Drop-in Replacement Products for Vacuum Gauges and Controllers
|In this category you can find a wide selection of INFICON Vacuum Gauges to cover your vacuum measurement needs. INFICON products are in many cases 100% drop in compatible to current and legacy product lines shown below:|
|High Precision Capacitance Manometers and Diaphragm Switches|
|Product Line||Measuring Principle||INFICON Type|
|722 (MKS), 730 (SETRA)||Ambient Capacitive Gauges||=||Porter CDG020D|
|626, AA01,623 (MKS), CTR 100 (Leybold)||Ambient Capacitive Gauges||=||SKY CDG025D|
|627, E27, 727 (MKS), CTR 101 (Leybold)||45°C Capacitive Gauges||=||SKY CDG045D|
|628, E28, 728, 625 (MKS)||100°C Capacitive Gauges||=||SKY CDG100D|
|629 (MKS)||150/160°C Capacitive Gauges||=||SKY CDG160D|
|631 (MKS)||200°C Capacitive Gauges||=||SKY CDG200D|
|AA06, 690A (MKS)||Reference capacitive gauges||=||Cube CDGsci|
|727 (MKS)||45°C Capacitive Gauges||=||Edge CDG45D|
|728 (MKS)||100°C Capacitive Gauges||=||Edge CDG100D|
|DI 2000 (Leybold)||Capacitive DI Sensors||=||DI 200 / DI 2000|
|51A, 51B (MKS)||Vacuum switches||=||VSA 200|
|41B (MKS)||Vacuum switches||=||VSD 200|
|PS 115 (Leybold)||Vacuum switches||=||VSC150A|
|PS 113A (Leybold)||Vacuum switches||=||VSA100A|
|Wide Ranges Pirani- and Ionisation Gauges|
|Product Line||Measuring Principle||INFICON Type|
|275 (MKS or GP) analog or RS485||Convection enhanced Pirani||=||PGE500 RS45/ analog|
|275 (MKS or GP) DeviceNet||Convection enhanced Pirani||=||PGE500 DeviceNet|
|TTR 91/ TTR 96 (Leybold)||Pirani||=||PSG500, PSG502|
| 925 Micro Pirani™ (MKS)|
TTR 91 N/ TTR 96 N (Leybold)
|TTR 91 R (Leybold)||Pirani||=||PSG500, PSG550|
|TTR 911, TTR 916 (Leybold)||Pirani||=||PSG550, PSG552|
| 925 MicroPirani™ (MKS)|
TTR 911 N, TTR 916N (Leybold)
|MEMS Pirani||=||PSG550, PSG552|
| 910 Dual Trans™MicroPirani™ (MKS)|
TTR 101 N (Leybold)
|MEMS Pirani/ Piezo||=||PCG55x|
|901P MKS MicroPirani™-Piezo (MKS)||MEMS Pirani/ ATM Piezo||=||PCG55x|
|ITR 90, ITR 200 (Leybold)||Hot Ion/ Pirani||=||BPG400, BPG402|
|355 Micro-Ion® (MKS)||Hot Ion||=||BAG302|
|392 Micro-Ion® Plus (MKS)||Hot Ion/ Pirani||=||BPG400/ BPG402|
|390 Micro-Ion® ATM (MKS)||Hot Ion/ Pirani/ Piezo/ ATM Piezo||=||BCG450|
|PTR 225 analog (Leybold)||Cold Cathode (Penning)||=||PEG100, MAG500|
|PTR 225 N (Leybold)||Cold Cathode (inv. Magnetron)||=||PEG100, MAG500|
|PTR 237 analog/ DeviceNet (Leybold)||Cold Cathode (Penning)||=||PEG100, PEG100-D|
|PTR 90 (Leybold)||Cold Cathode (inv. Magnetron)||=||MPG400|
|500, 903 (MKS)||Cold Cathode||=||MAG500, MPG500|
| 971B, 971B, 974B (MKS)|
PTR 90 N (Leybold)
| CC/ Pirani/ Piezo/ ATM Piezo|
Cold Cathode/ Pirani
|Center One, Two, Three (Leybold)||Active Gauge Controller||=||VGC501, VGC502, VGC503|
|(listed companies: MKS Instruments, Andover, MA, USA; Leybold GmbH, Cologne, Germany)|
Compact Capacitance Diaphragm Gauges - 722, 730 compatibleBig performance - small size
Ambient Capacitance Diaphragm Gauges - 626, AA01, CTR 100 compatibleTemperature compensated, environmental independance
45°C Capacitance Diaphragm Gauges - 627, E27, CTR 101 compatibleUnprecedented full scale stability
Convection Enhanced Pirani Gauges - advanced seriesAll-in-One Convection enhanced Pirani Gauge for higher accuracy between 100 mbar and atmosphere.
Convection Gauge Enhanced Pirani Gauges - passive - 275 compatibleThe Convection enhanced Pirani Gauge PGE050 for higher accuracy between 100 mbar and atmosphere is intended for use as gauge sensor in the classic "Passive Gauge - Controller combination". Our Passive Gauge Controller VGC031 and VGC083 are the counterparts of choice.
