UL1000 Fab Helium Leak Detector (Dry)

 

ULTRATEST™ Sensor Technology

 

The “Dry” Standard for Vacuum Leak Testing in Industrial Vacuum and Semiconductor Manufacturing 

 

The INFICON UL1000 Fab Helium Leak Detector is the renowned standard when it comes to economic helium vacuum leak testing in industrial or semiconductor environments.

 

Potential contamination of the tested parts or equipment by carbon-hydrogen compounds or particles is eliminated through the instrument’s dry pump technology. The UL1000 Fab provides the best compromise between high performance, unparalleled robustness, and affordability. It provides state-of-the art detection limits of 10-12 mbar*l/s combined with reasonable short pump down and response time. The compact design provides high maneuverability allowing easy access to maintenance areas with restricted space. The selectable background suppression (i·ZERO) enables continuous leak testing within at least two decades lower than existing background levels. 

 

All features enable you to shorten the time of your leak testing efforts while assuring that all leaks can be identified at an economic scale.

Advantages

  • Wide measurement range over 15 decades
  • Short pumpdown and response time
  • Mobile all-metal housing for added convenience with uncompromised maneuverability
  • I-CAL to ensure fastest response time to leaks in all measurement ranges
  • Zero function with automatic integration time alignment for fast and reliable test results
  • Intelligent vacuum design with rugged scroll pump and multiple inlet turbomolecular pump that provides high helium pumping speed with high compression
  • Rotatable display and user interface allows simple and easy control and interaction with the unit
  • Self-protection features to protect the UL1000 Fab from helium and particle contamination
  • Auto purge cycle to ensure clean up and readiness for test
  • Software updates via email
  • Rugged mass spectrometer system with two filament ion source (3-year warranty) ensures long running time and low maintenance cost
  • Built-in test leak for internal calibration to ensure accurate test results

Typical Applications

  • maintenance work on semiconductor process tools, with or without support from their own pump
  • applications requiring high pumping speed and senstivity, plus clean testing conditions
  • leak testing of components before they are installed in existing tools
  • inspections and installations of process gas systems
  • built-in software menu "Auto Leak Test" function to perform automatic test of hermetically sealed components with the TC1000 Test Chamber

Specifications

Type Dry Helium Leak Detetector UL1000 Fab
Min. detectable leak rate for Helium (Vacuum mode) mbar•L/s

< 5 • 10-12

Min. detectable leak rate for Helium (Sniffer mode) mbar•L/s

< 5 • 10-8

Max. Inlet pressure MASSIVE mode mbar 1000
Max. Inlet pressure GROSS mode mbar 15
Max. Inlet pressure FINE mode mbar 2
Max. Inlet pressure ULTRA mode mbar 0.4
Pumping speed during evacuation m³/h 25 at 50 Hz
Helium pumping speed GROSS mode L/s max. 8
Helium pumping speed FINE mode L/s 7
Helium pumping speed ULTRA mode L/s 2.5
Detectable masses 2,3,4 amu
Mass spectrometer Sector field 180 °
Filaments ion source Iridium/Yttria coated 2
Calibrated built-in leak mbar•L/s

∼ 10-7

Test port DN 25 KF 1
Adjustable triggers

2

Interface RS 232
Chart recorder output V 2 x10
In/Outputs PLC compatible
Permissable ambient temperature (during operation) °C +10...+40
Type of protection IP 20
Weight 110
Dimensions (l x w x h) 1068 x 525 x 850
Supply voltage (EU) V (ac) 230 (± 10 %) 50 Hz
Supply voltage (US) V (ac) 100/115 V (± 10 %) 50/60 Hz
Power consumption (typ.) VA 1100
Power consumption (max.) VA 1100

Part Number

Dry Helium Leak Detetector UL1000 Fab
Part Number Description
550-100A UL1000 Fab, 230 V AC, EU plug
550-101A UL1000 Fab, 100/115 V AC, US plug

Accessories

Dry Helium Leak Detetector UL1000 Fab
Part Number Description
14005 SL200, Sniffer Probe for UL1000/5000/Modul1000, 4m length
14022 Extension cable for remote control RC1000, 8 m length
14090 LeakWare for UL1000/5000-Family
551-000 Toolbox, detachable,for UL1000
551-001 Helium Bottle Holder for UL1000/5000
551-002 ESD Mat for UL1000/5000
551-005 TC1000Test Chamber,DN25KF,ESD wrist band
551-010 Remote Control RC1000C, wired, with 4m coiled cable
551-015 Remote Control RC1000WL, wireless, incl. wireless transmitter
551-020 Wireless transmitter for RC1000WL
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