Drop-in Replacement Products for Vacuum Gauges and Controllers
| In this category you can find a wide selection of INFICON Vacuum Gauges to cover your vacuum measurement needs. INFICON products are in many cases 100% drop in compatible to current and legacy product lines shown below: | ||||
| High Precision Capacitance Manometers and Diaphragm Switches | ||||
| Product Line | Measuring Principle | INFICON Type | ||
| 722 (MKS), 730 (SETRA) | Ambient Capacitive Gauges | = | Porter CDG020D | |
| 626, AA01,623 (MKS), CTR 100 (Leybold) | Ambient Capacitive Gauges | = | SKY CDG025D | |
| 627, E27, 727 (MKS), CTR 101 (Leybold) | 45°C Capacitive Gauges | = | SKY CDG045D | |
| 628, E28, 728, 625 (MKS) | 100°C Capacitive Gauges | = | SKY CDG100D | |
| 629 (MKS) | 150/160°C Capacitive Gauges | = | SKY CDG160D | |
| 631 (MKS) | 200°C Capacitive Gauges | = | SKY CDG200D | |
| AA06, 690A (MKS) | Reference capacitive gauges | = | Cube CDGsci | |
| 727 (MKS) | 45°C Capacitive Gauges | = | Edge CDG45D | |
| 728 (MKS) | 100°C Capacitive Gauges | = | Edge CDG100D | |
| DI 2000 (Leybold) | Capacitive DI Sensors | = | DI 200 / DI 2000 | |
| 51A, 51B (MKS) | Vacuum switches | = | VSA 200 | |
| 41B (MKS) | Vacuum switches | = | VSD 200 | |
| PS 115 (Leybold) | Vacuum switches | = | VSC150A | |
| PS 113A (Leybold) | Vacuum switches | = | VSA100A | |
| Wide Ranges Pirani- and Ionisation Gauges | ||||
| Product Line | Measuring Principle | INFICON Type | ||
| 275 (MKS or GP) analog or RS485 | Convection enhanced Pirani | = | PGE500 RS45/ analog | |
| 275 (MKS or GP) DeviceNet | Convection enhanced Pirani | = | PGE500 DeviceNet | |
| TTR 91/ TTR 96 (Leybold) | Pirani | = | PSG500, PSG502 | |
| 925 Micro Pirani™ (MKS) TTR 91 N/ TTR 96 N (Leybold) | MEMS-Pirani | = | PSG500, PSG502 | |
| TTR 91 R (Leybold) | Pirani | = | PSG500, PSG550 | |
| TTR 911, TTR 916 (Leybold) | Pirani | = | PSG550, PSG552 | |
| 925 MicroPirani™ (MKS) TTR 911 N, TTR 916N (Leybold) | MEMS Pirani | = | PSG550, PSG552 | |
| 910 Dual Trans™MicroPirani™ (MKS) TTR 101 N (Leybold) | MEMS Pirani/ Piezo | = | PCG55x | |
| 901P MKS MicroPirani™-Piezo (MKS) | MEMS Pirani/ ATM Piezo | = | PCG55x | |
| ITR 90, ITR 200 (Leybold) | Hot Ion/ Pirani | = | BPG400, BPG402 | |
| 355 Micro-Ion® (MKS) | Hot Ion | = | BAG302 | |
| 392 Micro-Ion® Plus (MKS) | Hot Ion/ Pirani | = | BPG400/ BPG402 | |
| 390 Micro-Ion® ATM (MKS) | Hot Ion/ Pirani/ Piezo/ ATM Piezo | = | BCG450 | |
| PTR 225 analog (Leybold) | Cold Cathode (Penning) | = | PEG100, MAG500 | |
| PTR 225 N (Leybold) | Cold Cathode (inv. Magnetron) | = | PEG100, MAG500 | |
| PTR 237 analog/ DeviceNet (Leybold) | Cold Cathode (Penning) | = | PEG100, PEG100-D | |
| PTR 90 (Leybold) | Cold Cathode (inv. Magnetron) | = | MPG400 | |
| 500, 903 (MKS) | Cold Cathode | = | MAG500, MPG500 | |
| 971B, 971B, 974B (MKS) PTR 90 N (Leybold) | CC/ Pirani/ Piezo/ ATM Piezo Cold Cathode/ Pirani | = | MPG500 MPG500 | |
| Center One, Two, Three (Leybold) | Active Gauge Controller | = | VGC501, VGC502, VGC503 | |
| (listed companies: MKS Instruments, Andover, MA, USA; Leybold GmbH, Cologne, Germany) | ||||
Convection Enhanced Pirani Gauges - advanced series
All-in-One Convection enhanced Pirani Gauge for higher accuracy between 100 mbar and atmosphere.제품
Convection Gauge Enhanced Pirani Gauges - passive - 275 compatible
The Convection enhanced Pirani Gauge PGE050 for higher accuracy between 100 mbar and atmosphere is intended for use as gauge sensor in the classic "Passive Gauge - Controller combination". Our Passive Gauge Controller VGC031 and VGC083 are the counterparts of choice.제품
피라니 스탠다드 게이지 - 고급 시리즈
다양한 기능을 가진 소형 피라니 게이지 제품군(필드버스 옵션 포함) - 5 x 10-4 mbar ~ 대기 범위의 특정 진공 측정에 적합한 제품으로 인정됨제품
피라니 커패시턴스 다이아프램 게이지
