IMM-100 Thin Film Deposition Monitor

MAKING EXCELLENCE REPEATABLE

Protect and Grow Your Profit with Precision Rate and Thickness Monitoring

IMM-100 is a deposition monitor built with ModeLock technology to maximize reproducibility and uniformity with the highest thickness accuracy, best measurement resolution, and lowest rate noise.

With the oscillator built-in IMM-100 can be easily integrated into an EtherCAT system with minimal hardware and footprint. This powerful and precise measurement monitor is sure to bring a new level of performance to your process.

Features

  • INFICON ModeLock technology provides the longest crystal life and ensures the most stable, highest resolution rate and thickness measurement available, even at very low rates
  • Maximize yield with the best QCM thickness measurement possible
  • Single channel rate and thickness monitor without unnecessary added features to minimize cost
  • ±0.0035 Hz over 100 ms sample
  • EtherCAT communications for seamless integration
  • Compact size to minimize integration costs by saving tool real estate
  • Expert application support, able to discuss unique application needs and give greater support than the competition
  • RoHS compliant

Typical Applications

  • OLED Applications

Specifications

Type IMM-100
Measurement  
Sensor inputs 1
Measurement frequency range 6.0 to 4.5 MHz (fixed)
Reference frequency stability ±2 ppm 0-60°C
Frequency resolution ±0.0035 Hz @ 6 MHz
Rate and thickness resolution 0.0042 Å (new crystal); 0.0076 Å (crystal @ 4.5 MHz) over 100 ms sample for material density = 1.0, Z-Ratio = 1.0
Measurement interval 100 ms
Measurement technique ModeLock
Operation and Dimensions  
Input voltage 24 V (dc)
Communication type EtherCAT, 2 RJ45 jacks, supports data daisy chaining. Explicit device ID via switches
Operating temperature 0 to 50°C (32 to 122°F)
Size 222.6 mm (8.76 in.) x 106.1 mm (4.18 in.) x 35.3 mm (1.39 in.)
Weight 0.48 kg (1.05 lbs.)

Part Number

IMM-100
Part Number Description
785-600-G1 IMM-100 Thin Film Deposition Monitor

Accessories

Part Number Description
Optional Power Supplies The power supplies listed below are rated for an input of 100 to 249 V (ac), 2 A, 50 to 60 Hz with an output of 24V (dc), 3.34 A, 80 W maximum.
961-021-G1 Power Supply Kit 80 - 250 VAC / 4 ft (1.2m) US plug
961-021-G2 Power Supply Kit 80 - 250 VAC / 4 ft (1.2 m) US plug w/ 15 ft (4.5m) Extension Cable
961-021-G3 Power Supply Kit 80 - 250 VAC / 4 ft (1.2 m) US plug w/ 30 ft (9m) Extension Cable
961-021-G4 Power Supply Kit 80 - 250 VAC / 4 ft (1.2 m) 230V plug
961-021-G5 Power Supply Kit 80 - 250 VAC / 4 ft (1.2 m) 230V plug w/ 15 ft (4.5m) Extension Cable
961-021-G6 Power Supply Kit 80 - 250 VAC / 4 ft (1.2 m) 230V plug w/ 30 ft (9m) Extension Cable
961-021-G7 Power Supply Kit IL 240V
961-021-G8 Power Supply Kit IL 4.5 M Extension
961-021-G9 Power Supply Kit IL 9.0 M Extension
961-021-G10 Power Supply Kit UK 240V
961-021-G11 Power Supply Kit UK 4.5 M Extension
961-021-G12 Power Supply Kit UK 9.0 M Extension
Optional Mounting Bracket
785-202-G1 IMM-100 mounting bracket with four clean room compatible shock absorbing, female-to-female, stainless steel mounting feet
785-201-G1 IMM-100 mounting bracket with four shock absorbing, male-to-female, black Neoprene rubber mounting feet
Optional Communications Cable
600-1190-P1 ETHERNET COMUNICATION CABLE 1 METER
600-1190-P2 SPEC- ETHERNET COMMUNICATION CABLE .3M
600-1190-P4 ETHERNET COMUNICATION CABLES 4.3 METER
600-1190-P8 Ethernet 7m cable
600-1190-P15 Ethernet 15m cable

Consumables

Name Description
Quartz Monitor Crystals Quartz Monitor Crystals
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