High Precision Vacuum Gauges

Precision vacuum measurement from 0.1mTorr to 2 bar


INFICON ceramic capacitance diaphragm gauges (CDG) are designed for demanding, highest accuracy (0.15%) applications in the vacuum industries. The corrosion resistant ultra pure alumina sensor  guarantees superior performance and best long term span stability, high accuracy and years of maintenance free life time. INFICON offers a full line of CDGs starting with low priced Porter status gauges, ranging to world fastest CDG Stripe with less than 1ms measuring time, 200°C process gauges or the reference gauge Cube showing excellent stability. A large selection of flanges and interfaces, for example EtherCAT, make them the best choice for easy and cost effective integration.

Compact and rugged vacuum and differential pressure switches round up the product offering.


Visit our CDG selection guide CDG Selection .

 

 

High Precision Vacuum Gauges

Compact Capacitance Diaphragm Gauges

Big performance - small size

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High Precision Vacuum Gauges

45°C Capacitance Diaphragm Gauges

Unprecedented full scale stability

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High Precision Vacuum Gauges

Heated 100 ... 200°C Capacitance Diaphragm Gauges

Excellent performance for high temperature applications

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High Precision Vacuum Gauges

Compact heated 45°... 100°C Capacitance Diaphragm Gauges

Hot inside - Small outside

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High Precision Vacuum Gauges

High speed heated 45 ... 200°C Capacitance Diaphragm Gauges

Smart Inside - Fast Outside

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High Precision Vacuum Gauges

Reference Capacitance Diaphragm Gauges

The reference

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High Precision Vacuum Gauges

Vacuum Switch

Active electronic switches, passive mechanical switches, absolute and differential pressure versions

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High Precision Vacuum Gauges

OEM Capacitance Diaphragm Sensor

Perfect for integration

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High Precision Vacuum Gauges

EtherCAT Vacuum Instrumentation

INFICON is the first vacuum gauge supplier providing EtherCAT interfaces for its vacuum gauge line covering the whole vacuum pressure range with one of its products.

 

INFICON Vacuum Gauges with EtherCAT® interface are compliant to the EtherCAT specification of the EtherCAT technology Group (ETG) and the EtherCAT Semicondurctor Device Profile.

 

 

Therefore INFICON provides its EtherCAT- Interface Vacuum Gauges according the latest standards

ETG.5003. 1 S (R) V1.1.0 : Part 1 Common Device Profile (CDP)

ETG.5003.2080 S (R) V1.3.0 : Part 2080 : Specific Device Profile (SDP) : Vacuum Pressure Gauges

 

Vacuum Gauges, designed according the previous standard  still can be ordered and manufactured on request.

Please check out our ordering numbers for the product of your interest for further information.

 

 



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Service Documents

INFICON document templates for service transactions, which support information exchange to the INFICON service department

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Calibration Service for Vacuum Gauges

Factory or DAkks calibration for Vacuum gauges

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Inspection Documents Service

The right inspection document for the specific need

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