ULTRATEST™ Sensor Technology


Defining Speed and Accuracy in Leak Detection


The INFICON UL5000 Helium Leak Detector is designed to meet the most critical and demanding leak detection applications. Featuring INFICON proprietary software algorithms I-CAL and Hydro-S in a field-proven vacuum design, the UL5000 provides testing flexibility, high sensitivity and quick accurate results making any leak detection application fast and easy.

The UL5000 delivers fast response times in all measurement ranges and extremely short cycle times in reaching test conditions and final results. The specially designed vacuum architecture provides the continuous high helium pumping speeds and the extremely fast response times you demand.


  • HYDRO-S (HYDROgen-Suppression) to enable test conditions to be reached quickly.
  • I-CAL (Intelligent - Calculation Algorithm for Leak Rates) to ensure fast response to leaks in all measurement ranges.
  • A special multiple inlet turbomolecular pump that provides optimized high helium pumping speeds with high helium compression at all pressures to deliver excellent sensitivity, response, and fast clean-up.
  • A booster turbomolecular pump for extremely fast response on any test object, including the largest volumes and chambers.
  • The field-proven INFICON magnetic sector mass spectrometer for years of accurate and repeatable results in a trouble-free, maintenance-free design.
  • Self-protection features to protect the UL5000 from helium and particulate contamination and even an auto-purge cycle to ensure the UL5000 is ready when you need it.
  • A rotatable display / control interface and optional remote hand controller for operational flexibility.
  • Access control to the unit and system software can be enabled via the software to prevent unauthorized use or unintended modifications to test set-ups.
  • Software updates via e-mail to keep your UL5000 at optimum performance.
  • Work Station Design with an optimal height work surface that includes an ESD mat and tool box for testing convenience.

Typical Applications

  • Leak testing of components, subassemblies and large chambers used on semiconductor and flat panel display tools
  • Leak testing of semiconductor and flat panel tools
  • Leak testing of aerospace components, subassemblies, and systems
  • Leak testing of storage vessels/storage tanks


Type UL5000 Helium Leak Detector
Min. detectable leak rate for Helium (Vacuum mode) mbar•L/s

< 5 • 10-12

Min. detectable leak rate for Helium (Sniffer mode ) mbar•L/s 8E-8
Max. Inlet pressure GROSS mode mbar 15
Max. Inlet pressure FINE mode mbar 2
Max. Inlet pressure ULTRA mode mbar 0.4
Pumping speed during evacuation m³/h 25 at 50 Hz
Helium pumping speed GROSS mode L/s max 8
Helium pumping speed FINE mode L/s max 20
Helium pumping speed ULTRA mode L/s >20
Detectable masses 2,3,4 amu
Mass spectrometer Sector Field 180 °C
Filaments ion source Iridium/Yttria coated 2
Calibrated built-in test leak E-7
Test port DN40KF
Adjustable triggers 2
Interface RS232
Chart recorder output 2 x10 V
In/Outputs PLC compatible
Permissable ambient temperature ( during operation ) °C +10...+40
Weight 140
Dimensions ( LxWxH ) 1068x530x1083
Supply voltage 230(+-10%)50Hz
Power consumption VA 1100

Part Number

UL5000 Helium Leak Detector
Part Number Description
550-500A UL5000, 230V AC, EU plug
550-501A ULTRATEST UL5000, 100/115V, 50/60Hz, US


UL5000 Helium Leak Detector
Part Number Description
14005 SL200, Sniffer Probe for UL1000/5000/Modul1000, 4m length
14022 Extension cable for remote control RC1000, 8 m length
14090 LeakWare for UL1000/5000-Family
551-001 Helium Bottle Holder for UL1000/5000
551-010 Remote Control RC1000C, wired, with 4m coiled cable
551-015 Remote Control RC1000WL, wireless, incl. wireless transmitter
551-020 Wireless transmitter for RC1000WL

Spare Parts

UL5000 Helium Leak Detector
Part Number Description
200000568 Operating unit UL1000/UL1000Fab/UL5000
200000578 PCB I/O
200000579 Device connector, mains input, cpl.
200000600 System comp. Electr. input UL1000/5000
200000602 System c. Power unit UL1000/Fab UL5000
200000685 Replacement filter cell UL1000/5000
200001081 Subassassembly Detection Module U5
200001082 Subassembly Booster Pump U5
200001665 Scroll head for scroll pump TS620
200002806 LP. CPU MC68 opt. Analog outputs
200003801 Oil wick cartridge HiPace 50/80
20003555 Fan
20099002 MSV-1 Mass Spectrometer Supply
20099183 Spare part Sound absorber 3/4"
551-015R Remote Control RC1000WL, Refurbished
85904 NT12 for UL5000- use 200001294
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