QMG 700 Analytical Mass Spectrometer

 

Exceeding Detection Limits with Superior Stability and Refined Resolution

 

Rapid advancements in semiconductor manufacturing technology rely on swift and dependable gas analysis solutions. In the fab or in the lab, select the INFICON QMG 700 Analytical Mass Spectrometer to break through detection barriers and propel your process to the next level of innovation. The QMG 700 provides unparalleled performance and adaptability in a modular design. Enhance your competitive edge with the QMG 700, and achieve a superior level of measurement capability.

 

Select from a wide range of ion source, mass filter, and RF power supply options, to tailor your QMG 700 to specific applications. The QMG 700 boasts more than nine decades of dynamic range and ppb detection limits, making it the ideal instrument for ultra high vacuum measurements. QMG 700 provides unit resolution across its entire mass range, and even higher resolution for low masses. The instrument is a superb option for the most challenging measurements, including isotope analyses, such as helium and deuterium separation. Control your process with the QMG 700 and rely upon its superior long-term stability to protect critical measurements.

 

More than forty years of analytical mass spectrometry excellence at INFICON ensure the QMG 700 is the right choice for your next gas analysis investment. For consistent accuracy and precise results, you can rely on the INFICON QMG 700 and our worldwide applications expertise.

Features

  • Mass range options from 1-2048 amu
  • More than nine decades of dynamic range
  • Extremely fast measurement speeds: 0.125 ms/amu
  • MDPP < 10E-16 mbar
  • High resolution across entire mass range: Masses 1, 2, and 3 clearly separable in ppb range

  • More than 10 different ion source and ion optics combinations
  • Discrete or continuous dynode electron multiplier options
  • Ion counting preamplifier available for analysis of negative and positive ions as well as neutrals
  • IO option: 8 analog inputs/outputs and 32 digital inputs/outputs
  • Powerful software with flexible and user friendly interface

Typical Applications

  • Gas discharge mass spectrometry
  • End point detection
  • Deposition material monitoring
  • Secondary ion mass spectrometry

Specifications

Type QMA 400 QMA 410 QMA 430
Mass Range 1-2048 amu (1) 1-340 amu (2) 1-300 amu
Sensor Length 441.5 mm 548 mm 441.5 mm
Rod Diameter 8 mm 16 mm 8 mm
Rod Material Molybdenum Molybdenum Stainless Steel
Flange DN 63 CF-F DN 100 CF-F DN 63 CF-F
Detector Type Faraday/SEV 217 Faraday/SEV 217 Faraday/SEV 217
Max. Operating Pressure (FC) 1 E-4 mbar 1 E-4 mbar 1 E-4 mbar
Max. Operating Pressure (EM) 1 E-5 mbar 1 E-5 mbar 1 E-5 mbar
Sensitivity 5 E-4 A/mbar 1 E -3 A/mbar 2 E-4 A/mbar
Minimum Detectable Partial Pressure 1 E-15 mbar 5 E-16 mbar 1 E-15 mbar
Resolution (adjustable) 0.3 - 7 amu 0.2 - 2.2 amu 0.3 - 7 amu
Partial Pressure Ratio < 0.5 ppb < 0.5 ppb < 0.5 ppb
Max. Operating Temp. Sensor 150 °C 150 °C 150 °C
Max. Bakeout Temp. 400 °C 400 °C 400 °C
Max. Operating Temp. Electronics 40 °C 40 °C 40 °C
Measurement Speed 0.125 ms - 60 s/amu 0.125 ms - 60 s/amu 0.125 ms - 60 s/amu
Power Supply 100 - 240 VAC 100 - 240 VAC 100 - 240 VAC

(1) QMA 400 is available for mass ranges: 1-512 amu, 1-1024 amu, 1-2048 amu.                        

 QMA 400 specifications based upon 512 amu mass range, cross beam ion source system configuration

 

(2) QMA 410 is available for mass ranges: 1-16 amu, 1-128 amu, 1-340 amu.

QMA 410 specifications based upon 128 amu mass range, cross beam ion source system configuration

 

Part Number

QMA 400
Part Number Description
490-709
490-710 QMA 400 with axial Ionenq.
490-711 QMA 400, 8mm Mo,217, W, CB
490-712 QMA 400, 8mm Mo,218, W, CB w/mag
490-713 QMA 400, 8mm Mo,217, CB-GT
490-721 QMA 400, 8mm Mo,217, W, CB-GT (GIA)
490-722 QMA 400 m. CB-IQ, Y-Kat., Mag. isol.
490-755
490-756 QMA 400, 8mm Mo, UF6
490-756-2 QMA 400, 8mm Mo, UF6 Untested Assembly
490-770 QMA 400 with CB-Ionenq.gasd, special
490-772 QMA 400 with Axial Ionenq, W
BKM07627
PTM07736 QMA 400 mit Crossb.-Ionenq.
QMA 410
Part Number Description
490-811 QMA 410 Cross Beam IS w/ Magnet
490-813 QMA 410, CB-IQ Gas-Tight with Magnet
490-816 QMA 410,16mm Mo,217, W, CB
QMA 430
Part Number Description
490-911 QMA 430, 8mm SS,217, W, CB
490-911/S QMA 430, 8mm SS,217, W, CB
490-912 QMA 430, 8mm SS,217, W, CB-GT
490-921 QMA 430, 8mm SS,217, W, CB (GIA)
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