Transpector® XPR3 Gas Analysis System

 

PVD Process Monitoring Without Complex Pressure Conversion


RGA process monitoring with Transpector XPR3 can provide you with real-time data on contamination levels, outgassing levels, gas purity and equipment operation. This information can be used to maximize throughput and yield, reduce waste by detecting and diagnosing problems, and increase tool uptime by making preventive maintenance programs more efficient and effective.

Transpector XPR3 is the next generation in high-pressure, quadrupole-based process gas analysis. It builds on the success of previous INFICON systems to allow monitoring of physical vapor deposition (PVD) processes with unprecedented sensitivity, accuracy, and flexibility. A series of technological breakthroughs allow the compact Transpector XPR3 to operate from 20 mTorr to ultrahigh vacuum without the need for large, complex pressure conversion equipment.

Features

  • Redesigned ion source minimizes contamination buildup for extended life and provides cleaner signals.
  • New EM works at PVD process pressures, providing faster, cleaner data collection and eliminating FC to EM transitions for easier interpretation of data.
  • New longer quadrupole permits improved filtering at the low mass range and improved abundance sensitivity, for better hydrogen detection sensitivity.

Typical Applications

  • PVD process modules
  • Preclean modules
  • Non-cluster PVD tools
  • Clamped degas modules

Accessories

Transpector XPR
Part Number Description
074-5007-G1 Gas Analysis Product Manuals CD
600-1001-P15 15 ft. (4.6 m) male/female RS-232 cable
600-1001-P30 RS232 Cable 30 ft. (Single Sensor Communication)
600-1008-P15 Power Supply Extension Cable 15 ft. (4.5m)
600-1008-P30 Power Supply Extension Cable 30 ft. (9m)
600-1193-G3 XPR, XPR2, XPR3 or Preclude Interlock Cable with valve control option
911-039-G1 Power Supply: 80-250 VAC / 4 ft. (1.2m) standard cable (standard plug)
911-039-G2 Power Supply: 80-250 VAC / 4 ft. (1.2m) standard cable (German plug)
911-040-G15 RS485 cable set 15 ft. (4.5M) (Multi Sensor Operation)
911-040-G30 RS485 Cable Set 30 ft. (9 M) (Multi Sensor Operation)
911-451-P1 USB to RS-232 converter
914-024-G1 Angle Valve Kit, Manual (includes heater)
914-025-G1 Angle Valve Kit, Air Operated, 24 V(dc) (includes heater)

Spare Parts

Transpector XPR
Part Number Description
600-1109-P1 XPR, XPR2, XPR3 or Preclude Interlock Cable
600-1117-P1 Spare Heater Power Cable 120 VAC
600-1117-P2 Spare Heater Power Cable 230 VAC
914-022-G2 XPR, XPR2, and XPR3 Filament Kit, Yttria filament
914-220-G1 Spare Angle Valve, Air Operated
914-348-P1 Ceramic Shield (XPR and XPR2 only)
914-407-P1 Spare Valve Heating Jacket (required heater power cable if stand alone)
914-410-P1 Spare Angle Valve, Manual
918-401-P1 Pirani Sensor for XPR, XPR2, XPR3 or Preclude Interlock
Transpector XPR2
Part Number Description
600-1109-P1 XPR, XPR2, XPR3 or Preclude Interlock Cable
600-1117-P1 Spare Heater Power Cable 120 VAC
600-1117-P2 Spare Heater Power Cable 230 VAC
914-022-G2 XPR, XPR2, and XPR3 Filament Kit, Yttria filament
914-220-G1 Spare Angle Valve, Air Operated
914-348-P1 Ceramic Shield (XPR and XPR2 only)
914-407-P1 Spare Valve Heating Jacket (required heater power cable if stand alone)
914-410-P1 Spare Angle Valve, Manual
918-401-P1 Pirani Sensor for XPR, XPR2, XPR3 or Preclude Interlock
Transpector XPR3
Part Number Description
600-1109-P1 XPR, XPR2, XPR3 or Preclude Interlock Cable
600-1117-P1 Spare Heater Power Cable 120 VAC
600-1117-P2 Spare Heater Power Cable 230 VAC
914-022-G2 XPR, XPR2, and XPR3 Filament Kit, Yttria filament
914-220-G1 Spare Angle Valve, Air Operated
914-407-P1 Spare Valve Heating Jacket (required heater power cable if stand alone)
914-410-P1 Spare Angle Valve, Manual
914-415-P1 XPR3 Heating Jacket 120/230 V(ac) (requires heater power cable)
914-416-G1 XPR3 Weldment Assembly for Interlock
918-401-P1 Pirani Sensor for XPR, XPR2, XPR3 or Preclude Interlock
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