 352-051 |
| 355 Micro-Ion® | 355600-0-YK-T | LED | mbar | analog | DN 40 ISO-KF | Yttria coated iridium | 352-052 |
| 355 Micro-Ion® | 355600-0-YF-T | LED | mbar | analog | DN 16 CF-R | Yttria coated iridium | 352-053 |
| 355 Micro-Ion® | 355600-0-YG-T | LED | mbar | analog | DN 40 CF-R | Yttria coated iridium | 352-054 |
355 Micro-Ion® | 355600-0-YD-T | LED | Pascal | analog | DN 16 ISO-KF | Yttria coated iridium | 352-050 |
355 Micro-Ion® | 355600-0-YE-T | LED | Pascal | analog | DN 25 ISO-KF | Yttria coated iridium | 352-051 |
| 355 Micro-Ion® | 355600-0-YK-T | LED | Pascal | analog | DN 40 ISO-KF | Yttria coated iridium | 352-052 |
| 355 Micro-Ion® | 355600-0-YF-T | LED | Pascal | analog | DN 16 CF-R | Yttria coated iridium | 352-053 |
| 355 Micro-Ion® | 355600-0-YG-T | LED | Pascal | analog | DN 40 CF-R | Yttria coated iridium | 352-054 |
355 Micro-Ion® | 355410-0-YD-T | no | Torr | RS485 | DN 16 ISO-KF | Yttria coated iridium | 352-050 |
355 Micro-Ion® | 355410-0-YE-T | no | Torr | RS485 | DN 25 ISO-KF | Yttria coated iridium | 352-051 |
| 355 Micro-Ion® | 355410-0-YK-T | no | Torr | RS485 | DN 40 ISO-KF | Yttria coated iridium | 352-052 |
| 355 Micro-Ion® | 355410-0-YF-T | no | Torr | RS485 | DN 16 CF-R | Yttria coated iridium | 352-053 |
| 355 Micro-Ion® | 355410-0-YG-T | no | Torr | RS485 | DN 40 CF-R | Yttria coated iridium | 352-054 |
354 Micro-Ion® | 354001-YD-T (legacy product) | no | Torr | analog | DN 16 ISO-KF | Yttria coated iridium | 352-050 |
354 Micro-Ion® | 354001-YE-T (legacy product) | no | Torr | analog | DN 25 ISO-KF | Yttria coated iridium | 352-051 |
| 354 Micro-Ion® | 354001-YK-T (legacy product) | no | Torr | analog | DN 40 ISO-KF | Yttria coated iridium | 352-052 |
| 354 Micro-Ion® | 354001-YF-T (legacy product) | no | Torr | analog | DN 16 CF-R | Yttria coated iridium | 352-053 |
| 354 Micro-Ion® | 354001-YG-T (legacy product) | no | Torr | analog | DN 40 CF-R | Yttria coated iridium | 352-054 |
354 Micro-Ion® | 354001-YD-M (legacy product) | no | mbar | analog | DN 16 ISO-KF | Yttria coated iridium | 352-050 |
354 Micro-Ion® | 354001-YE-M (legacy product) | no | mbar | analog | DN 25 ISO-KF | Yttria coated iridium | 352-051 |
| 354 Micro-Ion® | 354001-YK-M (legacy product) | no | mbar | analog | DN 40 ISO-KF | Yttria coated iridium | 352-052 |
| 354 Micro-Ion® | 354001-YF-M (legacy product) | no | mbar | analog | DN 16 CF-R | Yttria coated iridium | 352-053 |
| 354 Micro-Ion® | 354001-YG-M (legacy product) | no | mbar | analog | DN 40 CF-R | Yttria coated iridium | 352-054 |
354 Micro-Ion® | 354001-YD-P (legacy product) | no | Pascal | analog | DN 16 ISO-KF | Yttria coated iridium | 352-050 |
354 Micro-Ion® | 354001-YE-P (legacy product) | no | Pascal | analog | DN 25 ISO-KF | Yttria coated iridium | 352-051 |
| 354 Micro-Ion® | 354001-YK-P (legacy product) | no | Pascal | analog | DN 40 ISO-KF | Yttria coated iridium | 352-052 |
| 354 Micro-Ion® | 354001-YF-P (legacy product) | no | Pascal | analog | DN 16 CF-R | Yttria coated iridium | 352-053 |
| 354 Micro-Ion® | 354001-YG-P (legacy product) | no | Pascal | analog | DN 40 CF-R | Yttria coated iridium | 352-054 |
354 Micro-Ion® | 354002-YD-T (legacy product) | LED | Torr | analog | DN 16 ISO-KF | Yttria coated iridium | 352-050 |
354 Micro-Ion® | 354002-YE-T (legacy product) | LED | Torr | analog | DN 25 ISO-KF | Yttria coated iridium | 352-051 |
