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Transpector® CPM 3 Compact Process Monitor
FAST, FIELD-READY PROCESS MONITORING SYSTEM
Performance, Reliability, and Versatility
INFICON Transpector CPM has been the market-leading Residual Gas Analyzer (RGA) process monitoring system in the semiconductor industry for over a decade. Now Transpector CPM 3 provides industry leading measurement speed and sensitivity through a field proven pumping and inlet system integrated with a new sensor and electronics. Transpector CPM 3 is the ideal RGA process monitor for new and established semiconductor processes such as ALD, CVD, PVD, and Etch.
Transpector CPM 3 provides proven return on investment to our partners through:
- Industry Leading Measurement Technology
- Robust and Adaptive Architecture
- Ease of Maintenance
- Superior Product Support
Features
- Residual Gas Analyzer for ALD, Etch, CVD and 300 mm Degas—enables real-time process monitoring and analysis
- ALD-Ready with 1.8 ms per point (555 points per second) measurement speed
- Field-proven durability and reliability in the most demanding CVD and Etch applications
- Application Integration—Transpector CPM becomes a powerful process monitoring and diagnostics tool when integrated with FabGuard software and supported by INFICON world-class applications experts
- Compact size—allows for easy integration into production semiconductor equipment
- Hexblock™ with up to three pressure inlets and reduced surface area to minimize surface reactions and response times
- Capacitance Diaphragm Gauge (CDG)—CDG allows user to monitor the process pressure and automatically protect the system from pressure excursions
- Automated calibration—ensures long-term data stability and accuracy for sensor to sensor and tool to tool chamber matching
Specifications
| Type | 100 AMU CPM | 200 AMU CPM | 300 AMU CPM | |
|---|---|---|---|---|
| Resolution | 1 amu wide @ 10% peak height | 1 amu wide @ 10% peak height | 1 amu wide @ 10% peak height | |
| Total Pressure Range¹ | 5E-7 - 1E-3 Torr | 5E-7 - 1E-3 Torr | 5E-7 - 1E-3 Torr | |
| Total Pressure Accuracy² | +/- 25% 1E-6 - 1E-3 Torr | +/- 25% 1E-6 - 1E-3 Torr | +/- 25% 1E-6 - 1E-3 Torr | |
| Maximum Ion Source Operating Pressure³ | 1E-3 Torr | 1E-3 Torr | 1E-3 Torr | |
| Nominal Operating Pressure⁴ | 2E-4 Torr | 2E-4 Torr | 2E-4 Torr | |
| System Operating Pressure | 1E-8 Torr - 1.2 atm | 1E-8 Torr - 1.2 atm | 1E-8 Torr - 1.2 atm | |
| Sensitivity (Low Emission) | > 4E-6 Amps/Torr | > 2E-6 Amps/Torr | > 1E-6 Amps/Torr | |
| Sensitivity (High Emission) | > 2E-5 Amps/Torr | > 1E-5 Amps/Torr | > 5E-6 Amps/Torr | |
| Minimum Detectable Partial Pressure⁵ | 1E-13 Torr | 2E-13 Torr | 4E-13 Torr | |
| Maximum Data Rate | 1.8 ms/point (555 points/sec) | 1.8 ms/point (555 points/sec) | 1.8 ms/point (555 points/sec) | |
| Abundance Sensitivity⁶ | < 5 ppm | < 10 ppm | < 100 ppm | |
| Zero Blast⁷ | < 2 ppm | < 25 ppm | < 200 ppm | |
| Detection Limit⁸ | < 1 ppm | < 2 ppm | < 4 ppm | |
| Linearity⁹ | +/- 20% | +/- 20% | +/- 20% | |
| Minimum Background Pressure | 1E-8 Torr | 1E-8 Torr | 1E-8 Torr | |
| Maximum Sensor and Inlet Temperature | °C | 150 | 150 | 150 |
1 Ion source pressure reading @ low emission using total pressure lens
2 Total pressure accuracy @ low emission
3 Maximum ion source operating pressure @ low emission
4 2x10-4 Torr in the ion source will produce about 1x10-5 Torr in the quadrupole region
5 MDPP at the ion source with EM on and 1s dwell time
6 Mass 40 contribution onto 41 AMU
7 Zero blast contribution onto 2 AMU
8 Minimum detectable concentration with Krypton in air @ a 1s dwell time
