Composer Elite™ Gas Concentration Monitor

High Sensitivity to all Precursor Gases – Including Cp2Mg

 

To Be Discontinued on January 31, 2018

 

Composer Elite Binary Gas Concentration Monitor is a simple and reliable way to measure the composition of binary gases, including Cp2Mg in nitrogen and other low vapor pressure materials. Composer Elite accurately measures precursor and carrier gas ratios to precise levels, effectively reducing process variability and promotes efficient use of precursor materials. Developed by INFICON, a leader in advanced measurement instrumentation for the semiconductor and related industries, Composer Elite measures the ratio of a variety of binary gases. Its wide operating pressure range (200 to 1000 Torr) and high sensitivity make it an indispensable tool for semiconductor applications, including MOCVD, in both R&D and production environments, as well as for many industrial processes.

UNPRECEDENTED SENSITIVITY, RELIABILITY AND ACCURACY
Our unique resonance measurement technique enables frequency resolution to less than 0.1 Hz, equivalent to 0.00011% of TMIn (trimethylindium) in H2. This is about 10 times better resolution than acoustic time-of-flight techniques. The resonance measurement technique also allows operation to pressures as low as 200 Torr for low pressure processes. For applications that require process reproducibility with precise measurements, Composer Elite can be operated using factory zero point settings. When the highest accuracy possible is required, Composer Elite can be easily calibrated by simply purging the transducer’s chamber with pure carrier gas and pressing the Zero Reference button.

MEASURES THE DOPANT PRECURSOR Cp2Mg
Composer Elite is the only instrument that enables precise monitoring of the dopant precursor Cp2Mg, bis(cyclopentadienyl) magnesium, used in LED manufacturing processes. Combined with the ability to monitor all the other precursors used in LED and HB-LED manufacturing, Composer Elite brings enhanced precision and significant cost savings to manufacturers as they strive to lower the cost of their products to consumers.

MONITORS GAS MIXTURES TO ENSURE SOURCE MATERIALS ARE USED EFFICIENTLY
Composer Elite precisely monitors gas composition by measuring the speed of sound in binary gas mixtures. As the amount of precursor in the bubbler decreases, Composer Elite measures this change in precursor pick-up efficiency. This allows the operator, or system computer, to alter the flow of gas through the bubbler to correct the concentration as needed. With Composer Elite, expensive source materials are used efficiently, keeping costs contained while maximizing tool production time.

EASY INTEGRATION INTO CONTROL SYSTEM
Both RS-232 and DeviceNet Client communication are standard features, allowing Composer Elite to be easily integrated into a reactor’s control system using digital communications.

MONITORS CARRIER GAS FLOW STABILITY
The instrument can be used to verify carrier gas flow is stable throughout and between process runs. The transducer is inherently stable and can be relied on for maximum reproducibility.

VERIFIES GAS LINES ARE COMPLETELY PURGED
Composer Elite can be used to verify gas lines are completely purged, ensuring the integrity of gas delivered to your process.

HIGHLY RELIABLE
The Composer Elite acoustic transducer is highly reliable and contains no moving parts. This ensures years of maintenance-free operation. Additionally, each end of the acoustic cell has a unique secondary containment volume to ensure no process gas can leak to the environment.

Benefits

  • Reduce process variability
  • Promote efficient use of precursor materials
  • Verify gas lines are purges

Features

  • Accurately measures precursor/carrier gas ratios
  • Verifies stability of precursor and dopant delivery throughout structure growth and over time
  • Sensitive to Cp2Mg and other low vapor pressure materials
  • Monitors up to five sensors with one control unit

Typical Applications

  • MOCVD

Specifications

Type Composer Elite
Performance  
Operating pressure range 200 - 1000 Torr (27 - 133.3 kPa)
Routine overpressure rating Up to 1520 Torr (202.7 kPa)
Maximum transducer pressure 6200 Torr (826.6 kPa) Absolute. Pressure over 6200 Torr may damage transducer diaphragms.
Gas flow range Up to 2000 sccm
Temperature range Up to 65°C (Acoustic sensor), temperature control is heat only, no active cooling.
Temperature stability Controlled to <0.01°C
Frequency stability Stable within 0.0045%
Sensitivity 0.00011% of TMIn in H2
Reproducibility <3 x 10-6 molar TMIn equivalent
Construction  
Sensor body and pipes 316L Stainless Steel
Isolation diaphragms Inconel® X-750
Inlet/Outlet VCR-4 fittings
Leak rate <1 x 10-9 std. cm3/s He
Measurement rate 1 Hz
Swept volume 8.9 cm3
Power Required: 24 V (dc), 240 W

Optional: A 24 V (dc), 240 W power supply with universal AC input can optionally be purchased from INFICON

Part Number

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Accessories

Composer Elite
Part Number Description
600-1447-P15 15 ft. (4.6 m) Interconnect cable (connects Sensor Control Unit to Acoustic Sensor)
782-900-007 Full Rack Extender - Mounts one SQC-310 or Composer Elite in a 19 in. rack (includes blank-off)
033-0056 Composer Elite Power Supply (Does not include cable)
068-0433 115 V Power Supply Cable (cable only)
068-0434 230 V Power Supply Cable (cable only), Euro style
600-1001-P15 15 ft. (4.6 m) male/female RS-232 cable
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