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IMM-200 Thin Film Deposition Monitor
MAKING EXCELLENCE REPEATABLE
Protect and Grow Your Profit with Precision Rate and Thickness Monitoring
IMM-200 is a deposition monitor built with ModeLock technology to maximize reproducibility and uniformity with the highest thickness accuracy, best measurement resolution, and lowest rate noise.
With the oscillator built-in IMM-200 can be easily integrated into an Ethernet system with minimal hardware and footprint. This powerful and precise measurement monitor is sure to bring a new level of performance to your process.
機能
- INFICON ModeLock technology provides the longest crystal life and ensures the most stable, highest resolution rate and thickness measurement available, even at very low rates
- Maximize yield with the best QCM thickness measurement possible
- Single channel rate and thickness monitor without unnecessary added features to minimize cost
- ±0.0035 Hz over 100 ms sample
- Ethernet communications for seamless integration
- Compact size to minimize integration costs by saving tool real estate
- Expert application support, able to discuss unique application needs and give greater support than the competition
- RoHS compliant
標準的なアプリケーション
- Semiconductor Manufacturing
- OLED Applications
仕様
| タイプ | IMM-200 | |
|---|---|---|
| Measurement | ||
| Sensor inputs | 1 | |
| 測定頻度範囲 | 6.0 to 4.5 MHz (fixed) | |
| Reference frequency stability | ±2 ppm 0-60°C | |
| 周波数分解能 |
±0.0035 Hz @ 6 MHz |
|
| Rate and thickness resolution | 0.0042 Å (new crystal); 0.0076 Å (crystal @ 4.5 MHz) over 100 ms sample for material density = 1.0, Z-Ratio = 1.0 | |
| Measurement interval | 100 ms | |
| Measurement technique | ModeLock | |
| Operation and Dimensions | ||
| Input voltage | 24 V (dc) | |
| 動作温度 | 0 to 50°C (32 to 122°F) | |
| Size | 222.6 mm (8.76 in.) x 106.1 mm (4.18 in.) x 35.3 mm (1.39 in.) | |
| Weight | 0.48 kg (1.05 lbs.) | |
| Communication type | Ethernet, 1 RJ45 jack | |
部品番号
| IMM-200 | |
|---|---|
| 部品番号 | 品目 |
| 785-602-G1 | IMM-200 Thin Film Deposition Monitor |
アクセサリ
| 部品番号 | 品目 |
|---|---|
| Optional Power Supplies | The power supplies listed below are rated for an input of 100 to 249 V (ac), 2 A, 50 to 60 Hz with an output of 24V (dc), 3.34 A, 80 W maximum. |
| 961-021-G1 | MPH電源80 - 250 VAC / 4フィート (1.2m) USプラグ |
| 961-021-G2 | MPH電源80 - 250 VAC / 4フィート (1.2m) USプラグ、15フィート (4.5m) 延長ケーブル |
| 961-021-G3 | MPH電源80 - 250 VAC / 4フィート (1.2m) USプラグ、30フィート (9m) 延長ケーブル |
| 961-021-G4 | MPH電源80 - 250 VAC / 4フィート (1.2m) 230Vプラグ |
| 961-021-G5 | MPH電源80 - 250 VAC / 4フィート (1.2m) 230Vプラグ、15フィート (4.5m) 延長ケーブル |
| 961-021-G6 | MPH電源80 - 250 VAC / 4フィート (1.2m) USプラグ、230Vフィート (9m) 延長ケーブル |
| 961-021-G7 | Power Supply Kit IL 240V |
| 961-021-G8 | Power Supply Kit IL 4.5 M Extension |
| 961-021-G9 | Power Supply Kit IL 9.0 M Extension |
| 961-021-G10 | Power Supply Kit UK 240V |
| 961-021-G11 | Power Supply Kit UK 4.5 M Extension |
| 961-021-G12 | Power Supply Kit UK 9.0 M Extension |
| Optional Mounting Bracket | |
| 785-202-G1 | Mounting bracket with four clean room compatible shock absorbing, female-to-female, stainless steel mounting feet |
| 785-201-G1 | Mounting bracket with four shock absorbing, male-to-female, black Neoprene rubber mounting feet |
| Optional Communications Cable | |
| 600-1190-P1 | ETHERNET COMUNICATION CABLE 1 METER |
| 600-1190-P2 | SPEC- ETHERNET COMMUNICATION CABLE .3M |
| 600-1190-P4 | ETHERNET COMUNICATION CABLES 4.3 METER |
| 600-1190-P8 | Cable, Ethernet Communication, 7.6 Meter |
| 600-1190-P15 | ETHERNET COMUNICATION CABLE 15.3 METER |
消耗品
| 名前 | 説明 |
|---|---|
| 水晶モニター振動子 | 水晶モニター振動子 |