'대기압에 가까운' 범위에서 뛰어난 정확성을 갖추고 5 x 10-4mbar부터 대기압 사이 측정 범위를 제공하는 피라니 및 커패시턴스 다이아프램 게이지의 결합제품
바야드-알퍼트 피라니 게이지
초고진공부터 대기압까지 매우 광범위한 측정이 가능한 컴비네이션 게이지 기술제품
Bayard Alpert Hot Ion Gauge - 354, 355 COMPATIBLE
For applications that require a stand alone hot ion gauge, INFICON offers the single Technology Bayard Alpert Hot Ion Gauge with its NEW highly economical standard double filament solution.제품
새로운 Inverted Magnetron Pirani 게이지
새로운 Gemini Inverted Magnetron 진공 게이지는 모든 진공 측정 분야(진행 중)에 적용 가능한 장치이며 대기압부터 1x10– 9mbar 사이를 측정합니다.제품
인버티드 마그네트론 피라니 게이지
인버티드 마그네트론 및 피라니 게이지 원리의 결합은 대기압부터 5 x 10-9mbar의 압력을 측정합니다.제품
페닝 콜드 캐소드 게이지
견고한 페닝 콜드 캐소드 게이지는 1 x 10-2mbar부터 1 x 10-9mbar의 고진공 범위에서 신뢰성 있는 고진공 측정을 제공합니다. Fieldbus 옵션도 제공됩니다.
제품
Spare sensor head BAG100
Spare sensor head for INICON BAG100 Bayard-Alpert Hot Ion Gauges.
BAG100 Hot Ion Gauges are discontinued since 2004. INFICON sill is able to support enduser, who have this gauge type still running on their production tools after all those years with the original spare sensor head.
제품
Pirani Standard Gauges - Passive
The INFICON Pirani Standard Gauges PSG050 & PSG051 use the vacuum gauge
controller VGC012 or VGC023 as operating Units. These VGC012 and VGC023 controller units are already discontinued for many years now but still can be seen in the field very often. So PSGG050 & PSG051 are still reuqested by many enduser as "consumable" to make the customer able to continue the keep his poduction tool alive.
제품
Penning Cold Cathode Gauges - Passive
The passive PEG050 Penning Cold Cathode Gauge provides reliable high vacuum measurements and is intended for the use with the older and meanwhile discontinued vacuum gauge Controller VGC023 as operating and control unit.
The rugged penning cold cathode sensor has no filment to burn out and due to the titanium cathode plates and the reduced high voltage after plasma ignition the gauge can be operated also in demanding sputtering applications.
장점
진공 스위치
액티브 전자 스위치, 패시브 기계 스위치, 절대압 및 차압 버전제품
Vacuum Gauge Controller (for passive convection enhanced Piranis) and Accessories
The NEW INFICON Vacuum Gauge Controller 031 (VGC031) is designed for use in conjunction with the INFICON Pirani Gauge Enhanced 050 (PGE050) and acts as a convenient power supply, control and readout. VGC031 and PGE050 are a flexible combination to monitor your vacuum system in the range from 1.3 × 10-4 up to 1333 mbar (1 × 10-4 up to 1000 Torr). The VGC031 with its space saving panel mount housing supports a variety of technical features as 2 set point relays, 4 user selectable analog outputs and offers additionally RS232/ RS485 digital interfaces. The bright, sharp and clear OLED display with the integrated keypad user interface rounds out this user friendly vacuum gauge controller package. The rugged industrial design makes the VGC031 in combination with the convection enhanced PGE050 gauge sensor a very good choice for many vacuum applications were economical vacuum measurement from low to high vacuum range is required.제품
Vacuum Gauge Controller (for passive Ionisation Gauges) and Accessories
The NEW INFICON Vacuum Gauge Controller VGC083 is designed for use with passive gauge heads BAG05x and PGE050 in a fixed combination of two PGE050 gauges and one BAG05x gauge. The VGC083 controlls and monitors vacuum pressure from ATM down to 2.7×10-11mbar using the BAG and PGE gauges. Six (6) single-pole relays assignable to any of the gauge heads along with RS232 and RS485 interfaces aid in system integration. The rugged industrial design of the VGC083 in combination with the passive gauge heads provide a reliable and economical system for vacuum applications requiring a wide vacuum measurement range.제품
진공 게이지 및 구성품 카탈로그 및 브로셔
진공 제어 제품 카탈로그 및 일반 문서/브로셔 다운로드제품
