PEG100 Medium to Ultra-High Vacuum Gauge


The INFICON Penning Gauge PEG100 provides reliable high vacuum measurements. The rugged penning cold cathode sensor has no filament to burn out. Due to titanium cathode plates and the reduced high voltage after plasma ignition, the gauge can be operated also in sputtering applications. The fieldbus options, in addition to the logarithmic analog output signal, allow easy integration into vacuum systems using Profibus DP or DeviceNet protocols.

This Penning Gauge PEG100 series is direct replacement for Penning Transmitters of the PTR 225 / PTR 225 S / PTR 237 / PTR 225 PB / PTR 237 D series:


351-000PEG100DN 25 ISO-KF=157 34PTR 225DN 25 KF
351-001PEG100-SDN 25 ISO-KF, SP=164 34PTR225 SDN 25 KF, SP
351-002PEG100DN 40 CF-R=157 36PTR 237DN 40 CF-R
351-005PEG100-PDN 25 ISO-KF, PB=896 41PTR 225 PBDN 25 KF, PB 
351-004PEG100-DDN 40 CF-R, DevNet=896 42PTR 237 DDN 40 CF-R, DevNet
351-499PEG100Spare anode ring=200 28 711PTRSpare anode ring
351-490PEG100Spare cathode plates (5 pcs)=16291PTR

Spare cathode plates (5 pcs)


Please check out also our latest Innovation in Cold Cathode Gauge Technology, our Gemini MxG50x line which represents an advanced technology and is able to replace PTR 225 / PTR 237 / PTR 90 line as well


  • Direct replacement for PTR 225 / PTR 225-S / PTR 237 / PTR 225 PB / PTR 237 D Vacuum Transmitters
  • Wide measurement range from 1 x 10-9 to 1 x 10-2 mbar (7.5 x 10-10 to 7.5 x 10-3 Torr)
  • All-metal cold cathode sensor (Penning) with ceramic feedthrough
  • Innovative electrode geometry provides excellent ignition properties
  • Decreased high voltage after plasma ignition and titanium cathode plates reduce risk of contamination, even during sputtering operations with argon
  • The anode ring and the titanium cathode can be cleaned or replaced easily
  • Minimal magnetic field intensity adjacent to gauge
  • LED indicator for power on and plasma ignited
  • Logarithmic analog output signal
  • Fieldbus interface (DeviceNet) for easy integration into vacuum systems using network communications

Typical Applications

  • High vacuum pressure monitoring
  • Evaporation and sputtering systems
  • General vacuum measurement and control in the fine and high vacuum range


PEG100, PEG100-S and PEG100-D series is direct replacement for PTR 225 / PTR 225-S / PTR 237 / PTR 237 D Vacuum Transmitters
  • PEG100 Penning Gauge


Type PEG100
Measurement range 1 x 10-9 to 1 x 10-2
10-8 to 10-4 mbar % of reading ±30
Pressure, max. (absolute) bar 10
Operation (ambient) °C +10 to +50
Storage °C -20 to +75
Bakeout without electronics °C 350
Bakeout with electronics, at flange °C 70
Voltage V (dc) 14.5 to 36
Consumption, max. W <2
Output signal analog  
Output signal V 0 to 10.6
Measurement range V 0.66 to 10
Relation voltage / pressure volts per decade 1.333
Connector FCC 68, female, 8 pin (shielded)
Cable length, max (analog) m (ft.) 100 (330)
Materials exposed to vacuum Stainless steel, CrNi, AI2O3, NiFe, Mo, Cu, Ni, Ti
Internal volume cm³ (in.³) 21 (1.28)
Weight, approx. g 500
Protection type IP40
Device type generic
Explicit peer to peer messaging no
I / O peer to peer messaging no
Configuration consistency value no
Faulted node recovery no
Baud rates kBaud 125 / 250 / 500
Master / Scanner no
I / 0 slave messaging: Bit Strobe yes
I / 0 slave messaging: Polling yes
I / 0 slave messaging: Cyclic yes
I / 0 slave messaging: Change of State (COS) yes
Supply for DeviceNet™ V (dc) 11 to 25
Connector for DeviceNet™ Phoenix Combicon, 5 pin

Part Number

Part Number Description
351-000 PEG100 DN 25 ISO-KF
351-000 PEG100 DN 25 ISO-KF
351-002 PEG100 DN 40 CF-F
351-003 PEG100-D DNet, DN 25 ISO-KF
351-004 PEG100-D DNet, DN 40 CF-F
399-510 PEG050 Penning Gauge DN25KF
351-490 Spare Cathode Plate, set of 5 pcs
351-499 Spare anode ring PEG100/ PEG050
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