Wide Range Vacuum Gauges
The INFICON wide range vacuum gauges offer superior accuracy and reliability in compact designs. Four physical technologies cover the whole range of vacuum from ultra-high vacuum up to atmosphere.
The INFICON Pirani technology enables cost effective measurement in the low and medium vacuum range. The INFICON miniature capacitance diaphragm technology enables precise measurement in the low vacuum range, whereas the ultra- and high-vacuum ranges are covered by the hot or cold ionization technologies.
Each measurement technology is available as a stand-alone sensor or combined with complementary measurement technologies to enable optimum price to performance ratio over the complete vacuum range.
NEW Convection Enhanced Pirani Gauges - advanced seriesAll-in-One Convection enhanced Pirani Gauge for higher accuracy between 100 mbar and atmosphere.
NEW Convection Enhanced Pirani Gauges - standard seriesThe PGE300 Convection enhanced Pirani Gauge offers the same sensor technology like PGE500 to yield same accuracy readings in the measurement range between 100 to 1000 mbar. It offers the most critical built in features to minimize cost.
NEW Convection Gauge Enhanced Pirani Gauges - passiveThe Convection enhanced Pirani Gauge PGE050 for higher accuracy between 100 mbar and atmosphere is intended for use as gauge sensor in the classic "Passive Gauge - Controller combination". Our Passive Gauge Controller VGC031 and VGC083 are the counterparts of choice.
NEW Bayard Alpert Vacuum Gauge Heads - Passive
The INFICON Bayard-Alpert passive vacuum gauge heads BAG050, BAG051, BAG052 and BAG053 are designed for use with the INFICON Vacuum Gauge Controller VGC083A & VGC083B.
For the corresponding Controllers VGC083 A+B please check under chapter "Vaccum Gauge Controllers and Accessories"
NEW Bayard Alpert Hot Ion Gauge - standardFor applications that require a stand alone hot ion gauge, INFICON offers the single Technology Bayard Alpert Hot Ion Gauge with its NEW highly economical standard double filament solution.
NEW Bayard-Alpert GaugesFor applications that require stand alone hot ion gauge technology, INFICON offers the single technology Bayard Alpert Hot Ion Gauge.
High Pressure Hot Ionization Pirani Gauges
Highly repeatable and reproducible measurement for accurate sputter process pressure control in the range of 2 x 10-6 mbar to atmosphere
Bayard Alpert Pirani Capacitance Diaphragm Gauges - Triple Gauge™Combination Gauge Technology - 3 Gauges in one single unit to measure accurate process and base pressure from UHV to 1500 mbar
NEW Inverted Magnetron Pirani GaugesThe NEW Gemini™ Inverted Magnetron Vacuum Gauge is the workhorse for all vacuum measurement applications (pending) to measure from atmosphere to 1x10 – 9 mbar.
Inverted Magnetron Pirani GaugesThe combination of the Inverted Magnetron and Priani Gauge principle provides pressure measurement from atmosphere to high vacuum range of 5 x 10-9 mbar
Penning Cold Cathode Gauges
The rugged Penning Cold Cathode Gauge provides reliable high vacuum measurement from 1 x 10-2 mbar to high vacuum range of down to 1 x 10-9 mbar. Field bus options are available too.
Pirani Standard Gauges
The most compact Pirani gauge for highly reliable measurement within the range of 5 x 10-4 mbar to atmosphere
Pirani Standard Gauges - advanced seriesCompact Pirani gauge line with huge variety of features, including field bus options, that qualifies the right product for the specific vacuum measurement within the range of 5 x 10-4 mbar to atmosphere
Pirani Capacitance Diaphragm GaugesCombination of Pirani and Capacitance Diaphrgam gauge to cover the measuring range of 5 x 10-4 mbar to atmosphere with an extra plus of accuracy in the `close to atmosphere`- range
EtherCAT Vacuum Instrumentation
INFICON is the first vacuum gauge supplier providing EtherCAT interfaces for its vacuum gauge line covering the whole vacuum pressure range with one of its products.
INFICON Vacuum Gauges with EtherCAT® interface are compliant to the EtherCAT specification of the EtherCAT technology Group (ETG) and the EtherCAT Semicondurctor Device Profile.
Therefore INFICON provides its EtherCAT- Interface Vacuum Gauges according the latest standards
ETG.5003. 1 S (R) V1.1.0 : Part 1 Common Device Profile (CDP)
ETG.5003.2080 S (R) V1.3.0 : Part 2080 : Specific Device Profile (SDP) : Vacuum Pressure Gauges
Vacuum Gauges, designed according the previous standard still can be ordered and manufactured on request.
Please check out our ordering numbers for the product of your interest for further information.
- BAG402 Medium to Ultra-High Vacuum Gauge
- Edge™ CDG045D2 1 … 1000Torr / mbar
- Edge™ CDG100D2 1 … 1000Torr / mbar
- SKY® CDG045D 0.05 ... 1000Torr / mbar
- SKY® CDG100D 0.1 ... 1000 Torr / mbar
- SKY® CDG160D 1 ... 1000 Torr / mbar
- SKY® CDG200D 1 ... 1000 Torr / mbar
- Stripe™ CDG045Dhs 0.01 ... 1000Torr / mbar, new 10mTorr
- Stripe™ CDG100Dhs 0.1 ... 1000Torr / mbar
- PSG55x ATM to Medium Vacuum Gauge
- PCG55x ATM to Medium Vacuum Gauge
- BPG402-Sx ATM to Ultra-High Vacuum Gauge
- BCG450 ATM to Ultra-High Vacuum Triple-Gauge™
Calibration Service for Vacuum GaugesFactory or DAkks calibration for Vacuum gauges
Inspection Documents ServiceThe right inspection document for the specific need
Service DocumentsINFICON document templates for service transactions, which support information exchange to the INFICON service department
Catalog and brochures for Vacuum gauges and componentsVacuum Control product catalog and general documents/ brochures for download