Pirani Standard Gauges
The most compact Pirani gauge line for highly reliable measurement within the range of 5 x 10-4 mbar to atmosphere.
Pirani Standard Gauges - advanced seriesCompact Pirani gauge line with huge variety of features, including field bus options, that qualifies the right product for the specific vacuum measurement within the range of 5 x 10-4 mbar to atmosphere
Pirani Capacitance Diaphragm GaugesCombination of Pirani and Capacitance Diaphrgam gauge to cover the measuring range of 5 x 10-4 mbar to atmosphere with an extra plus of accuracy in the `close to atmosphere`- range
Bayard Alpert Hot Ion Gauge - 354, 355 COMPATIBLEFor applications that require a stand alone hot ion gauge, INFICON offers the single Technology Bayard Alpert Hot Ion Gauge with its NEW highly economical standard double filament solution.
Gemini - Inverted Magnetron Pirani GaugesThe NEW Gemini Inverted Magnetron Vacuum Gauge is the workhorse for all vacuum measurement applications (pending) to measure from atmosphere to 1x10 – 9 mbar.
Inverted Magnetron Pirani GaugesThe combination of the Inverted Magnetron and Priani Gauge principle provides pressure measurement from atmosphere to high vacuum range of 5 x 10-9 mbar
Penning Cold Cathode Gauges
The rugged Penning Cold Cathode Gauge provides reliable high vacuum measurement from 1 x 10-2 mbar to high vacuum range of down to 1 x 10-9 mbar. Field bus options are available too.
Vacuum Gauge Controller
The NEW Active Gauge Controller series VGC50x is designed for best and state of the art process measurement and control and is available as single, dual and triple channel device. It supports the wide range of INFICON active gauges and is well suited to monitor and data log the entire pressure range from 10-10 to 1500 mbar (10-10 to 1125 Torr) as well as the set point status.
Compatibility to VGC40x series (discontinued) is given.
Spare sensor head BAG100
Spare sensor head for INICON BAG100 Bayard-Alpert Hot Ion Gauges.
BAG100 Hot Ion Gauges are discontinued since 2004. INFICON sill is able to support enduser, who have this gauge type still running on their production tools after all those years with the original spare sensor head.
Pirani Standard Gauges - Passive
The INFICON Pirani Standard Gauges PSG050 & PSG051 use the vacuum gauge
controller VGC012 or VGC023 as operating Units. These VGC012 and VGC023 controller units are already discontinued for many years now but still can be seen in the field very often. So PSGG050 & PSG051 are still reuqested by many enduser as "consumable" to make the customer able to continue the keep his poduction tool alive.
Penning Cold Cathode Gauges - Passive
The passive PEG050 Penning Cold Cathode Gauge provides reliable high vacuum measurements and is intended for the use with the older and meanwhile discontinued vacuum gauge Controller VGC023 as operating and control unit.
The rugged penning cold cathode sensor has no filment to burn out and due to the titanium cathode plates and the reduced high voltage after plasma ignition the gauge can be operated also in demanding sputtering applications.
DI SensorsCapacitive, linear pressure sensor
Vacuum Gauge Controller (for passive convection enhanced Piranis) and AccessoriesThe NEW INFICON Vacuum Gauge Controller 031 (VGC031) is designed for use in conjunction with the INFICON Pirani Gauge Enhanced 050 (PGE050) and acts as a convenient power supply, control and readout. VGC031 and PGE050 are a flexible combination to monitor your vacuum system in the range from 1.3 × 10-4 up to 1333 mbar (1 × 10-4 up to 1000 Torr). The VGC031 with its space saving panel mount housing supports a variety of technical features as 2 set point relays, 4 user selectable analog outputs and offers additionally RS232/ RS485 digital interfaces. The bright, sharp and clear OLED display with the integrated keypad user interface rounds out this user friendly vacuum gauge controller package. The rugged industrial design makes the VGC031 in combination with the convection enhanced PGE050 gauge sensor a very good choice for many vacuum applications were economical vacuum measurement from low to high vacuum range is required.
Vacuum Gauge Controller (for passive Ionisation Gauges) and AccessoriesThe NEW INFICON Vacuum Gauge Controller VGC083 is designed for use with passive gauge heads BAG05x and PGE050 in a fixed combination of two PGE050 gauges and one BAG05x gauge. The VGC083 controlls and monitors vacuum pressure from ATM down to 2.7×10-11mbar using the BAG and PGE gauges. Six (6) single-pole relays assignable to any of the gauge heads along with RS232 and RS485 interfaces aid in system integration. The rugged industrial design of the VGC083 in combination with the passive gauge heads provide a reliable and economical system for vacuum applications requiring a wide vacuum measurement range.
Service DocumentsINFICON document templates for service transactions, which support information exchange to the INFICON service department
Inspection Documents ServiceThe right inspection document for the specific need
Catalog and brochures for Vacuum gauges and componentsVacuum Control product catalog and general documents/ brochures for download