| 354 Micro-Ion® | 354002-YK-T (legacy product) | LED | Torr | analog | DN 40 ISO-KF | Yttria coated iridium | 352-052 |
| 354 Micro-Ion® | 354002-YF-T (legacy product) | LED | Torr | analog | DN 16 CF-R | Yttria coated iridium | 352-053 |
| 354 Micro-Ion® | 354002-YG-T (legacy product) | LED | Torr | analog | DN 40 CF-R | Yttria coated iridium | 352-054 |
354 Micro-Ion® | 354002-YD-M (legacy product) | LED | mbar | analog | DN 16 ISO-KF | Yttria coated iridium | 352-050 |
354 Micro-Ion® | 354002-YE-M (legacy product) | LED | mbar | analog | DN 25 ISO-KF | Yttria coated iridium | 352-051 |
| 354 Micro-Ion® | 354002-YK-M (legacy product) | LED | mbar | analog | DN 40 ISO-KF | Yttria coated iridium | 352-052 |
| 354 Micro-Ion® | 354002-YF-M (legacy product) | LED | mbar | analog | DN 16 CF-R | Yttria coated iridium | 352-053 |
| 354 Micro-Ion® | 354002-YG-M (legacy product) | LED | mbar | analog | DN 40 CF-R | Yttria coated iridium | 352-054 |
354 Micro-Ion® | 354002-YD-P (legacy product) | LED | Pascal | analog | DN 16 ISO-KF | Yttria coated iridium | 352-050 |
354 Micro-Ion® | 354002-YE-P (legacy product) | LED | Pascal | analog | DN 25 ISO-KF | Yttria coated iridium | 352-051 |
| 354 Micro-Ion® | 354002-YK-P (legacy product) | LED | Pascal | analog | DN 40 ISO-KF | Yttria coated iridium | 352-052 |
| 354 Micro-Ion® | 354002-YF-P (legacy product) | LED | Pascal | analog | DN 16 CF-R | Yttria coated iridium | 352-053 |
| 354 Micro-Ion® | 354002-YG-P (legacy product) | LED | Pascal | analog | DN 40 CF-R | Yttria coated iridium | 352-054 |
354 Micro-Ion® | 354005-YD-T (legacy product) | no | Torr | RS485 | DN 16 ISO-KF | Yttria coated iridium | 352-050 |
354 Micro-Ion® | 354005-YE-T (legacy product) | no | Torr | RS485 | DN 25 ISO-KF | Yttria coated iridium | 352-051 |
| 354 Micro-Ion® | 354005-YK-T (legacy product) | no | Torr | RS485 | DN 40 ISO-KF | Yttria coated iridium | 352-052 |
| 354 Micro-Ion® | 354005-YF-T (legacy product) | no | Torr | RS485 | DN 16 CF-R | Yttria coated iridium | 352-053 |
| 354 Micro-Ion® | 354005-YG-T (legacy product) | no | Torr | RS485 | DN 40 CF-R | Yttria coated iridium | 352-054 |
354 Micro-Ion® | 354005-YD-M (legacy product) | no | mbar | RS485 | DN 16 ISO-KF | Yttria coated iridium | 352-050 |
354 Micro-Ion® | 354005-YE-M (legacy product) | no | mbar | RS485 | DN 25 ISO-KF | Yttria coated iridium | 352-051 |
| 354 Micro-Ion® | 354005-YK-M (legacy product) | no | mbar | RS485 | DN 40 ISO-KF | Yttria coated iridium | 352-052 |
| 354 Micro-Ion® | 354005-YF-M (legacy product) | no | mbar | RS485 | DN 16 CF-R | Yttria coated iridium | 352-053 |
| 354 Micro-Ion® | 354005-YG-M (legacy product) | no | mbar | RS485 | DN 40 CF-R | Yttria coated iridium | 352-054 |
354 Micro-Ion® | 354005-YD-P (legacy product) | no | Pascal | RS485 | DN 16 ISO-KF | Yttria coated iridium | 352-050 |
354 Micro-Ion® | 354005-YE-P (legacy product) | no | Pascal | RS485 | DN 25 ISO-KF | Yttria coated iridium | 352-051 |
| 354 Micro-Ion® | 354005-YK-P (legacy product) | no | Pascal | RS485 | DN 40 ISO-KF | Yttria coated iridium | 352-052 |
| 354 Micro-Ion® | 354005-YF-P (legacy product) | no | Pascal | RS485 | DN 16 CF-R | Yttria coated iridium | 352-053 |
| 354 Micro-Ion® | 354005-YG-P (legacy product) | no | Pascal | RS485 | DN 40 CF-R | Yttria coated iridium | 352-054 |
