SQM-160 Thin Film Deposition Monitor

The SQM-160 uses proven INFICON quartz crystal sensor technology to measure rate and thickness in thin film deposition processes. Two sensor inputs are standard and four additional sensor inputs are optional. Two recorder outputs provide analog rate and thickness signals.

Sensor inputs can be assigned to different materials, averaged for accurate deposition control in large systems, or configured for a dual sensor. The rate sampling mode allows a shuttered sensor to extend sensor life in high rate processes. Rate displays of 0.1Å/s or 0.01Å/s are user selectable. In addition, Frequency or Mass displays can be selected. Four relay outputs allow the SQM-160 to control source or sensor shutters, signal time and thickness setpoints, and signal crystal failure. Digital inputs allow external signals to start/stop and zero readings.

Features

  • Two measurement channels standard, an additional four optional
  • Analog outputs for rate/thickness recording
  • High resolution option: 0.03Hz at 10 readings/sec
  • RS-232 standard, USB or Ethernet optional

Specifications

Type SQM-160 Standard Resolution SQM-160 High Resolution
QCM Sensor Inputs Standard: 2; optional: 4 Standard: 2; optional: 4
Measurement Frequency Range Adjustable:
1.0 MHz minimum
6.5 MHz maximum
Adjustable:
1.0 MHz minimum
6.5 MHz maximum
Frequency Resolution (1) ± 0.30 Hz ± 0.03 Hz
Thickness and rate resolution/measurement (2) ± 0.37 Å ± 0.037 Å
Measurement Interval 0.10 to 2.0 s (adjustable) 0.10 to 2.0 s (adjustable)
Measurement Filter 1 to 20 readings 1 to 20 readings
Stored Films 99 99
Analog Outputs Two 0 to 5 VDC, rate & thickness Two 0 to 5 VDC, rate & thickness
Digital Inputs/Outputs Four inputs, four relay outputs Four inputs, four relay outputs
Communications Interface

Standard: RS-232;

Optional: USB or Ethernet

Standard: RS-232;

Optional: USB or Ethernet

Power 100-120/200-240 VAC, 50/60 Hz, 20 W 100-120/200-240 VAC, 50/60 Hz, 20 W
CE Compliance

Class 1 equipment,

73/72/EEC LVD, 89/336/EEC ECD

Class 1 equipment,

73/72/EEC LVD, 89/336/EEC ECD

Housing/Mounting

1/2-rack cabinet, 3-1/2" high,

89 x 213 x 197mm (3-1/2" x 8-1/2" x 7-3/4")

1/2-rack cabinet, 3-1/2" high,

89 x 213 x 197mm (3-1/2" x 8-1/2" x 7-3/4")

Weight 2.7 Kg (6 lbs) 2.7 Kg (6 lbs)
Windows Software (included)

Provides remote setup and operation,

datalogging functions - see sample

screenshot at right.

Provides remote setup and operation,

datalogging functions - see sample

screenshot at right.

(1) Resolution given for 0.10 s measurement interval
(2)Tooling/density = 100/1, fundamental frequency = 6 MHz, 0.10 s measurement interval

Part Number

SQM-160_OrderChart_2013_web-01.png

Accessories

Name Description
Front Load Single Sensor Front Load Single Sensor
Front Load Dual Sensor Front Load Dual Sensor
Cool Drawer Single Sensor Cool Drawer Single Sensor
Cool Drawer Dual Sensor Cool Drawer Dual Sensor
UHV Bakeable Sensor UHV Bakeable Sensor
Sputtering Sensor Sputtering Sensor
Part Number Description
782-900-008 19 in. Rack Mount kit for one SQM-160 or CI-100 instrument
782-900-014 19 in. Rack Mount Kit for two SQM-160 or CI-100 instruments
782-502-096-G1 USB option card
782-502-097-G1 Ethernet option card
Oscillator kits (Includes oscillator and cables)
783-500-109-10 3 m (10 ft.) Oscillator Kit - includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 3 m (10 ft.) BNC cable
783-500-109-25 7.6 m (25 ft.) Oscillator Kit - includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 7.6 m (25 ft.) BNC cable
783-500-109-50 15.2 m (50 ft.) Oscillator Kit - includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 15.2 m (50 ft.) BNC cable
783-500-109-75 22.8 m (75 ft.) Oscillator Kit - includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 22.8 m (75 ft.) BNC cable
Oscillator Only (No cables included)
783-500-013 OSC-100 oscillator only (no cables)
Cables
782-902-011 15.2 cm (6 in.) BNC cable, male/female
782-902-012-10 3 m (10 ft.) BNC cable, male/male
782-902-012-25 7.6 m (25 ft.) BNC cable, male/male
782-902-012-50 15.2 m (50 ft.) BNC cable, male/male
782-902-012-75 22.8 m (75 ft.) BNC cable, male/male

Consumables

Name Description
Quartz Monitor Crystals Quartz Monitor Crystals
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