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Gemini™ ATM to Ultra-High Vacuum Gauge
The INFICON Gemini Inverted Magnetron Vacuum Gauge is the workhorse for all vacuum measurement applications (pending). Gemini combines two sensor systems into one small device to measure from atmosphere to 1x10 – 9 mbar. The patented ultra-low magnetic stray field design opens up a whole new range of applications. A unique interchangeable dual chamber sensor unit avoids cleaning cycles and reduces maintenance, making Gemini the most robust and economical vacuum gauge of its kind.
Gemini Cold Cathode and combination comes with fully integrated digital electronics, providing ultimate flexibility for system integration. Cold cathode and Pirani combination option provides seamless transition, reliability, practicality and flexibility across wide ranging applications.
MPG500 series represents the latest Technology to act as direct replacement for Cold Cathode or Penning Transmitters of the PTR 90 / PTR 225 (analog Versions) series.
| Part-No | Typ | Part-No | Typ | |||
| 3MB0-006-000P | MPG500 | SS, HC, FCC, 25 KF | = | 230070 | PTR 90 | DN 25 KF |
| 3MB0-007-000P | MPG500 | SS, HC, FCC, 40 KF | = | 230071 | PTR 90 | DN 40 KF |
| 3MB0-00Q-000P | MPG500 | SS, HC, FCC, 40 CF-F | = | 230072 | PTR 90 | DN 40 CF |
| 3MA0-007-000Q | MAG500 | SS, HC, FCC, 40 KF | = | 15734 | PTR 225 | DN 25 KF |
Advantages
MPG500 series represents the latest Technology to act as direct replacement for Cold Cathode or Penning Transmitters of the PTR 90 / PTR 225 (analog Versions) series.
Long lifetime in harsh environments
- Low magnetic stray field
- Zero maintenance - replaceable insert
- Super compact size
- Reliable fast ignition
- Corrosion proof feed through
- Selectable measuring current
Typical Applications
- Base pressure monitoring and control, from atmosphere to high vacuum in evaporation and sputter coating applications.
- General vacuum measurement – industrial furnaces, architectural glass, semiconductor, refrigeration and air conditioning.
- Analytical and R&D applications – mass spectrometry, electron microscopes, medical, ophthalmic, optical and high energy physics.
News
MPG500 is direct replacement PTR 90 / PTR 225 (analog Versions).
NEW generation of cold cathode/ cold cathode-pirani combination gauges is ready for order now !
Specifications
| Type | MAG50x | MPG50x | |
|---|---|---|---|
| Measurement system | Cold cathode ionization measurement system (according to the inverted magnetron principle) | Pirani and cold cathode ionization measurement system (according to the inverted magnetron principle) | |
| Measurement range (air, N2) | 1×10-9 … 1×10-2 | 1×10-9 … 1000 | |
| Accuracy (N2) | |||
| 1×10-8 … 1×10-2 mbar | % of reading | 30 | 30 |
| 1×10-2 … 100 mbar | % of reading | - | 15 |
| 100 … 1000 mbar | % of reading | - | 50 |
| Repeatability (N2) | |||
| 1×10-8 … 1×10-2 mbar | % of reading | 5 | - |
| 1×10-8 … 100 mbar | % of reading | - | 5 |
| Mounting orientation | any | any | |
| Admissable pressure | bar (absolute) | 10 (limited to inert gases <50°C) | 10 (limited to inert gases <50°C) |
| Admissible temperature | |||
| Operation (ambient) | °C | +5 ... +55 | +5 ... +55 |
| Bakeout at flange (1) | °C | <150 | <150 |
| Storage | °C | -40 ... +70 | -40 ... +70 |
| Filament temperature | °C | - | 120 |
| Relative humidity for 30 days a year | |||
| 1×10-7 … 1×10-2 mbar | % | <95 (non-condensing) | <95 (non-condensing) |
| 1×10-8 … 1×10-2 mbar | % | <70 (non-condensing) | <70 (non-condensing) |
| Supply voltage | |||
| At gauge (2) | V (dc) | +14.5 ... +30 | +14.5 ... +30 |
| Ripple | V (p-p) |
<1 |
<1 |
| Power consumption | W | <2 | <2 |
| Fuse to be connected | AT | <1 | <1 |
| Voltage range | |||
| analog output | V | 0 ... +10.5 | 0 ... +10.5 |
| Measurement range | |||
| 3MAx-00x-0x0N | V | +1.5 ... +8.5 | - |
| 3MBx-00x-0x0P | V | - | +1.398 ... +8.598 |
| 3MAx-00x-0x0Q | V | +0.667 ... +10 | - |
