Application specific products for Semiconductor

Products

Deposition Monitors

• IMM-100 Thin Film Deposition Monitor
• IMM-200 Thin Film Deposition Monitor
• SQM-160 Thin Film Deposition Monitor
• STM-2XM 2-Channel Rate/Thickness Monitor
• STM-2 USB Thin Film Rate/Thickness Monitor

Semi Process Monitoring

• IMM-200 Thin Film Deposition Monitor
• SemiQCM™ Sensors for TDMAT Precursor Monitoring

Deposition Controllers

• IC6 Thin Film Deposition Controller
• XTC/3 Thin Film Deposition Controller

Quartz Crystal Sensors and Feedthroughs

• ALD Sensor

Quartz Monitor Crystals For Vacuum Applications

• Quartz Monitor Crystals