SKY® CDG045D 0.05 ... 1000Torr / mbar

INFICON SKY CDG045D manometers are your best choice for high accurate total pressure measurement and control. CDG045D gauges are temperature controlled at 45 °C for superior signal stability and repeatability. They are available for full scale ranges from 50 mTorr to 1000 Torr, with all common flange types and fieldbus interfaces and provide a linear 0 to 10 V, gas type independent, pressure signal. INFICON capacitance manometers use an ultra pure alumina ceramic diaphragm which is corrosion proof. The advantages of the ceramic sensor are better signal stability, faster recovery from atmosphere, short warm up time and an extraordinary lifetime. INFICON CDG are high quality, cost effective pressure sensors for demanding vacuum applications.

INFICON's CDG045D are direct drop-in replacements for the listed part numbers below and many other drop-in products are available on request.
 MKS
 part number
 MKS
 part number
 Oerlikon
  Leybold
 part number
 Flange type Full scale INFICON
 part number
 627 series * AA02A CTR 101   [Torr] CDG045D
 627F13TDE1B AA02A13TGAS34B 230 320 DN16 ISO-KF 10003CC1-F51-2300
 627F12TDE1B AA02A12TGAS34B 230 321  1003CC1-C51-2300
 627F21TDE1B AA02A21TGAS34B   203CC1-951-2300
 627F11TDE1B AA02A11TGAS34B 230 322  103CC1-951-2300
 627F01TDE1B AA02A01TGAS34B 230 323  13CC1-651-2300
 627F.1TDE1B AA02A.1TGAS34B 230 324  0.13CC1-351-2300
      
 627F13TCE1B AA02A13THAS34B 230 325 DN16 CF-R 1000 3CC1-F53-2300
 627F12TCE1B AA02A12THAS34B 230 326  100 3CC1-C53-2300
 627F11TCE1B AA02A11THAS34B 230 327  10 3CC1-953-2300
 627F01TCE1B AA02A01THAS34B 230 328  1 3CC1-653-2300
 627F.1TCE1B AA02A.1THAS34B 230 329  0.1 3CC1-353-2300
      
 627F13TBE1B AA02A13TCES34B 230 330 Cajon 8 VCR 1000 3CC1-F5E-2300
 627F12TBE1B AA02A12TCES34B 230 331  100 3CC1-C5E-2300
 627F11TBE1B AA02A11TCES34B 230 332  10 3CC1-95E-2300
 627F01TBE1B AA02A01TCES34B 230 333  1 3CC1-65E-2300
 627F.1TBE1B AA02A.1TCES34B 230 334  0.1 3CC1-35E-2300
      
 627F13TAE1B AA02A13TBAS34B 230 335 1/2" tube 1000 3CC1-F59-2300
 627F12TAE1B AA02A12TBAS34B 230 336  100 3CC1-C59-2300
 627F11TAE1B AA02A11TBAS34B 230 337  10 3CC1-959-2300
 627F01TAE1B AA02A01TBAS34B 230 338  1 3CC1-659-2300
 627F.1TAE1B AA02A.1TBAS34B 230 339  0.1 3CC1-359-2300
   * compatible to legacy series 627 A, B, C, D, custom solutions for heater status option
                                             (listed companies: MKS Instruments, Andover, MA, USA;  Leybold GmbH, Cologne, Germany) 

Advantages

  • Fully compatible with listed vacuum gauges
  • Lower CoO (cost of ownership), 50% faster warm up, energy efficient low power consumption
  • Easy integration, wide variety of full scales, flanges and interfaces, standard with two set points
  • Easy one push button or remote signal zero command, zero offset adjustable
  • Diagnostic port for quick service and maintenance
  • Two year warranty, longer life time with advanced heating concept and gauge protection
  • No long term recalibration due to excellent signal stability and repeatability, even in harsh plasma applications
  • Compliance & standards: CE, EN, UL, SEMI, RoHS

Typical Applications

  • Etch, CVD, PVD and other semiconductor production processes
  • Chemical and corrosive vacuum processes
  • General thin film and vacuum processes
  • Reference sensor for monitoring of test instruments according to international standards
  • Transfer standard for traceability measurements

News

CDG045D series is 100% drop in  replacement for CTR 101 vacuum transmitters.

With EtherCAT digital interface available now !

