Stripe™ CDG100Dhs 0.1 ... 1000Torr / mbar

 

INFICON Stripe high-speed Capacitance Diaphragm Gauges are the fastest, highly accurate vacuum measurement instruments available. With a less than 2 ms response time combined with the EtherCAT fieldbus interface it opens up a total new field of applications. The proven temperature controlled, corrosion resistant, ultra-pure ceramic sensor provides superior span stability over many years paired with state-of-the-art zero stability. Stripe comes with the INFICON patented unique sensor shield which protects the gauge from undesired process by-products. INFICON Stripe using an innovative heating concept, which provides a cool to the touch surface, and its unique speed capabilities,enabling an unprecedented productivity increase, making it the most advanced vacuum instrument of its kind.

Benefits

  • High productivity – Faster than 2 ms response time
  • Flexible integration – EtherCAT fieldbus
  • Long lifetime – Proven ceramic sensor
  • Forget recalibration – 90ppm/year full scale stability

Typical Applications

  • Atomic layer deposition
  • High speed process control
  • PVD, CVD, Etch
  • General high temperature vacuum applications
  • Stripe_MB.gif

Specifications

Type 1000 ... 500 Torr / mbar 200 ... 1 Torr / mbar 0.5 ... 0.1 Torr / mbar
Accuracy (1) % of reading 0.2 0.2 0.4
Temperature effect      
on zero percent FS/°C 0.0025 0.0025 0.005
on span % of reading / °C 0.02 0.02 0.02
Pressure, max. kPa (absolute) 400 260 130
Resolution percent FS 0.003 0.003 0.003
Lowest reading percent FS 0.01 0.01 0.01
Lowest suggested reading percent FS 0.05 0.05 0.05
Lowest suggested control pressure percent FS 0.5 0.5 0.5
Temperature      
Operation (ambient) °C +10 … +50 +10 … +50 +10 … +50
Bakeout at flange °C ≤110 ≤110 ≤110
Storage °C –20 … +85 –20 … +85 –20 … +85
Supply voltage +14 … +30 VDC or ±15 V (±5%) +14 … +30 VDC or ±15 V (±5%) +14 … +30 VDC or ±15 V (±5%)
Power consumption      
During Heat up W ≤16 ≤16 ≤16
At operating temperature W ≤11 ≤11 ≤11
Output signal (analog) V (dc) 0 … +10 0 … +10 0 … +10
Response time (2) ms 2 2 2
Degree of protection IP 30 IP 30 IP 30
Standards      
CE conformity EN 61000‑6‑2/-6-3, EN 61010 & RoHS EN 61000‑6‑2/-6-3, EN 61010 & RoHS EN 61000‑6‑2/-6-3, EN 61010 & RoHS
ETL certification UL 61010‑1, CSA 22.2 No.61010‑1 UL 61010‑1, CSA 22.2 No.61010‑1 UL 61010‑1, CSA 22.2 No.61010‑1
SEMI compliance SEMI S2 SEMI S2 SEMI S2
Electrical connection D-sub, 15 pole, male D-sub, 15 pole, male D-sub, 15 pole, male
Setpoint      
Number of setpoints 2 (SP1,SP2) 2 (SP1,SP2) 2 (SP1,SP2)
Relay contact ≤30 ≤30 ≤30
Hysteresis percent FS 1 1 1
Diagnostic port      
Protocol USB USB USB
Read pressure, status, ID pressure, status, ID pressure, status, ID
Set set points, filter, zero adjust, factory reset, DC offset set points, filter, zero adjust, factory reset, DC offset set points, filter, zero adjust, factory reset, DC offset
Materials exposed to vacuum Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4)) Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4)) Aluminum oxide ceramic (AI2O3), stainless steel (AISI 316L (4))
Internal volume      
I. volume 1/2'' tube cm³ (in.³) 4.2 (0.26) 4.2 (0.26) 4.2 (0.26)
I. volume DN 16 ISO KF cm³ (in.³) 4.2 (0.26) 4.2 (0.26) 4.2 (0.26)
I. volume DN 16 CF-R cm³ (in.³) 4.2 (0.26) 4.2 (0.26) 4.2 (0.26)
I. volume 8 VCR® cm³ (in.³) 4.2 (0.26) 4.2 (0.26) 4.2 (0.26)
Weight      
Weight 1/2'' tube g 837 837 837
Weight DN 16 ISO KF g 852 852 852
Weight DN 16 CF-R g 875 875 875
Weight 8 VCR® g 897 897 897
   
EtherCAT      
Protocol EtherCAT protocol specialized for EtherCAT protocol specialized for EtherCAT protocol specialized for EtherCAT
Communication standards ETG.5003 Part 1 "Semiconductor Device Profile" ETG.5003 Part 2080 "Specific Device Profile: Vacuum Pressure Gauge" ETG.5003 Part 1 "Semiconductor Device Profile" ETG.5003 Part 2080 "Specific Device Profile: Vacuum Pressure Gauge" ETG.5003 Part 1 "Semiconductor Device Profile" ETG.5003 Part 2080 "Specific Device Profile: Vacuum Pressure Gauge"
Node address Explicit Device Identification Explicit Device Identification Explicit Device Identification
Physical layer 100BASE-Tx (IEEE 802.3) 100BASE-Tx (IEEE 802.3) 100BASE-Tx (IEEE 802.3)
Digital functions read pressure, status, ID pressure, status, ID pressure, status, ID
Digital functions set set points, filter, zero adjust, reset, DC offset set points, filter, zero adjust, reset, DC offset set points, filter, zero adjust, reset, DC offset
Process data Fixed PDO mapping and configurable PDO mapping Fixed PDO mapping and configurable PDO mapping Fixed PDO mapping and configurable PDO mapping
Mailbox (CoE) SDO requests, responses and information SDO requests, responses and information SDO requests, responses and information
EtherCAT connector RJ45, 8-pin (socket), IN and OUT RJ45, 8-pin (socket), IN and OUT RJ45, 8-pin (socket), IN and OUT
Cable shielded Ethernet CAT5e or higher shielded Ethernet CAT5e or higher shielded Ethernet CAT5e or higher
Cable length m (ft.) ≤100 (330) ≤100 (330) ≤100 (330)

(1) Non-linearity, hysteresis, repeatability at 25 °C ambient operating temperature without temperature effects after 2 hours operation.

(2) Increase 10 … 90 percent FS  

Part Number

Stripe100_PN.png
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