Drop-in Replacement Products for Vacuum Gauges and Controllers

In this category you can find a wide selection of INFICON Vacuum Gauges to cover your vacuum measurement needs. INFICON products are in many cases 100% drop in compatible to current and legacy product lines shown below: 
High Precision Capacitance Manometers and Diaphragm Switches 
 Product Line Measuring Principle  INFICON Type
 722 (MKS), 730 (SETRA) Ambient Capacitive Gauges  = Porter CDG020D
 626, AA01,623 (MKS), CTR 100 (Leybold) Ambient Capacitive Gauges  = SKY CDG025D
 627, E27, 727 (MKS), CTR 101 (Leybold) 45°C Capacitive Gauges  = SKY CDG045D
 628, E28, 728, 625 (MKS) 100°C Capacitive Gauges  = SKY CDG100D
 629 (MKS) 150/160°C Capacitive Gauges  = SKY CDG160D
 631 (MKS) 200°C Capacitive Gauges  = SKY CDG200D
 AA06, 690A (MKS) Reference capacitive gauges  = Cube CDGsci
 727 (MKS) 45°C Capacitive Gauges  = Edge CDG45D
 728 (MKS) 100°C Capacitive Gauges  = Edge CDG100D
 DI 2000 (Leybold) Capacitive DI Sensors  = DI 200 / DI 2000
 51A, 51B (MKS) Vacuum switches  = VSA 200
 41B (MKS) Vacuum switches  = VSD 200
 PS 115 (Leybold) Vacuum switches  = VSC150A
 PS 113A (Leybold) Vacuum switches  = VSA100A
Wide Ranges Pirani- and Ionisation Gauges
 Product Line Measuring Principle  INFICON Type                 
 275 (MKS or GP) analog or RS485 Convection enhanced Pirani  = PGE500 RS45/ analog
 275 (MKS or GP) DeviceNet Convection enhanced Pirani  = PGE500 DeviceNet
 TTR 91/ TTR 96 (Leybold) Pirani  = PSG500, PSG502
 925 Micro Pirani™ (MKS)
 TTR 91 N/ TTR 96 N (Leybold)
 MEMS-Pirani  = PSG500, PSG502
 TTR 91 R (Leybold) Pirani  = PSG500, PSG550
 TTR 911, TTR 916 (Leybold) Pirani  = PSG550, PSG552
 925 MicroPirani™ (MKS)
 TTR 911 N, TTR 916N (Leybold)
 MEMS Pirani  = PSG550, PSG552
 910 Dual Trans™MicroPirani™ (MKS)
 TTR 101 N (Leybold)
 MEMS Pirani/ Piezo  = PCG55x
 901P MKS MicroPirani™-Piezo (MKS) MEMS Pirani/ ATM Piezo  = PCG55x
 ITR 90, ITR 200 (Leybold) Hot Ion/ Pirani  = BPG400, BPG402
 355 Micro-Ion® (MKS) Hot Ion  = BAG302
 392 Micro-Ion® Plus (MKS) Hot Ion/ Pirani  = BPG400/ BPG402
 390 Micro-Ion® ATM (MKS) Hot Ion/ Pirani/ Piezo/ ATM Piezo  = BCG450
 PTR 225 analog (Leybold) Cold Cathode (Penning)  = PEG100, MAG500
 PTR 225 N (Leybold) Cold Cathode (inv. Magnetron)  = PEG100, MAG500
 PTR 237 analog/ DeviceNet (Leybold) Cold Cathode (Penning)  = PEG100, PEG100-D
 PTR 90 (Leybold) Cold Cathode (inv. Magnetron)  = MPG400
 500, 903 (MKS) Cold Cathode  = MAG500, MPG500
 971B, 971B, 974B (MKS)
 PTR 90 N (Leybold)
 CC/ Pirani/ Piezo/ ATM Piezo
 Cold Cathode/ Pirani
  = MPG500
 MPG500
 Center One, Two, Three (Leybold) Active Gauge Controller  = VGC501, VGC502, VGC503
                                                                                                                                            (listed companies: MKS Instruments, Andover, MA, USA;  Leybold GmbH, Cologne, Germany) 

