SQC-310 Thin Film Deposition Controller

Highly Accurate Sequential or Codeposition Control

With advanced electronics, an improved display, and a very affordable price, the INFICON SQC-310 Series gives you features not found on competitors' thin film controllers. And you can choose the ideal model for your application: sequential deposition (SQC-310) or codeposition (SQC-310C).

 

Features

  • Bright, color LCD display - available in English or Chinese
  • Standard RS-232 and USB (RS-232 and Ethernet optional)
  • Easy setup and operation with a "Quick Setup" Menu, 6 context-sensitive push buttons, and convenient parameter setting knob
  • Windows® program for developing, testing, and downloading processes, and for logging instrument data to your PC for process analysis and quality control
  • Accurate process control, especially for low deposition rates, with ±0.03 Hz resolution at 10 readings/second
  • Storage capacity for up to 100 processes, 1,000 layers, 50 films
  • Monitoring of source material with a single sensor or with multiple sensors to provide accurate source distribution monitoring

Specifications

Type SQC-310 SQC-310C
Measurement    
QCM Inputs 2 (4 optional) 4
Measurement Frequency Range Adjustable:
1.0 MHz minimum
6.5 MHz maximum
Adjustable:
1.0 MHz minimum
6.5 MHz maximum
Frequency Resolution (1) ± 0.012 Hz ± 0.012 Hz
Thickness and rate resolution/measurement (2) ±0.015 Å ±0.015 Å
Frequency Stability ± 2 ppm total, 0 to 50C ± 2 ppm total, 0 to 50C
Measurement Interval 0.10 to 1.0 s (adjustable) 0.10 to 1.0 s (adjustable)
Rate Display 0.01 Å/sec 0.01 Å/sec
Control    
Storage 100 processes, 1000 layers, 50 films 100 processes, 1000 layers, 50 films
Control Outputs 2 (4 optional) 4
Output Signal ± 0 to 10 VDC, 15 bits ± 0 to 10 VDC, 15 bits
Digital Inputs/Relays 8/8 (16/16 optional) 16/16
Digital Inputs 5 VDC non-isolated 5 VDC non-isolated
Relays SPST Form 1A, 30V, 2A max SPST Form 1A, 30V, 2A max
Interface(s) Standard RS-232 and USB (RS-232 and Ethernet optional) Standard RS-232 and USB (RS-232 and Ethernet optional)
Remote Power Control Optional (IPN 782-900-017) Optional (IPN 782-900-017)
Display    
Type 1/4 VGA 320 x 240 active matrix color LCD 1/4 VGA 320 x 240 active matrix color LCD
Graphs Rate, deviation, power or full screen numeric Rate, deviation, power or full screen numeric
General    
Power 100-240 VAC, 50/60 Hz, 25W 100-240 VAC, 50/60 Hz, 25 W
Compliance CE, RoHS CE, RoHS
Windows® Software Included Included
Housing / Mounting 5 1/4” half-rack 5 1/4” half-rack
(1) Resolution given for 0.25 s measurement interval
(2)Tooling/density = 100/1, fundamental frequency = 6 MHz, 0.25 s measurement interval

Part Number

SQC-310-C_OrderChart_2013_web-01.png

Accessories

Name Description
Front Load Single Sensor Front Load Single Sensor
Front Load Dual Sensor Front Load Dual Sensor
Cool Drawer Single Sensor Cool Drawer Single Sensor
Cool Drawer Dual Sensor Cool Drawer Dual Sensor
UHV Bakeable Sensor UHV Bakeable Sensor
Sputtering Sensor Sputtering Sensor
CrystalSix® Sensor CrystalSix® Sensor
Crystal 12® Sensor Crystal 12® Sensor
RSH-600 Rotary Sensor RSH-600 Rotary Sensor
Part Number Description
782-900-017 Handheld power control, 10 ft. (3 m) coiled cable
782-900-007 Full Rack Extender - Mounts one SQC-310 or Composer Elite in a 19 in. rack (includes blank-off)
782-900-016 Rack adapter - mounts two SQC-310 instruments in 19 in. rack
782-502-097-G1 Ethernet option card
782-502-096-G2 USB option card
Oscillator kits (Includes oscillator and cables)
783-500-109-10 3 m (10 ft.) Oscillator Kit - includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 3 m (10 ft.) BNC cable
783-500-109-25 7.6 m (25 ft.) Oscillator Kit - includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 7.6 m (25 ft.) BNC cable
783-500-109-50 15.2 m (50 ft.) Oscillator Kit - includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 15.2 m (50 ft.) BNC cable
783-500-109-75 22.8 m (75 ft.) Oscillator Kit - includes OSC-100 oscillator, 15.2 cm (6 in.) BNC cable, and 22.8 m (75 ft.) BNC cable
Oscillator Only (No cables included)
783-500-013 OSC-100 oscillator only (no cables)
Cables
782-902-011 15.2 cm (6 in.) BNC cable, male/female
782-902-012-10 3 m (10 ft.) BNC cable, male/male
782-902-012-25 7.6 m (25 ft.) BNC cable, male/male
782-902-012-50 15.2 m (50 ft.) BNC cable, male/male
782-902-012-75 22.8 m (75 ft.) BNC cable, male/male

Consumables

Name Description
Quartz Monitor Crystals Quartz Monitor Crystals
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