  • CDGxxxD geheizt Massbild.gif

Specifications

Type 1000 Torr, 1100 mbar 500 ... 1 Torr / mbar 0.5 ... 0.05Torr / mbar
Accuracy (1) % of reading 0.15 0.15 0.15
Temperature effect      
on zero percent FS/°C 0.0025 0.0025 0.005
on span % of reading / °C 0.01 0.01 0.01
Pressure, max. kPa (absolute) 400 260 130
Resolution percent FS 0.003 0.003 0.003
Lowest reading percent FS 0.01 0.01 0.01
Lowest suggested reading percent FS 0.05 0.05 0.05
Lowest suggested control pressure percent FS 0.5 0.5 0.5
Temperature      
Operation (ambient) °C +10 … +40 +10 … +40 +10 … +40
Bakeout at flange °C ≤110 ≤110 ≤110
Storage °C –20 … +65 –20 … +65 –20 … +65
Supply voltage +14 … +30 VDC or ±15 V (±5%) +14 … +30 VDC or ±15 V (±5%) +14 … +30 VDC or ±15 V (±5%)
Power consumption      
During Heat up W ≤12 ≤12 ≤12
At operating temperature W ≤8 ≤8 ≤8
Output signal (analog) V (dc) 0 … +10 0 … +10 0 … +10
Response time (2) ms 30 30 130 / 30 (3)
Degree of protection IP 40 IP 40 IP 40
Standards      
CE conformity EN 61000‑6‑2/-6-3, EN 61010 & RoHS EN 61000‑6‑2/-6-3, EN 61010 & RoHS EN 61000‑6‑2/-6-3, EN 61010 & RoHS
ETL certification UL 61010‑1, CSA 22.2 No.61010‑1 UL 61010‑1, CSA 22.2 No.61010‑1 UL 61010‑1, CSA 22.2 No.61010‑1
SEMI compliance SEMI S2 SEMI S2 SEMI S2
Electrical connection D-sub, 15 pole, male D-sub, 15 pole, male D-sub, 15 pole, male
Setpoint      
Number of setpoints 2 (SP1,SP2) 2 (SP1,SP2) 2 (SP1,SP2)
Relay contact ≤30 ≤30 ≤30
Hysteresis percent FS 1 1 1
Diagnostic port      
Protocol RS232-C RS232-C RS232-C
Read pressure, status, ID pressure, status, ID pressure, status, ID
Set set points, filter, zero adjust, factory reset, DC offset set points, filter, zero adjust, factory reset, DC offset set points, filter, zero adjust, factory reset, DC offset
Materials exposed to vacuum Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4)) Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4)) Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4))
Internal volume      
I. volume 1/2'' tube cm³ (in.³) 4.2 (0.26) 4.2 (0.26) 4.2 (0.26)
I. volume DN 16 ISO KF cm³ (in.³) 4.2 (0.26) 4.2 (0.26) 4.2 (0.26)
I. volume DN 16 CF-R cm³ (in.³) 4.2 (0.26) 4.2 (0.26) 4.2 (0.26)
I. volume 8 VCR® cm³ (in.³) 4.2 (0.26) 4.2 (0.26) 4.2 (0.26)
Weight      
Weight 1/2'' tube g 837 837 837
Weight DN 16 ISO KF g 852 852 852
Weight DN 16 CF-R g 875 875 875
Weight 8 VCR® g 897 897 897
EtherCAT      
Protocol EtherCAT protocol specialized for EtherCAT protocol specialized for EtherCAT protocol specialized for EtherCAT
Communication standards ETG.5003 Part 1 "Semiconductor Device Profile" ETG.5003 Part 2080 "Specific Device Profile: Vacuum Pressure Gauge" ETG.5003 Part 1 "Semiconductor Device Profile" ETG.5003 Part 2080 "Specific Device Profile: Vacuum Pressure Gauge" ETG.5003 Part 1 "Semiconductor Device Profile" ETG.5003 Part 2080 "Specific Device Profile: Vacuum Pressure Gauge"
Node address Explicit Device Identification Explicit Device Identification Explicit Device Identification
Physical layer 100BASE-Tx (IEEE 802.3) 100BASE-Tx (IEEE 802.3) 100BASE-Tx (IEEE 802.3)
Digital functions read pressure, status, ID pressure, status, ID pressure, status, ID
Digital functions set set points, filter, zero adjust, reset, DC offset set points, filter, zero adjust, factory reset, DC offset set points, filter, zero adjust, factory reset, DC offset
Process data Fixed PDO mapping and configurable PDO mapping Fixed PDO mapping and configurable PDO mapping Fixed PDO mapping and configurable PDO mapping
Mailbox (CoE) SDO requests, responses and information SDO requests, responses and information SDO requests, responses and information
EtherCAT connector RJ45, 8-pin (socket), IN and OUT RJ45, 8-pin (socket), IN and OUT RJ45, 8-pin (socket), IN and OUT
Cable shielded Ethernet CAT5e or higher shielded Ethernet CAT5e or higher shielded Ethernet CAT5e or higher
Cable length m (ft.) ≤100 (330) ≤100 (330) ≤100 (330)
DeviceNet™      
Protocol DeviceNet™, group 2 slave only DeviceNet™, group 2 slave only DeviceNet™, group 2 slave only
Data rate kBaud 125, 250, 500 by switch or network programmable 125, 250, 500 by switch or network programmable 125, 250, 500 by switch or network programmable
Cable length 125 kbps m (ft.) 500 (1650) 500 (1650) 500 (1650)
Cable length 250 kbps m (ft.) 250 (825) 250 (825) 250 (825)
Cable length 500 kbps m (ft.) 100 (330) 100 (330) 100 (330)
MAC ID address 00 - 63 by switch or network programmable address 00 - 63 by switch or network programmable address 00 - 63 by switch or network programmable
Digital functions read pressure, status, ID pressure, status, ID pressure, status, ID
Digital functions set set points, filter, zero adjust, reset, DC offset set points, filter, zero adjust, factory reset, DC offset set points, filter, zero adjust, factory reset, DC offset
Specification DeviceNet™ "Vacuum Gauge Device Profile" (ODVA) DeviceNet™ "Vacuum Gauge Device Profile" (ODVA) DeviceNet™ "Vacuum Gauge Device Profile" (ODVA)
Device type ''VG'' vacuum gauge ''VG'' vacuum gauge ''VG'' vacuum gauge
I / O slave messaging polling only polling only polling only
Supply voltage for gauge at D-sub connector +14 … +30 VDC or ±15 V / ≤12 W +14 … +30 VDC or ±15 V / ≤12 W +14 … +30 VDC or ±15 V / ≤12 W
Supply voltage for DeviceNet transceiver at microstyle connector 24 V nom / <2 W (11 … 25 V) 24 V nom / <2 W (11 … 25 V) 24 V nom / <2 W (11 … 25 V)
Connector for DeviceNet™ microstyle, 5 pin, male microstyle, 5 pin, male microstyle, 5 pin, male
Connector for CDG (analog output, supply voltage CDG, setpoints) D-sub, 15 pin, male D-sub, 15 pin, male D-sub, 15 pin, male
Profibus DP      
Baud rates 9.6 / 19.2 / 93.75 / 187.5 / 500 9.6 / 19.2 / 93.75 / 187.5 / 500 9.6 / 19.2 / 93.75 / 187.5 / 500
Address address 00 - 125 by switch or network programmable address 00 - 125 by switch or network programmable address 00 - 125 by switch or network programmable
Digital functions Read pressure, status, ID pressure, status, ID pressure, status, ID
Digital functions Set set points, filter, zero adjust, factory reset, DC offset set points, filter, zero adjust, factory reset, DC offset set points, filter, zero adjust, factory reset, DC offset
Connector for Profibus DP D-sub, 9 pin, female D-sub, 9 pin, female D-sub, 9 pin, female
Connector for CDG (analog output, supply voltage, setpoints) D-sub, 15 pin, male D-sub, 15 pin, male D-sub, 15 pin, male