 

 

Drop-in Replacement Products for Vacuum Gauges and Controllers

Compact Capacitance Diaphragm Gauges - 722, 730 compatible

Big performance - small size

Products
Drop-in Replacement Products for Vacuum Gauges and Controllers

Ambient Capacitance Diaphragm Gauges - 626, AA01, CTR 100 compatible

Temperature compensated, environmental independance

Products
Drop-in Replacement Products for Vacuum Gauges and Controllers

45°C Capacitance Diaphragm Gauges - 627, E27, CTR 101 compatible

Unprecedented full scale stability

Products
Drop-in Replacement Products for Vacuum Gauges and Controllers

Convection Enhanced Pirani Gauges - advanced series

All-in-One Convection enhanced Pirani Gauge for higher accuracy between 100 mbar and atmosphere.

Products
Drop-in Replacement Products for Vacuum Gauges and Controllers

Convection Gauge Enhanced Pirani Gauges - passive - 275 compatible

The Convection enhanced Pirani Gauge PGE050 for higher accuracy between 100 mbar and atmosphere is intended for use as gauge sensor in the classic "Passive Gauge - Controller combination". Our Passive Gauge Controller VGC031 and VGC083 are the counterparts of choice.

Products
Drop-in Replacement Products for Vacuum Gauges and Controllers

Pirani Standard Gauges

The most compact Pirani gauge line for highly reliable measurement within the range of 5 x 10-4 mbar to atmosphere.



Products
Drop-in Replacement Products for Vacuum Gauges and Controllers

Pirani Standard Gauges - advanced series

Compact Pirani gauge line with huge variety of features, including field bus options, that qualifies the right product for the specific vacuum measurement within the range of 5 x 10-4 mbar to atmosphere

Products
Drop-in Replacement Products for Vacuum Gauges and Controllers

Pirani Capacitance Diaphragm Gauges

Combination of Pirani and Capacitance Diaphrgam gauge to cover the measuring range of 5 x 10-4 mbar to atmosphere with an extra plus of accuracy in the `close to atmosphere`- range

Products
Drop-in Replacement Products for Vacuum Gauges and Controllers

Bayard - Alpert Pirani Gauges

Combination gauge technology for extremely wide measurement from ultra high vacuum to atmosphere

Products
Drop-in Replacement Products for Vacuum Gauges and Controllers

Bayard Alpert Hot Ion Gauge - 354, 355 COMPATIBLE

For applications that require a stand alone hot ion gauge, INFICON offers the single Technology Bayard Alpert Hot Ion Gauge with its NEW highly economical standard double filament solution.

Products
Drop-in Replacement Products for Vacuum Gauges and Controllers

Gemini - Inverted Magnetron Pirani Gauges

The NEW Gemini Inverted Magnetron Vacuum Gauge is the workhorse for all vacuum measurement applications (pending) to measure from atmosphere to 1x10 – 9 mbar.

Products
Drop-in Replacement Products for Vacuum Gauges and Controllers

Inverted Magnetron Pirani Gauges

The combination of the Inverted Magnetron and Priani Gauge principle provides pressure measurement from atmosphere to high vacuum range of 5 x 10-9 mbar

Products
Drop-in Replacement Products for Vacuum Gauges and Controllers

Penning Cold Cathode Gauges

The rugged Penning Cold Cathode Gauge provides reliable high vacuum measurement from 1 x 10-2 mbar to high vacuum range of down to 1 x 10-9 mbar. Field bus options are available too.



