XTC/3 Thin Film Deposition Controller

Advanced, Affordable Rate Control for Single or Multiple Layers

Now get everything you want in a thin film deposition controller for single and multiple-layer processes. The XTC/3 with patented ModeLock provides proven mode hop prevention for consistent quality. With the XTC/3 Thin Film Deposition Controller, you get highly accurate control of deposition rate and thickness, the capacity for virtually any number of layers, easy installation, and extremely high reliability to ensure productivity.

INFICON, the global leader in thin film deposition control, now offers an instrument with a remarkably low cost of ownership for unprecedented value.

Whether your control needs reflect production or research and development use, you will find a precise match in the INFICON XTC/3.

Worldwide INFICON Support

No matter where you are, you get fast answers, attentive service, and maximum uptime. With offices around the world, INFICON is the only manufacturer of thin film deposition controllers to offer you local service and technical support around the world.

Features

  • Available in single-layer and multiple-layer models
  • Patented ModeLock technology prevents film thickness errors caused by mode-hopping
  • Supports INFICON Crystal 12®, Crystal Six®, and dual sensor automatic crystal switching for maximum productivity
  • XTC/3M multiple-layer model supports up to 99 processes, 999 layers, 32 films, 2 sensors, and two sources
  • XTC/3S single-layer model supports up to 9 films, 2 sensors, and two sources
  • Easy-to-read TFT LCD graphics displays
  • Films and processes can be assigned unique, descriptive names for easy retrieval
  • Ethernet connection available
  • Free-standing (no computer necessary) or optional Windows® software for PC operation
  • Plug-and-play replacement for INFICON XTC/2 controllers (limited to XTC/2 features and command set)

Typical Applications

  • High End Optical Coatings

News

The XTC/3 front panel has been re-designed to meet our new INFICON
corporate standards.

The XTC/3M is the first thin film product to incorporate the new design and
is currently shipping on new products. The new front panel design on the
XTC/3S will start shipping in late 2013. Front panels for other thin
film products will be updated in 2014 and 2015.

Specifications

Type XTC3/S XTC3/M
Frequency Resolution ±0.028 Hz @ 6 MHz
±0.028 Hz @ 6 MHz
Measurement Frequency Range 6.0 to 5.0 MHz (fixed) 6.0 to 5.0 MHz (fixed)
Measurement Interval 0.25 seconds 0.25 seconds
Thickness & Rate Resolution / Measurement (1) ±0.034 Å ±0.034 Å
Measurement Technology ModeLock ModeLock
Number of Processes 1 99
Number of Layers 1 999
Number of Material Programs (or Films) 9 32
Number of Sensor Inputs 2 2
CrystalSix / Crystal 12 Sensor Support Yes Yes
Support XTAL 2 Switch Yes Yes
Number of Source Outputs 2 2
Computer Communications RS232 standard, Ethernet TCP/IP optional RS232 standard, Ethernet TCP/IP optional
Max RS232 Baud Rate 115.2 KBaud 115.2 KBaud
Automatic Crystal Switch Yes Yes
Number of Relays 12, Not Event Assignable 12, Event Assignable
Number of Programmable Relay Functions 1 1
Functions per Relay 1 1
Relay Voltage Rating 30VDC or 30VAC RMS or 42V peak at 2.5 Amps 30VDC or 30VAC RMS or 42V peak at 2.5 Amps
Number of Inputs 8 TTL, 24VDC Max 8 TTL, 24VDC Max
Number of Programmable Input Functions 1, Not Event Assignable 1, Event Assignable
Number of Recorder Outputs 1 1
Manual Power / Hand Held Controller Yes Yes
Exhaust Fan No Exhaust Fan No Exhaust Fan
Test Mode Yes Yes
Shutter Delay Yes Yes
Secondary Tooling Yes Yes
Case Dimensions half rack, 2U high half rack, 2U high
Rate and Thickness Display Resolution 0.1 A/s for 0.0 to 99.9 A/s, 1 A/s for 100 to 999 A/s, display thickness resolution = 1 A 0.1 A/s for 0.0 to 99.9 A/s, 1 A/s for 100 to 999 A/s, display thickness resolution = 1 A
Film Select via Inputs Yes No
User Guide Languages English, Chinese English, Chinese
Control Loops PID PID
Software to Operate from PC Yes Yes
Datalogging Yes Yes
Quality and Stability Function Yes Yes
Sample and Hold (RateWatcher™) Yes Yes
Crucible Selection Yes Yes
Crucible Feedback Input Yes Yes
Select Control Voltage Polarity Yes, +/- 2.5, 5, 10 Volts; 15-bit Resolution Yes, +/- 2.5, 5, 10 Volts; 15-bit Resolution
Program Lock Code Yes Yes
Display with Graphics Yes Yes
User Labeled Processes (cell phone style alphanumeric entry) No No
User Labeled Films (cell phone style alphanumeric entry) No No
Transfer Sensor Control Yes Yes
XTC/2 RS232 Communications Compatibility Yes (limited) Yes (limited)

