Thin Film Deposition
INFICON market-leading thin film deposition controllers, monitors and QCM measurement instruments control deposition rate and thickness of the most complex processes with unsurpassed measurement speed and precision. Enhanced software and logic I/O features allow our thin film deposition controllers/QCM measurement instruments to be fully integrated into the vacuum system for automatic process control. To control less complex processes, use INFICON economical, precision controllers, monitors and QCM measurement instruments that measure films with 100 times more precision than conventional techniques.
The typical QCM system includes a quartz crystal which is the sensing device, a crystal holder (sensor) which holds the crystal and provides electrical connections to the crystal, an oscillator (or XIU for ModeLock instruments) which drives the crystal, and a controller or monitor that reads the deposition rate and thickness and stores process parameters. INFICON provides both complete QCM systems as well as individual components designed for research applications.
From the simplest to the most complex process, INFICON provides superior value.
Deposition ControllersA deposition controller allows rate control of your deposition process using a QCM sensor. From the most basic to the most feature laden, INFICON offers a deposition controller to meet your needs.
EIES is an alternative rate/thickness monitoring technology for certain applications where a QCM is not ideal.
Deposition MonitorsA deposition monitor is similar to a deposition controller, but simpler for applications where no rate control or complex system integration is needed. INFICON Deposition Monitors give you the reliable, industry leading quality you expect from INFICON in a simple, easy to use package.
Quartz Crystal Sensors and FeedthroughsA sensor houses and cools the quartz crystal and also makes the electrical connection between the crystal and the feedthrough. INFICON sensors are available in a wide range of configurations and are also available in sensor/feedthrough combinations for a complete custom solution!
- Easy Rate Single Sensor
- Front Load Single Sensor
- Front Load Dual Sensor
- Cool Drawer Single Sensor
- Cool Drawer Dual Sensor
- Easy Rate Dual Sensor
- UHV Bakeable Sensor
- ALD Sensor
- Sputtering Sensor
- CrystalSix® Sensor
- Crystal 12® Sensor
- RSH-600 Rotary Sensor
- QCM Sensor Feedthroughs
- Easy Rate Sensor Feedthroughs
Quartz Monitor Crystals For Vacuum ApplicationsProducts
Quartz Monitor Crystals for Liquid ApplicationsProducts
Semi Process MonitoringSemi Process Monitoring can be used in semiconductor applications for end point detection and fault elimination by monitoring the amount of precursor in the foreline or chamber exhaust. The use of an in situ QCM provides affordable process monitoring and improved semiconductor process profitability.