Sputtering Sensor

The INFICON Sputtering Sensor is specifically designed for use in any sputtering process. The sensor body and cooling tubes are gold plated beryllium copper for maximum cooling efficiency in the sputtering environment. A magnet built into the sensor head reduces excessive heating by energetic free electrons in sputtering systems by deflecting them with the external magnetic field. The rear loading crystal holder design allows easy crystal replacement without having to remove the sensor head from the system.

Features

  • Gold plated beryllium copper sensor body and cooling tubes for maximum cooling efficiency
  • Magnet to deflect free electrons away from the monitor crystal
  • Easy installation with bendable water tubes allowing flexibility in sensor placement
  • Rear load crystal insertion for easy crystal replacement

Specifications

Type Sputtering Sensor
Maximum bakeout temp with no water 105°C
Maximum operating isothermal environment temperature with minimum water flow 400° C
Size (maximum envelope) 1.36 in. OD x 0.69 in. high (3.45 cm x 1.75 cm)
Water, air and coax length Standard 30 in. (76.2 cm)
Crystal exchange Rear-loading
Mounting Customer supplied
Installation Requirements  
Feedthrough

2 pass water with coax connector

2¾ in. ConFlat® Flange – IPN 002-043

1 in. Bolt – IPN 002-042

 

Other

1) Customer to provide vacuum-tight braze joints or connectors for the water tubes.

2) XIU or Oscillator designed to interface with the specific deposition controller.

Water flow rate Minimum water flow 750 cc/min, 30° C max (Do not allow to freeze) Coolant should not contain chlorides as stress corrosion cracking may occur. If the water tube passes through a cryoshroud, drain the tubes if the water flow is stopped for any reason.
Materials  
Body and holder Au plated Be-Cu
Springs, electrical contacts Au plated Be-Cu
Water tubes Au plated Be-Cu, 0.125 in. (0.32 cm) O.D.
Connector 304 Stainless steel
Insulators 99% Al2O3
Wire Teflon® insulated copper
Solder Cadmium free silver and indium alloys
Crystal 0.550 in. (1.4 cm) Diameter
Magnet ALNICO 5 Alloy
Optional Shutter Assembly 750-005-G1 Specifications:  
Temperature 130° C
1 in. bolt and Ultra-Torr (compression fitting) terminations:  
Materials 304 stainless steel, Teflon, ceramic, beryllium nickel, VITON®
Temperature Operational environment to 300ºC with water cooling or 165ºC without
Mounting 1.015 in. ±0.010 in. diameter aperture
CF 40 welded terminations:  
Materials 304 stainless steel, Teflon, ceramic, beryllium nickel
Temperature Operational environment to 450ºC with water cooling or 165ºC without
Mounting Mates with 2 ¾ in. ConFlat type flanges with 1.375 in. I.D. min.

Part Number

Sputtering Sensor
Part Number Description
750-618-G1 Sputtering Sensor (sensor only, feedthrough not included)

Accessories

Name Description
QCM Sensor Feedthroughs QCM Sensor Feedthroughs
Sputtering Sensor
Part Number Description
750-005-G1 Pneumatic shutter assembly for Sputtering sensor (shutter assembly only, sensor not included)
750-420-G1 Solenoid Valve, 24V (for use with shuttered and multi-crystal sensors)

Consumables

Name Description
Quartz Monitor Crystals Quartz Monitor Crystals

Spare Parts

Sputtering Sensor
Part Number Description
007-023 Ceramic Retainer
007-049 Crystal Holder, Sputtering Sensor
007-007 Retainer spring (for crystal holder)
007-047 Sputtering head cover with water lines
007-009 Magnet for sputtering head cover
070-0440 Retaining ring (installs onto shaft of shutter assembly)
070-0442 Retaining ring (installs onto shaft of shutter assembly)
070-0441 Spacer (installs onto shaft of shutter assembly)
082-044 Teflon screw (for leaf spring)
082-029-P1 2-56 x 1/8 in. set screw for 750-619-G1 sputtering head body
750-009-P2 Pivot cover (installs onto shaft of shutter assembly)
750-046-G2 Shutter assembly for pneumatic shutter assembly
750-048-P1 Retainer spring for 007-048 and 751-619-G1 sputtering head bodies
750-115-P4 Coupling (installs onto bellows assembly)
750-169-P4 Bellows assembly for pneumatic shutter assembly
750-174-P2 Female coax
750-175-P1 Insulator (underneath leaf spring)
750-188-P3 Leaf Spring
008-007 CRYSTAL SNATCHER
750-619-G1 Sputtering head body with coax connector
750-626-P1 Spring for sputtering head cover
In-vacuum cables
321-039-G12 In-vacuum cable, 15.2 cm (6 in.)
007-252 In-vacuum cable, 30.5 cm (12 in.)
321-039-G11 In-vacuum cable, 61.0 cm (24 in.)
007-044 In-vacuum cable, 78.1 cm (30.75 in.)
007-059 In-vacuum cable, 91.4 cm (36 in.)
007-061 In-vacuum cable, 121.9 cm (48 in.) - Requires ModeLock controller
321-039-G13 In-Vacuum Cable, 154.2 cm (60 in.) - Requires ModeLock controller
321-039-G14 In-vacuum cable, 182.9 cm (72 in.) - Requires ModeLock controller
321-039-G15 In-vacuum cable, 3.5 m (137.8 in.) - Requires ModeLock controller and 4 m XIU
321-039-G16 In-vacuum cable, 4 m (157.5 in.) - Requires ModeLock controller and 4 m XIU
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