Products
Drop-in Replacement Products for Vacuum Gauges and Controllers

Vacuum Gauge Controller

The NEW Active Gauge Controller series VGC50x is designed for best and state of the art process measurement and control and is available as single, dual and triple channel device. It supports the wide range of INFICON active gauges and is well suited to monitor and data log the entire pressure range from 10-10 to 1500 mbar (10-10 to 1125 Torr) as well as the set point status.

Compatibility to VGC40x series (discontinued) is given.



Products
Drop-in Replacement Products for Vacuum Gauges and Controllers

Spare sensor head BAG100

Spare sensor head for INICON BAG100 Bayard-Alpert Hot Ion Gauges.

BAG100 Hot Ion Gauges are discontinued since 2004. INFICON sill is able to support enduser, who have this gauge type still running on their production tools after all those years with the original spare sensor head.



Products
Drop-in Replacement Products for Vacuum Gauges and Controllers

Pirani Standard Gauges - Passive

The INFICON Pirani Standard Gauges PSG050 & PSG051 use the vacuum gauge

controller VGC012 or VGC023 as operating Units. These VGC012 and VGC023 controller units are already discontinued for many years now but still can be seen in the field very often. So PSGG050 & PSG051 are still reuqested by many enduser as "consumable" to make the customer able to continue the keep his poduction tool alive.



Products
Drop-in Replacement Products for Vacuum Gauges and Controllers

Penning Cold Cathode Gauges - Passive

The passive PEG050 Penning Cold Cathode Gauge provides reliable high vacuum measurements and is intended for the use with the older and meanwhile discontinued vacuum gauge Controller VGC023 as operating and control unit.

The rugged penning cold cathode sensor has no filment to burn out and due to the titanium cathode plates and the reduced high voltage after plasma ignition the gauge can be operated also in demanding sputtering applications.



Products
Drop-in Replacement Products for Vacuum Gauges and Controllers

DI Sensors

Capacitive, linear pressure sensor

Products
Drop-in Replacement Products for Vacuum Gauges and Controllers

Vacuum Switch

Active electronic switches, passive mechanical switches, absolute and differential pressure versions

Products
Drop-in Replacement Products for Vacuum Gauges and Controllers

Vacuum Gauge Controller (for passive convection enhanced Piranis) and Accessories

The NEW INFICON Vacuum Gauge Controller 031 (VGC031) is designed for use in conjunction with the INFICON Pirani Gauge Enhanced 050 (PGE050) and acts as a convenient power supply, control and readout. VGC031 and PGE050 are a flexible combination to monitor your vacuum system in the range from 1.3 × 10-4 up to 1333 mbar (1 × 10-4 up to 1000 Torr). The VGC031 with its space saving panel mount housing supports a variety of technical features as 2 set point relays, 4 user selectable analog outputs and offers additionally RS232/ RS485 digital interfaces. The bright, sharp and clear OLED display with the integrated keypad user interface rounds out this user friendly vacuum gauge controller package. The rugged industrial design makes the VGC031 in combination with the convection enhanced PGE050 gauge sensor a very good choice for many vacuum applications were economical vacuum measurement from low to high vacuum range is required.

Products
Drop-in Replacement Products for Vacuum Gauges and Controllers

Vacuum Gauge Controller (for passive Ionisation Gauges) and Accessories

The NEW INFICON Vacuum Gauge Controller VGC083 is designed for use with passive gauge heads BAG05x and PGE050 in a fixed combination of two PGE050 gauges and one BAG05x gauge. The VGC083 controlls and monitors vacuum pressure from ATM down to 2.7×10-11mbar using the BAG and PGE gauges. Six (6) single-pole relays assignable to any of the gauge heads along with RS232 and RS485 interfaces aid in system integration. The rugged industrial design of the VGC083 in combination with the passive gauge heads provide a reliable and economical system for vacuum applications requiring a wide vacuum measurement range.

Products

Service Documents

INFICON document templates for service transactions, which support information exchange to the INFICON service department

Products

Inspection Documents Service

The right inspection document for the specific need

Products