UL1000 Fab


ULTRATEST™ sensor technology


The “Dry” Standard for Vacuum Leak Testing in Industrial Vacuum and Semiconductor Manufacturing 


The INFICON UL1000 Fab Helium Leak Detector is the renowned standard when it comes to economic helium vacuum leak testing in industrial or semiconductor environments.


Potential contamination of the tested parts or equipment by carbon-hydrogen compounds or particles is eliminated through the instrument’s dry pump technology. The UL1000 Fab provides the best compromise between high performance, unparalleled robustness, and affordability. It provides state-of-the art detection limits of 10-12 mbar*l/s combined with reasonable short pump down and response time. The compact design provides high maneuverability allowing easy access to maintenance areas with restricted space. The selectable background suppression (iZERO) enables continuous leak testing within at least two decades lower than existing background levels. 


All features enable you to shorten the time of your leak testing efforts while assuring that all leaks can be identified at an economic scale.


  • minimize leak testing efforts through quick pump down and response time
  • avoid need for multiple leak tests by using selectable background suppression (iZERO)
  • enable easy access to maintenance areas with restricted space through maneuverable design
  • low total cost of ownership (TCO) enabled by robust two hot filament ion source (3 years warranty) and counterflow vacuum system
  • easy to use with rotatable display, optical and audible leak indication, and optional remote control
  • low maintenance via a built-in test leak with auto calibration procedure

Typical Applications

  • industrial vacuum equipment manufacturing with high demand for cleanliness
  • vacuum components or sub-assemblies before they are installed in existing tools
  • maintenance work on vacuum tools, with or without support from their own pump
  • inspections and installations of process gas systems
  • Semiconductor, flat panel display or solar cell manufacturing


Type Dry Helium Leak Detetector UL1000 Fab
Min. detectable leak rate for Helium (Vacuum mode) mbar•L/s

< 5 • 10-12

Min. detectable leak rate for Helium (Sniffer mode) mbar•L/s

< 5·10-8

Max. Inlet pressure GROSS mode mbar 15
Max. Inlet pressure FINE mode mbar 2
Max. Inlet pressure ULTRA mode mbar 0.4
Pumping speed during evacuation m³/h 25 at 50 Hz
Helium pumping speed ULTRA mode L/s 2.5
Detectable masses 2,3,4 amu
Mass spectrometer Sector field 180°
Filaments ion source Iridium/Yttria coated 2
Calibrated built-in leak mbar•L/s

∼ 10-7

Test port DN 25 KF 1
Adjustable triggers


Interface RS 232
Chart recorder output V 2 x10
In/Outputs PLC compatible
Permissable ambient temperature (during operation) °C +10 to +40
Weight 110
Dimensions (l x w x h) 1050 x 472 x 987
Supply voltage (EU) V (ac) 230 (± 10 %) 50 Hz
Supply voltage (US) V (ac) 100/115 V (± 10 %) 50/60 Hz
Power consumption (typ.) VA 1100
Power consumption (max.) VA 1100

Part Number

Dry Helium Leak Detetector UL1000 Fab
Part Number Description
550-100A UL1000 Fab, 230 V AC, EU plug
550-101A UL1000 Fab, 100/115 V AC, US plug


Dry Helium Leak Detetector UL1000 Fab
Part Number Description
14005 SL200, Sniffer Probe for UL1000/5000/Modul1000, 4m length
14022 Extension cable for remote control RC1000, 8 m length
551-000 Toolbox, detachable,for UL1000
551-001 Helium Bottle Holder for UL1000/5000
551-002 ESD Mat for UL1000/5000
551-005 TC1000Test Chamber,DN25KF,ESD wrist band
551-010 Remote Control RC1000C, wired, with 4m coiled cable
551-015 Remote Control RC1000WL, wireless, incl. wireless transmitter
551-020 Wireless transmitter for RC1000WL
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