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VSA100A differential to ambient
The INFICON Vacuum Switch VSA100A is used as a safety switch in vacuum systems. For example, to automatically interrupt the gas supply when venting vacuum systems with a purge gas at a pressure of 6 mbar below atmospheric pressure. At a differential pressure of 6 mbar resp. return switching pressure of 3 mbar below atmospheric pressure, an elastic diaphragm actuates a changeover contact which in turn may be used to switch directly any ancillary equipment.
Advantages
- Reliable and budget-priced vacuum switch
- High life time
- Rugged design
- Easy to integrate
- IP 44 protection
Typical Applications
- Control of load lock chambers
- Safety shutdown of vacuum systems
Specifications
Type | VSA100A | |
---|---|---|
Switching pressure | mbar | 6 ±2 (below atmosphere) |
Back switching | mbar | 3 ±2 (below atmosphere) |
Operating pressure (absolute) | bar | <2 |
Helium permeation | mbar•L/s | <10-6 |
Leak rate | mbar•L/s | <5 x 10-8 |
Temperature | ||
Operation | °C | 0 ... +85 |
Storage | °C | -20 ... +85 |
Switching contacts (Change over contact, gold plated) | ||
Voltage max. | 24 | |
Current max. | mA | 30 (24 V(dc)) / 100 (24 V(ac)) |
Load min. | mA | 1 |
Electrical connector | cable, bare wire | |
Cable length, standard | m (ft.) | 3 (9.9) |
Vacuum connection | DN 16 ISO-KF | |
Protective type | IP 44 | |
Mounting orientation | vertical (standing) | |
Internal volume | cm³ (in.³) | 2 (0.122) |
Materials exposed to vacuum | stainless steel 1.4305, EPDM, PTFE (Teflon) | |
Weight | g | 315 |
Technical Note: Due to the diaphragm material used (EPDM) the Vacuum Switch VSA100A is not suited for applications in which the process gascontains large quantities of helium. The leak rate of the diaphragm for helium is -6 mbar l/s.
Part Number
VSA100A | |
---|---|
Part Number | Description |
399-001 | VSA100A Vacuum Switch DN16KF, 3m Cable |