9 For 1 Torr orifices or lower. Linearity @ low emission at 0.1 to 2 times the nominal orifice pressure
Consumables
| 100 AMU CPM | |
|---|---|
| Part Number | Description |
| 059-0196 | NI-4-VCR-2, 1/4" VCR GASKET NI |
| 059-0400 | Replacement c-ring |
| 070-1042 | O-Ring, 0.739 ID, 0.070 W, Viton, 75Duro (V4 only) |
| 923-418-G1 | CPM Replacement Diaphragm Kit 2 Stage |
| 923-706-G10 | 30 Torr HexBlock orifice (10.5 micron) |
| 923-706-G3 | 10 Torr HexBlock orifice (20 micron) |
| 923-706-G4 | 1 Torr HexBlock orifice (62 micron) |
| 923-706-G6 | 10 mtorr HexBlock orifice (750 micron) |
| 923-706-G7 | 360 mtorr HexBlock orifice (120 micron) |
| 923-706-G8 | 15 mtorr HexBlock orifice (350 micron) |
| 923-706-G9 | 3 Torr HexBlock orifice (35 micron) |
| 923-707-G1 | 10 Torr HexBlock sniffer (5 cm length) |
| 923-707-G2 | 100 Torr HexBlock sniffer (5 cm length) |
| 923-707-G3 | 7 Torr HexBlock sniffer |
| 961-707-G1 | Electron Multiplier Kit, Spare |
| 964-710-G1 | Filament Kit CPM Tungsten |
| 964-710-G2 | Filament Kit CPM Coated |
| 964-711-G1 | Ion Source Kit CPM Tungsten |
| 964-711-G2 | Ion Source Kit CPM Tungsten w/Liner |
| 964-712-G1 | Ion Source Kit CPM Coated |
| 964-712-G2 | Ion Source Kit CPM Coated w/Liner |
| 200 AMU CPM | |
| Part Number | Description |
| 059-0196 | NI-4-VCR-2, 1/4" VCR GASKET NI |
| 059-0400 | Replacement c-ring |
| 070-1042 | O-Ring, 0.739 ID, 0.070 W, Viton, 75Duro (V4 only) |
| 923-418-G1 | CPM Replacement Diaphragm Kit 2 Stage |
| 923-706-G10 | 30 Torr HexBlock orifice (10.5 micron) |
| 923-706-G3 | 10 Torr HexBlock orifice (20 micron) |
| 923-706-G4 | 1 Torr HexBlock orifice (62 micron) |
| 923-706-G6 | 10 mtorr HexBlock orifice (750 micron) |
| 923-706-G7 | 360 mtorr HexBlock orifice (120 micron) |
| 923-706-G8 | 15 mtorr HexBlock orifice (350 micron) |
| 923-706-G9 | 3 Torr HexBlock orifice (35 micron) |
| 923-707-G1 | 10 Torr HexBlock sniffer (5 cm length) |
| 923-707-G2 | 100 Torr HexBlock sniffer (5 cm length) |
| 923-707-G3 | 7 Torr HexBlock sniffer |
| 961-707-G1 | Electron Multiplier Kit, Spare |
| 964-710-G1 | Filament Kit CPM Tungsten |
| 964-710-G2 | Filament Kit CPM Coated |
| 964-711-G1 | Ion Source Kit CPM Tungsten |
| 964-711-G2 | Ion Source Kit CPM Tungsten w/Liner |
| 964-712-G1 | Ion Source Kit CPM Coated |
| 964-712-G2 | Ion Source Kit CPM Coated w/Liner |
| 300 AMU CPM | |
| Part Number | Description |
| 059-0196 | NI-4-VCR-2, 1/4" VCR GASKET NI |
| 059-0400 | Replacement c-ring |
| 070-1042 | O-Ring, 0.739 ID, 0.070 W, Viton, 75Duro (V4 only) |
| 923-418-G1 | CPM Replacement Diaphragm Kit 2 Stage |
| 923-706-G10 | 30 Torr HexBlock orifice (10.5 micron) |
| 923-706-G3 | 10 Torr HexBlock orifice (20 micron) |
| 923-706-G4 | 1 Torr HexBlock orifice (62 micron) |
| 923-706-G6 | 10 mtorr HexBlock orifice (750 micron) |
| 923-706-G7 | 360 mtorr HexBlock orifice (120 micron) |
| 923-706-G8 | 15 mtorr HexBlock orifice (350 micron) |
| 923-706-G9 | 3 Torr HexBlock orifice (35 micron) |
| 923-707-G1 | 10 Torr HexBlock sniffer (5 cm length) |
| 923-707-G2 | 100 Torr HexBlock sniffer (5 cm length) |
| 923-707-G3 | 7 Torr HexBlock sniffer |
| 961-707-G1 | Electron Multiplier Kit, Spare |
| 964-710-G1 | Filament Kit CPM Tungsten |
| 964-710-G2 | Filament Kit CPM Coated |
| 964-711-G1 | Ion Source Kit CPM Tungsten |
| 964-711-G2 | Ion Source Kit CPM Tungsten w/Liner |
| 964-712-G1 | Ion Source Kit CPM Coated |
| 964-712-G2 | Ion Source Kit CPM Coated w/Liner |
Spare Parts
| 100 AMU CPM | |
|---|---|
| Part Number | Description |
| 032-0079 | Turbo Molecular Pump (w/CF40 flange) |
| 059-0400 | Replacement c-ring |
| 915-724-G1 | Package of three spare liners (used only with liner configured ion source) |