| Voltage vs. pressure | |||
| 3MAx-00x-0x0N | volts per decade | 1 (logarithmic) | - |
| 3MBx-00x-0x0P | volts per decade | - | 0.6 (logarithmic) |
| 3MAx-00x-0x0Q | volts per decade | 1.33 (logaritmic) | - |
| Error signal | |||
| Error signal | V |
<+0.5 |
09.5 ... +10.5 |
| Output impendance | Ω | 2x10 | 2x10 |
| Load impendance | kΩ |
>10 (short circuit-proof) |
>10 (short circuit-proof) |
| Step response time | |||
| p > 10-6 mbar | ms |
<10 |
<10 |
| p = 10-8 mbar | ms |
~1 |
~1 |
| Gauge identification | kΩ | 100 | 85 |
| Status (pin 6) | |||
| Pirani-only mode | V | - | 0 (low) |
| Cold cathode ignited | V | +15 ... +30 | - |
| Combined Pirani/ cold cathode mode 3) | V | - | +15 ... +30 (high) |
| Electrical connection | |||
| 3Mxx-00x-000x | FCC68, 8-pin, female | FCC68, 8-pin, female | |
| 3Mxx-00x-010x | D-sub, 9-pin, male | D-sub, 9-pin, male | |
| Sensor cable | |||
| 3Mxx-00x-000x | 8-pin, shielded | 8-pin, shielded | |
| Cable length | |||
| 50 m cable | m | < 50 (8x0.14 mm2) | < 50 (8x0.14 mm2) |
| 75 m cable | m | < 75 (8x0.25 mm2) | < 75 (8x0.25 mm2) |
| 100 m cable | m | < 100 (8x0.34 mm2) | < 100 (8x0.34 mm2) |
| 300 m cable | m | < 300 (8x1.00 mm2) | < 300 (8x1.00 mm2) |
| Operating voltage | kV | <3.3 | <3.3 |
| High operating current | µA | <500 | <500 |
| Low operating current | µA | <100 | <100 |
| Materials exposed to vacuum | |||
| 3Mx0-00x-0x0x | Ni alloy, AI2O3, glass, stainless steels | W, Ni alloy, AI2O3, glass, stainless steels | |
| 3Mx3-00x-0x0x | Ni alloy, AI2O3, stainless steels | Ni alloy, AI2O3, stainless steels | |
| Internal volume | cm³ | 22.8 | 22.8 |
| Weight | |||
| DN 25 ISO-KF | g |
<280 |
<280 |
| DN 40 ISO-KF | g | <320 | <320 |
| DN 40 CF-F & CF-R | g | <570 | <570 |
| Degree of protection | IP 40 | IP 40 | |
| Standards | |||
| CE conformity |
EMC (EN 61000-6-2, EN 61000-6-3), EN 61010-1 & RoHS |
EMC (EN 61000-6-2, EN 61000-6-3), EN 61010-1 & RoHS |
|
| Maintenance | none | none | |
1) Without electronics.
2) The minimum voltage of the supply unit must be increased proportionally to the length of the sensor cable.
3) Cold cathode ignited.
Part Number
| MAG50x | |
|---|---|
| Part Number | Description |
| 3MA0-007-000Q | MAG500 SS,HC,FCC,40KF |
| 351-512 | MAG500 spare sensor, 40KF, SS |
| 351-555 | Spare ion chamber ss |
| 351-550 | MxG50x Ignition tool set |
| 351-995 | MxG40x/50x Spare parts ignition aid (10) |
| MPG50x | |
| Part Number | Description |
| 3MB0-006-000P | MPG500 SS,HC,FCC,25KF |
| 3MB0-007-000P | MPG500 SS,HC,FCC,40KF |
| 3MB0-00Q-000P | MPG500 SS,HC,FCC,40CF-F |
| 351-506 | MPG500 spare sensor, 25KF, SS |
| 351-555 | Spare ion chamber ss |
| 351-550 | MxG50x Ignition tool set |
| 351-995 | MxG40x/50x Spare parts ignition aid (10) |
Accessories
| MAG50x | |
|---|---|
| Part Number | Description |
| 211-098 | Centering ring with fine filter DN 25 KF |
| 351-550 | MxG50x Ignition tool set |
| MPG50x | |
| Part Number | Description |
| 211-098 | Centering ring with fine filter DN 25 KF |
| 351-550 | MxG50x Ignition tool set |
Datasheets
Brochures
Manuals
- TINA83E1 Gemini MxG5xx Operating manual.pdf |EN| |DE|
- TIRA83E1_Communication Protocol RS232C |EN| |DE| |ES| |日文| |한국| |中文|
3D Step Files
- MAG500_FCC_25KF |EN| |DE| |ES| |日文| |한국| |中文|
- MAG500_FCC_40CF |EN| |DE| |ES| |日文| |한국| |中文|
- MAG500_FCC_40KF |EN| |DE| |ES| |日文| |한국| |中文|
- MPG500_FCC_25KF |EN| |DE| |ES| |日文| |한국| |中文|
- MPG500_FCC_40CF |EN| |DE| |ES| |日文| |한국| |中文|
- MPG500_FCC_40KF |EN| |DE| |ES| |日文| |한국| |中文|
- MMAG50x_9DSub_25KF.stp |EN| |DE| |ES| |日文| |한국| |中文|
- MMAG50x_9DSub_40CF-F.stp |EN| |DE| |ES| |日文| |한국| |中文|
- MMAG50x_9DSub_40CF-R.stp |EN| |DE| |ES| |日文| |한국| |中文|
- MMAG50x_9DSub_40KF.stp |EN| |DE| |ES| |日文| |한국| |中文|
- MMPG50x_9DSub_25KF.stp |EN| |DE| |ES| |日文| |한국| |中文|
- MMPG50x_9DSub_40CF-F.stp |EN| |DE| |ES| |日文| |한국| |中文|
- MMPG50x_9DSub_40CF-R.stp |EN| |DE| |ES| |日文| |한국| |中文|
- MPG50x_9DSub_40KF |EN| |DE| |ES| |日文| |한국| |中文|