(1) Non-linearity, hysteresis, repeatability at 25 °C ambient operating temperature without temperature effects after 2 hours operation.

(2) Increase 10 … 90 percent FS  

(3) For pressure control type only

(4) 18% Cr, 10% Ni, 3% Mo, 69% Fe

  • CDG045D Sky PIM Ordering Information.png

Part Number

1000 Torr, 1100 mbar
Part Number Description
3CC1-351-2300 CDG045D 0.1 Torr; 16-KF
3CC1-353-2300 CDG045D 0.1 Torr; 16-CF
3CC1-359-2300 CDG045D 0.1 Torr; 1/2¨Ø
3CC1-35E-2300 CDG045D 0.1 Torr; 8-VCR
3CC1-651-2300 CDG045D 1 Torr; 16-KF.
3CC1-653-2300 CDG045D 1 Torr; 16-CF
3CC1-659-2300 CDG045D 1 Torr; 1/2¨Ø
3CC1-65E-2300 CDG045D 1 Torr; 8-VCR
3CC1-951-2300 CDG045D 10 Torr; 16-KF
3CC1-953-2300 CDG045D 10 Torr; 16-CF
3CC1-959-2300 CDG045D 10 Torr; 1/2"Ø
3CC1-95E-2300 CDG045D 10 Torr; 8-VCR
3CC1-C51-2300 CDG045D 100 Torr; 16-KF
3CC1-C53-2300 CDG045D 100 Torr; 16-CF
3CC1-C59-2300 CDG045D 100 Torr; 1/2"Ø
3CC1-C5E-2300 CDG045D 100 Torr; 8-VCR
3CC1-F51-2300 CDG045D 1000 Torr; 16-KF
3CC1-F53-2300 CDG045D 1000 Torr; 16-CF
3CC1-F59-2300 CDG045D 1000 Torr; 1/2"Ø
3CC1-F5E-2300 CDG045D 1000 Torr; 8-VCR
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