Dry Helium Leak Detector UL3000 Fab (PLUS)

 

The INFICON helium leak detector UL3000 Fab (PLUS) is designed for the needs of leak testing in semiconductor applications. 


It features flexibility, mobility, fast start up, high sensitivity, fast and precise test results, and reliability.

 

FAST RESULTS
The improved vacuum system with low maintenance vacuum pumps allows the detection of leaks starting from atmospheric pressure. The rugged mass spectrometer system ensures long running time and low maintenance costs. The HYDRO-S software in the UL3000 Fab PLUS eliminates the water vapour background and makes leak testing even faster. 


The UL3000 Fab PLUS offers also an improved sniffer capability by using the well proven sniffer line SL3000 which has up to 10 m length.

 

ROTATABLE AND REMOTE CONTROLLABLE DISPLAY
The new touch screen display shows test results and status information even from a long distance. Easy operation via user guided menu structure, even for inexperienced operators. A wireless control of the UL3000 Fab (PLUS) is possible via smartphone or tablet - without special software or Apps. Recording and storage of test results via push button can be transferred to other storage media for further analysis.

 

SLIM DESIGN FOR ADVANCED MANEUVERABILITY
A low center of gravity, big wheels, ergonomically designed handle and the slim housing enable good mobility of the UL3000 Fab (PLUS) even in tight spaces.



Features

  • Ready to measure at atmospheric pressure
  • Intuitive user guidance with touch display
  • Robust vacuum system, insensitive to dirt and contamination
  • Perfect mobility due to small turning radius
  • Operable by smartphone via web browser
  • Low maintenance requirement
  • Accessories available right at the device

Typical Applications

  • Leak testing of components before they are installed in existing tools
  • Inspections and installations of process gas systems
  • Automatic testing of hermetically sealed components with the TC1000 test chamber
  • Leak tests in environments with high demands on test conditions and cleanliness

Specifications

Type Helium Leak Detector UL3000 Fab (PLUS)
Min detectable leak rate for Helium ( Vacuum mode ) mbar•L/s <5E-12
Min. detectable leak rate for Helium ( Sniffer mode ) mbar•L/s 5E-8
Max. Inlet pressure MASSIVE mode mbar 1000
Max. Inlet pressure FINE mode mbar 2
Max. Inlet pressure ULTRA mode mbar 0.4
Pumping speed during evacuation m³/h > 30 at 50 Hz
Helium pumping speed ULTRA mode L/s 4
Detectable masses 2,3,4 amu
Mass spectrometer Sector field 180°
Filaments ion source Iridium/Yttria coated 2
Calibrated built-in leak mbar•L/s e-7
Test port DN 25 KF 1
Adjustable triggers

4

Interface 2 x USB, Ethernet / LAN
In/Outputs Via I/O 1000 module
Permissable ambient temperature ( during operation ) °C +10.....+40
Type of protection IP 20
Weight 120
Dimensions ( LxWxH ) mm 1050x472x987
Supply voltage V (ac) 100...240 V (+/-10% ) 50/60 Hz
Power consumption VA Typical 700, max. 1500

Part Number

Helium Leak Detector UL3000 Fab (PLUS)
Part Number Description
550-200 ULTRATEST UL3000 Fab
550-250 ULTRATEST UL3000 Fab PLUS

Accessories

Helium Leak Detector UL3000 Fab (PLUS)
Part Number Description
14005 SL200, Sniffer Probe for UL1000/5000/Modul1000, 4m length
525-001 SL3000-3,sniffer line 3m length
525-002 SL3000-5,sniffer line 5m length
525-003 SL3000-10, sniffer line 10m length
551-005 TC1000Test Chamber,DN25KF,ESD wrist band
551-010 Remote Control RC1000C, wired, with 4m coiled cable
551-015 Remote Control RC1000WL, wireless, incl. wireless transmitter
551-201 Helium Bottle Holder for UL3000 Fab
560-310 I/O 1000 module
560-335 Data Cable 5 m
560-340 Data Cable 10 m
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