Residual Gas Analyzers (RGA) and Mass Spectrometers

Residual Gas Analyzers and Gas Analysis Systems

Products

• Transpector® CPM 3 Compact Process Monitor
• Transpector® SPS Residual Gas Analyzer
• Transpector® XPR 3+ Residual Gas Analyzer
• Transpector® MPH Residual Gas Analyzer
• Transpector® MPS Residual Gas Analyzer
• Mobile Cart for Transpector® CPM (Compact Process Monitor)

Analytical Mass Spectrometer Gas Analysis Systems

Products

• QMG 700 Analytical Mass Spectrometer

Self Plasma Optical Emission Spectrometer Gas Analyzer

Products

• INFICON Quantus® LP100 Gas Analyzer

Software for Gas Analysis

Products

• FabGuard® Integrated Process Monitor (IPM)
• FabGuard® Explorer Gas Analysis Software