(1) Tooling/density = 100/1, fundamental frequency = 6 MHz

Part Number

XTC3M-S_OrderChart_2013_web-01.png

Accessories

Name Description
Front Load Single Sensor Front Load Single Sensor
Front Load Dual Sensor Front Load Dual Sensor
Cool Drawer Single Sensor Cool Drawer Single Sensor
Cool Drawer Dual Sensor Cool Drawer Dual Sensor
UHV Bakeable Sensor UHV Bakeable Sensor
Sputtering Sensor Sputtering Sensor
CrystalSix® Sensor CrystalSix® Sensor
Crystal 12® Sensor Crystal 12® Sensor
RSH-600 Rotary Sensor RSH-600 Rotary Sensor
Part Number Description
780-700-G1 Ethernet Computer Communications Module
755-262-G1 Handheld Power Controller (for manual power control)
780-702-G1 One unit rack mount kit - Provides all required materials to mount one XTC/3 unit in a standard 19 in. rack
780-702-G2 Two unit rack mount kit - Provides all required materials to mount two XTC/3 units side by side in a standard 19 in. rack
780-032-G1 XTC/3M or XTC/3S Editor / Monitor Software, on CD
780-038-G1 XTC/3M or XTC/3S Communications Library (DLL) on CD
779-220-G1 CrystalTwo® Switch, 15.2 cm (6 in.) BNC Cables
779-220-G2 CrystalTwo® Switch, 50.8 cm (20 in.) BNC Cables
Oscillator kits (Includes oscillator and cables)
781-611-G15 XIU PKG with 4.6 m (15 ft.) cable - For use with Cygnus 2, IC6, or XTC/3
781-611-G30 XIU PKG with 9.1 m (30 ft.) cable - For use with Cygnus 2, IC6, or XTC/3
781-611-G50 XIU PKG with 15.2 m (50 ft.) cable - For use with Cygnus 2, IC6, or XTC/3
781-611-G100 XIU PKG with 30.5 m (100 ft.) cable - For use with Cygnus 2, IC6, or XTC/3
781-612-G15 4m XIU PKG with 4.6 m (15 ft.) XIU cable - Includes 4 m in-vacuum cable and 6 in. BNC (XIU to feedthrough) cable - For use with Cygnus 2, IC6, or XTC/3
781-612-G30 4m XIU PKG with 9.1 m (30 ft.) XIU cable - Includes 4 m in-vacuum cable and 6 in. BNC (XIU to feedthrough) cable - For use with Cygnus 2, IC6, or XTC/3
781-612-G50 4 m XIU PKG with 15.2 m (50 ft.) XIU cable - Includes 4 m in-vacuum cable and 6 in. BNC (XIU to feedthrough) cable - For use with Cygnus 2, IC6, or XTC/3
781-612-G100 4m XIU with 30.5 m (100 ft.) XIU cable - Includes 4 m in-vacuum cable and 6 in. BNC (XIU to feedthrough) cable - For use with Cygnus 2, IC6, or XTC/3
781-613-G15 4m XIU PKG with 4.6 m (15 ft.) XIU cable - Includes 3.5 m in-vacuum cable and 20 in. BNC (XIU to feedthrough) cable - For use with Cygnus 2, IC6, or XTC/3
781-613-G30 4m XIU PKG with 9.1 m (30 ft.) XIU cable - Includes 3.5 m in-vacuum cable and 20 in. BNC (XIU to feedthough) cable - For use with Cygnus 2, IC6, or XTC/3
781-613-G50 4m XIU PKG with 15.2 m (50 ft.) XIU cable - Includes 3.5 m in-vacuum cable and 20 in. BNC (XIU to feedthrough) cable - For use with Cygnus 2, IC6, or XTC/3
781-613-G100 4m XIU PKG with 30.5 m (100 ft.) XIU cable - Includes 3.5 m in-vacuum cable and 20 in. BNC (XIU to feedthrough) cable - For use with Cygnus 2, IC6, or XTC/3
Oscillator Only (No cables included)
781-600-G1 XIU (oscillator) - For XIU to sensor head cable lengths of 15 to 183 cm (6 to 72 in.) - For use with Cygnus 2, IC6, or XTC/3
781-600-G2 XIU (oscillator) - for XIU to sensor head cable lengths of 3 to 4 m (118 to 157 in.) - For use with Cygnus 2 or IC6
Cables
755-257-G6 15.2 cm (6 in.) BNC cable, XIU to vacuum feedthrough
600-1261-P15 4.6 m (15 ft.) cable, Cgynus 2, IC6 or XTC/3 controller to XIU
600-1261-P30 9.1 m (30 ft.) cable, Cygnus 2, IC6 or XTC/3 controller to XIU
600-1261-P50 15.2 m (50 ft.) cable, Cygnus 2, IC6 or XTC/3 controller to XIU
600-1261-P100 30.5 (100 ft.) cable, Cygnus 2, IC6 or XTC/3 controller to XIU

Consumables

Name Description
Quartz Monitor Crystals Quartz Monitor Crystals
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