Gas Analysis

Technology
Mass Spectrometry Optical Spectroscopy Combustion Analysis Gas Chromatographs
Process
PVD CVD ALD Etch Lithography
Pressure
< E-5 Torr > E-4 Torr to 1E-2 Torr 1E-2 Torr to 1 Torr > 1 Torr
Detection Limits
1-10 ppm < 1 ppm < 10 ppb
Market
HVAC/R Industrial Manufacturing Vacuum Coating Security Energy Semiconductor IDM & Foundry Semiconductor Tool Manufacturer Display Pharma & Medical Mobility & Automotive Research & Academia Analytical Instrumentation Batteries
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