Easy Rate Single Sensor

Easy Rate Single Sensors can maximize production while minimizing cost. These sensors maximize availability with extended sensor life and reduced maintenance. They also minimize production cost due to their lower initial investment and total cost of ownership. They are reliable sensors with parts that can be conveniently replaced in the field.

Providing the most cost effective solution for thickness monitoring, the INFICON Easy Rate Single Sensor is available with standard or right angle orientations, and they can be configured to include a feedthrough with or without bored-through tube fittings.

Note: Easy Rate Single sensors use 4.8 mm (3/16 in.) outer diameter (OD) water cooling tubes.  They are not compatible with Ultra-Torr equipped Front Load Sensor feedthroughs and require a tubing adapter in order to be welded to a standard feedthrough with 4.8 mm (3/16 in.) OD water cooling tubes.


  • Minimum investment with lowest upfront cost
  • Lowest total cost of ownership from extended sensor life
  • Maximum throughput with less maintenance
  • Easy installation
  • Available in standard and right angle configurations
  • Optional shutter available
  • Sensor / Feedthrough combinations available with or without bored-through tube fittings


Type Easy Rate Single Sensor
Maximum bakeout temp with no water 175°C
Maximum operating isothermal environment temperature with minimum water flow 400° C
BS-A _ _ E 1 _ _ Size (maximum envelope without shutter) 3.2 5 x 4.04 x 1.53 cm (1.28 x 1.59 x 0.60 in.)
BS-B _ _ E 1 _ _ Size (maximum envelope without shutter) 3.2 5 x 3.30 x 1.60 cm (1.28 x 1.30 x 0.63 in.)
Water Tubes S-304, 4.76 mm (0.188 in) OD x 0.51 mm (0.020 in.) wall thickness seamless stainless steel tubing
Crystal exchange Front loading; self-contained package for ease of exchange
Mounting 1.015 in. ±0.010 in. diameter aperture
Installation Requirements  
Feedthrough 2 pass water 4.76 mm (0.188 in) OD with 1 microdot coaxial connection
Other XIU or Oscillator to match specific controller, solenoid valve assembly 750-420-G1 for shuttered sensors
Water flow rate Minimum water flow 150-200 cc/min, 30° C max
Water quality Coolant should not contain chlorides as stress corrosion cracking may occur. Extremely dirty water may result in loss of cooling capacity.
Body and holder 304 type stainless steel
Springs, electrical contacts Au plated Be-Cu
Water Tubes 4.76 mm (0.188 in) OD seamless stainless steel
Connector (Microdot) Stainless steel, Teflon® and glass insulated
Insulators >99% Al2O3
Wire Tin plated copper
Crystal 0.550 in. (13.97 mm) Diameter
Feedthrough Specifications-1 in. Bolt  
Materials 304 stainless steel, Teflon®, ceramic, beryllium nickel, VITON®
Temperature Operational environment to 300° C with water cooling or 165° C without
Mounting Four #4-40 tapped holes on the back of the sensor body
Feedthrough Specifications-CF40 (2-3/4 in. ConFlat)  
Materials 304 stainless steel, Teflon, ceramic, beryllium nickel
Temperature Operational environment to 450° C with water cooling or 165° C without
Mounting Mates with 2 ¾ in. ConFlat type flanges with 1.375 in. I.D. min.
Easy Rate Single Sensor Configurator


Name Description
Easy Rate Sensor Feedthroughs Easy Rate Sensor Feedthroughs
Easy Rate Single Sensor
Part Number Description
750-420-G1 Solenoid Valve, 24V (for use with shuttered and multi-crystal sensors)


Name Description
Quartz Monitor Crystals Quartz Monitor Crystals

Spare Parts

Easy Rate Single Sensor
Part Number Description
784-205-G1 Crystal Retainer Assembly
784-204-G1 Crystal Holder Assembly
784-403-P1 Crystal Finger Spring
784-404-P1 Retaining Ring
784-300-P1 Crystal Holder
784-405-P1 Holder Finger Spring
750-174-P2 Female coax
080-011-P3 SCREW 0-80 x .125 LG SLOT PAN HD SS GP
080-013 #0-80 Split washer
784-209-G1 Shutter Kit, Single (Unassembled Parts)
784-305-P1 Easy Rate Single Sensor Shutter
784-206-G1 Easy Rate Sensor Actuator Assembly
784-306-P1 Easy Rate Sensor Actuator Clamp
084-054 #4 Split lock washer
084-027 Socket Screw
783-500-023 In-vacuum cable, 25.4 cm (10 in.)
783-500-024 In-vacuum cable, 76.2 cm (30 in.)
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