| 922-204-G1 | Capillary assembly - 1.5 m |
| 922-204-G3 | Capillary assembly - 3 m |
| 923-403-P2 | CPM Valve Controller Manifold Assembly |
| 923-417-G1 | Foreline Protection Kit, CPM |
| 923-710-G1 | HexBlock orifice replacement tools |
| 923-711-G1 | HexBlock valve replacement kit |
| 923-712-G1 | Spare HexBlock orifice gasket (pack of five) |
| 923-723-G2 | 2 Stage Diaphragm Foreline Pump |
| 964-208-G11 | CPM CDG Pressure Gauge Kit (1 Torr) |
| 964-208-G12 | CPM CDG Pressure Gauge Kit (10 Torr) |
| 964-208-G13 | CPM CDG Pressure Gauge Kit (100 Torr) |
| 964-208-G14 | CPM CDG Pressure Gauge Kit (1000 Torr) |
| 964-230-G1 | CPM Cable Box Assembly |
| 964-403-P1 | CPM Manifold Heater |
| 964-603-G2 | CPM Controller Box |
| 964-720-G1 | CPM CDG Pressure Gauge Kit (1000 Torr) w/ Gauge Interface Cable |
| 964-720-G2 | CPM CDG Pressure Gauge Kit (100 Torr) w/ Gauge Interface Cable |
| 964-720-G3 | CPM CDG Pressure Gauge Kit (10 Torr) w/ Gauge Interface Cable |
| 964-720-G4 | CPM CDG Pressure Gauge Kit (1 Torr) w/ Gauge Interface Cable |
| 200 AMU CPM | |
| Part Number | Description |
| 032-0079 | Turbo Molecular Pump (w/CF40 flange) |
| 059-0400 | Replacement c-ring |
| 915-724-G1 | Package of three spare liners (used only with liner configured ion source) |
| 922-204-G1 | Capillary assembly - 1.5 m |
| 922-204-G3 | Capillary assembly - 3 m |
| 923-403-P2 | CPM Valve Controller Manifold Assembly |
| 923-417-G1 | Foreline Protection Kit, CPM |
| 923-710-G1 | HexBlock orifice replacement tools |
| 923-711-G1 | HexBlock valve replacement kit |
| 923-712-G1 | Spare HexBlock orifice gasket (pack of five) |
| 923-723-G2 | 2 Stage Diaphragm Foreline Pump |
| 964-208-G11 | CPM CDG Pressure Gauge Kit (1 Torr) |
| 964-208-G12 | CPM CDG Pressure Gauge Kit (10 Torr) |
| 964-208-G13 | CPM CDG Pressure Gauge Kit (100 Torr) |
| 964-208-G14 | CPM CDG Pressure Gauge Kit (1000 Torr) |
| 964-230-G1 | CPM Cable Box Assembly |
| 964-403-P1 | CPM Manifold Heater |
| 964-603-G2 | CPM Controller Box |
| 964-720-G1 | CPM CDG Pressure Gauge Kit (1000 Torr) w/ Gauge Interface Cable |
| 964-720-G2 | CPM CDG Pressure Gauge Kit (100 Torr) w/ Gauge Interface Cable |
| 964-720-G3 | CPM CDG Pressure Gauge Kit (10 Torr) w/ Gauge Interface Cable |
| 964-720-G4 | CPM CDG Pressure Gauge Kit (1 Torr) w/ Gauge Interface Cable |
| 300 AMU CPM | |
| Part Number | Description |
| 032-0079 | Turbo Molecular Pump (w/CF40 flange) |
| 059-0400 | Replacement c-ring |
| 915-724-G1 | Package of three spare liners (used only with liner configured ion source) |
| 922-204-G1 | Capillary assembly - 1.5 m |
| 922-204-G3 | Capillary assembly - 3 m |
| 923-403-P2 | CPM Valve Controller Manifold Assembly |
| 923-417-G1 | Foreline Protection Kit, CPM |
| 923-710-G1 | HexBlock orifice replacement tools |
| 923-711-G1 | HexBlock valve replacement kit |
| 923-712-G1 | Spare HexBlock orifice gasket (pack of five) |
| 923-723-G2 | 2 Stage Diaphragm Foreline Pump |
| 964-208-G11 | CPM CDG Pressure Gauge Kit (1 Torr) |
| 964-208-G12 | CPM CDG Pressure Gauge Kit (10 Torr) |
| 964-208-G13 | CPM CDG Pressure Gauge Kit (100 Torr) |
| 964-208-G14 | CPM CDG Pressure Gauge Kit (1000 Torr) |
| 964-230-G1 | CPM Cable Box Assembly |
| 964-403-P1 | CPM Manifold Heater |
| 964-603-G2 | CPM Controller Box |
| 964-720-G1 | CPM CDG Pressure Gauge Kit (1000 Torr) w/ Gauge Interface Cable |
| 964-720-G2 | CPM CDG Pressure Gauge Kit (100 Torr) w/ Gauge Interface Cable |
| 964-720-G3 | CPM CDG Pressure Gauge Kit (10 Torr) w/ Gauge Interface Cable |
| 964-720-G4 | CPM CDG Pressure Gauge Kit (1 Torr) w/ Gauge Interface Cable |
