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Augent™ OPG550 Optical Plasma Vacuum Gauge
The INFICON Augent™ Optical Plasma Gauge is a compact and intelligent solution for vacuum monitoring. Augent™ combines two sensor technologies into one compact device for gas type monitoring from 1 × 10-7 to 5 mbar and to measure total pressure from atmosphere down to 1 × 10-7 mbar at the same time. Augent™ is protected by an integrated Pirani sensor to switch off plasma above 20 mbar. In the measurement range between 1 × 10-7 and 5 mbar the gauge allows the detection of gases such as Oxygen, Nitrogen, Hydrogen or Argon.
Advantages
- High speed leak detection allows chamber leak test
- Increase of productivity and yield
- Long life time, no filament burns, air inrush protection
- Withstand process chemistry
- Smart algorithm for easy integration
- Compact design and small footprint
- Reliable and fast start up
Typical Applications
- Chamber leak check, faster RoR (rate of rise) test
- Leak check to find internal leaks from gas supply lines
- Real time end point control
- Gas type and concentrations control
Specifications
| Type | OPG550 | |
|---|---|---|
| Measurement system | Cold Cathode according inverted magnetron principle and Thermal conductivity according Pirani principle | |
| Measurement range N2 | 1×10-7 … 5 | |
| Detection limit 25 liter chamber | ||
| O2 leaks in pressure rise method | mTorr/min | >0.3 |
| O2 leaks during pump down from atmosphere with N2 backfill | mTorr/min | >1 |
| Accuracy total pressure reading N2 | ||
| 1 x 10-7 ... 100 mbar | % of reading | 5 |
| 100 ... 1000 mbar | % of reading | 50 |
| Repeatability total pressure reading N2 | ||
| 1 x 10-7 ... 100 mbar | % of reading | 5 |
| Pressure | ||
| Limited to inert gases < 50°C | bar (absolute) |
<10 |
| Temperature | ||
| Operation (ambient) | °C | +5 … +50 |
| Storage | °C | -20 … +70 |
| Bakeout at flange with electronic unit | °C | <80 |
| Bakeout at flange w/o electronic unit | °C | <120 |
| Relative humidity for 30 days a year | ||
| Humidity | % | <95 (non-condensing) |
| Supply voltage | ||
| At gauge | V (dc) | +14.5 … +30 |
| Ripple | V (p-p) | <1 |
| Power consumption | W | <5 |
| Fuse to be connected | AT | 1 |
| Output signal | ||
| Analog | V (dc) | 0 … +10 |
| Digital | RS232C | |
| Electrical connection | D-Sub, 9-pin, male | |
| High voltage (in the measuring chamber) | ||
| Ignition voltage | kV | <4.5 |
| Operating voltage | kV | <3.3 |
| Materials exposed to vacuum | ||
| General | Al2O3, Stainless seel 1.4435 | |
| Anode | Molybdenum | |
| Ionization chamber | Titanium, stainless steel 1.4016 | |
| Ignition aid | Stainless steel 1.4310 | |
| Vacuum flange |
DN16 ISO-KF, DN16 CF-R, DN25 ISO-KF, 8-VCR female |
|
| Internal volume | cm³ (in.³) | <20 (1.22) |
| Weight | g | <700 |
| Dimensions | ||
| Footprint | mm | 68 x 68 |
| Height | mm | <137 |
| Protection type | IP40 | |
| Standards | CE | |
Part Number
| OPG550 | |
|---|---|
| Part Number | Description |
| 3OF0-001-010P | OPG550 9DSub, 16-KF |
| 3OF0-003-010P | OPG550 9DSub, 16-CF-R |
| 3OF0-006-010P | OPG550 9DSub, 25-KF |
| 3OF0-00E-010P | OPG550 9DSub, 8-VCR F |
Accessories
| OPG550 | |
|---|---|
| Part Number | Description |
| 211-001 | Clamping ring DN 10-16 ISO-KF |
| 211-002 | Clamping ring DN 20-25 ISO-KF |
| 211-066 | Centering ring DN 16 ISO-KF, Inox / FPM |
| 211-068 | Centering ring DN 25 ISO-KF, SS/FPM |
| 213-451 | Copper seal DN 16 CF; set of 10 pcs |
| 303-333 | Diagnostic cable 1.9m (P3) |
Spare Parts
| OPG550 | |
|---|---|
| Part Number | Description |
| 351-590 | OPG550 spare sensor, 16-KF |
| 351-591 | OPG550 spare sensor, 16-CF-R |
| 351-592 | OPG550 spare sensor, 25-KF |
| 351-593 | OPG550 spare sensor, 8-VCR female |
Datasheets
Brochures
Manuals
- TINB59E1 OPG550 Operating manual.pdf |EN| |DE| |中文|
- TIRB59E1 OPG550 Communication Protocoll RS232.pdf |EN|
