STM-2XM 2-Channel Rate/Thickness Monitor

SIMPLE OPERATION FOR MANY APPLICATIONS

STM-2XM is a two channel rate/thickness monitor that combines high accuracy with flexible programming and easy operation at an affordable price.

STM-2XM is equipped with five operation modes to accommodate processes from simple to complex.  For example, use simple mode to monitor just one single sensor for the simplest process or use alloy mode for codeposition monitoring. Independent mode allows STM-2XM to function as two completely separate monitors.

Two sensor inputs allow for the use of two single or one dual quartz crystal sensor. 10 measurements are taken per second while achieving a resolution of 0.037 Å per measurement (density of 1).

FEATURE PACKED

STM-2XM has eight programmable digital inputs, eight programmable digital outputs, and four analog outputs allowing for a level of integration usually reserved for more expensive instruments.

Programmable features include shutter delay, time/power monitoring, and rate sampling. Use all of these features to achieve the most accurate readings and the longest crystal life.

Operate and monitor STM-2XM either through the simple front panel interface or through the included LabVIEW® software. This simple software is fully functional and easy to use.

EASY TO USE

STM-2XM features a high contrast LCD display and intuitive menu system. On-screen hints can be found throughout the menus for simple, guided programming and operation. The easy-to-read LCD can display in accumulated mass or thickness.

Features

  • Two measurement channels
  • Four analog outputs for rate, rate deviation, or thickness
  • Eight programmable digital inputs
  • Eight programmable digital outputs
  • High accuracy at 10 readings per second
  • Displays mass or thickness
  • Codeposition monitoring capabilities

Typical Applications

  • Single/dual sensor monitoring
  • Codeposition monitoring

Specifications

Type STM-2XM
Compatible sensors Single/shuttered single or dual QCM sensor
Sensor inputs Two
Measurement frequency range 6.0 to 5.0 MHz (fixed)
Frequency resolution ±0.03 MHz at 6 MHz
Reference frequency stability ±2 ppm
Thickness and rate resolution/measurement ±0.037 Å @ tooling/density = 100/1, fundamental frequency = 6 MHz
Measurement interval 0.10 s
Stored films 15
Display mode Thickness/Mass
Digital inputs Eight
Digital outputs Eight
Analog outputs Four
Analog output rating 0 to +/-10 V, 10 mA
Relay rating Up to 48 V (dc) • V (ac), 2A
Power requirement 120/240, 50/60 Hz, 2.5 VA

Part Number

STM-2XM
Part Number Description
STM-2XM-G1 STM-2XM Monitor, US power cord
STM-2XM-G2 STM-2XM Monitor, European power cord

Accessories

Name Description
Front Load Single Sensor Front Load Single Sensor
Front Load Dual Sensor Front Load Dual Sensor
Cool Drawer Single Sensor Cool Drawer Single Sensor
Cool Drawer Dual Sensor Cool Drawer Dual Sensor
UHV Bakeable Sensor UHV Bakeable Sensor
ALD Sensor ALD Sensor
Sputtering Sensor Sputtering Sensor
Part Number Description
783-014-008 Rack mount kit - Mounts one STM-2XM instrument in a 48.3 cm (19 in.) rack
783-014-009 Dual rack mount kit - Mounts two STM-2XM instruments in a 48.3 cm (19 in.) rack
Oscillator kits (Includes oscillator and cables)
783-500-109-10 3 m (10 ft.) Oscillator Kit - includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 3 m (10 ft.) BNC cable
783-500-109-25 7.6 m (25 ft.) Oscillator Kit - includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 7.6 m (25 ft.) BNC cable
783-500-109-50 15.2 m (50 ft.) Oscillator Kit - includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 15.2 m (50 ft.) BNC cable
783-500-109-75 22.8 m (75 ft.) Oscillator Kit - includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 22.8 m (75 ft.) BNC cable
Oscillator Only (No cables included)
783-500-013 OSC-100 oscillator only (no cables)
Cables
782-902-011 15.2 cm (6 in.) BNC cable, male/female
782-902-012-10 3 m (10 ft.) BNC cable, male/male
782-902-012-25 7.6 m (25 ft.) BNC cable, male/male
782-902-012-50 15.2 m (50 ft.) BNC cable, male/male
782-902-012-75 22.8 m (75 ft.) BNC cable, male/male

Consumables

Name Description
Quartz Monitor Crystals Quartz Monitor Crystals
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