MKS Instruments, Andover, MA, USA; Granville-Phillips®, Mini-Convectron®, Convectron®, Micro-Ion®, MicroPirani™, DualTrans™, UniMag™, DualMag™ and QuadroMag™ are registered trademarks of MKS Instruments, Andover, MA | |||||||
장점
- Wide measurement range from 1.3 × 10-9 to 6.7×10-2 mbar(1 × 10-9 to 5 × 10-2 Torr)
- Two standard long-life yttrium oxide coated iridium filaments
- All-in-One active gauge with built-in display, set-point, analog output and standard integrated RS485 digital interface
- Bright digital OLED display with keypad for simple setup, operation and programming
- User programmable set point relay
- User programmable display units in mbar, Torr or Pa
- User selectable Auto-ranging of emission current
- Mechanical strength and ruggedness
- Choice of various flange options
- Easy to exchange sensing element
- Compliance & standards: CE, RoHS
- Direct drop in replaces Granville-Phillips® 354 Micro-Ion® Module – identical control functions including softwarecommands (RS485)
(Granville-Phillips® and Micro-Ion® are registered trademarks of MKS Instruments, Andover, MA)
일반적인 응용 분야
- Pressure measurement in semiconductor process and transfer chambers
- Industrial coating
- General vacuum measurement and control in the low to ultra high vacuum range
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| 유형 | BAG302 | |
|---|---|---|
| Messurement range | 1.3 x 10-9 ... 6.7 x 10-2 | |
| Accuracy (N2) | ||
| 1.3×10-8 … 6.7 ×10-2 mbar | % of reading | ±15 |
| 1×10-8 … 5×10-2 Torr | % of reading | ±15 |
| Repeatability | % of reading | ±5 |
| Degas | ||
| p < 6.7 x 10-5 | mbar | electron bombardment, 2 min (default) |
| p < 5.00 x 10-5 | Torr | (programmable between 2 ... 10 min) |
| Temperature | ||
| Operation (ambient) | °C | 0 ... +40 |
| Storage | °C | -40 ... +70 |
| Bakeout at flange (sensor only, electrics removed) | °C | 200 |
| Supply voltage | V (dc) | +20 ... +28 |
| Output signal analog | V | 0 ... +9 (log-linear) |
| Voltage vs. pressure | volts per decade | 1 |
| Setpoint relay |
1 (single-pole double-throw relay (SPDT)) 1 A at 30 V (dc) resistive, or V (ac) non-inductive |
|
| Electrical connection | D-Sub, 9-pin, male for analog, D-Sub, 9-pin, female for RS485 | |
| Interface (digital) | RS485 | |
| Emission control | manual | |
| Filament | two Yt2O2 coated Ir | |
| Filament status | display / digital output | |
| Digital functions | degas, filament on/off and emission control | |
| Materials exposed to vacuum | Yt2O3, Ir, W, Ta, stainless steel, glass, Ni | |
| Mounting orientation | any | |
| Internal volume | cm³ (in.³) | 16.4 (1.0) |
| Weight KF / CF | 270 | |
부품 번호
| BAG302 | |
|---|---|
| 부품 번호 | 설명 |
| 352-050 | BAG302-S 9DSub,1SP,OLED,16KF |
| 352-051 | BAG302-S 9DSub,1SP,OLED,25KF |
| 352-052 | BAG302-S 9DSub,1SP,OLED,40KF |
| 352-053 | BAG302-S 9DSub,1SP,OLED,16CFR |
| 352-054 | BAG302-S 9DSub,1SP,OLED,40CFR |
| 352-055 | BAG302-S 9DSub,1SP,OLED,3/4in. Tube |
| 352-056 | BAG302-S 9DSub,1SP,OLED,8VCR |
예비 부품
| BAG302 | |
|---|---|
| 부품 번호 | 설명 |
| 352-060 | BAG302 Spare sensor 16KF |
| 352-061 | BAG302 Spare sensor 25KF |
| 352-062 | BAG302 Spare sensor 40KF |
| 352-063 | BAG302 Spare sensor 16CFR |
| 352-064 | BAG302 Spare sensor 40CFR |
| 352-065 | BAG302 Spare sensor 3/4in. Tube |
| 352-066 | BAG302 Spare sensor 1/8NPT |
