PSG5xx ATM to Medium Vacuum Gauge

The INFICON Pirani Standard Gauges, PSG500 and PSG502-S, PSG510-S and PSG512-S employ the most advanced digital Pirani technology available in the marketplace. The rugged stainless steel sensor cell and compact design qualifies them for use on semiconductor systems and for standard applications, such as fore vacuum lines.

 

The PSG500 / PSG502-S  Pirani Gauge series are direct replacements for TTR 91 S / TTR96 S series:

 

Part-NoTypPart-NoTyp
350-060PSG500DN 16 ISO-KF=230 035TTR 91DN 16 ISO-KF
350-061PSG5001/8" NPT=230 038TTR 911/8" NPT
350-062PSG500DN 16 CF-R=230 036TTR 91DN 16 CF-R
350-068PSG500DN 16 CF-R, long=230 037TTR 91DN 16 CF-R, long
350-080PSG500-SDN 16 ISO-KF=230 040TTR 91 SDN 16 ISO-KF
350-081PSG500-S1/8" NPT=230 043TTR 91 S1/8" NPT
350-088PSG500-SDN 16 CF-R, long=230 042TTR 91 SDN 16 CF-R, long
350-140PSG502-SDN 16 ISO-KF=230 045TTR 96 SDN 16 ISO-KF
350-148PSG502-SDN 16 CF-R, long=230 047TTR 96 SDN 16 CF-R, long
350-920PSG500Spare-Sensor DN 16 KF=230 050TTR 91Spare-Sensor DN16KF
350-921PSG500Spare-Sensor 1/8" NPT=230 053TTR 91Spare-Sensor 1/8" NPT
350-922PSG500Spare-Sensor DN 16 CF-R=230 051TTR 91Spare-Sensor DN16CF
350-928PSG500Spare-Sensor DN 16 CF-R, long =230 052TTR 91Spare-SensorDN 16 CF-R, long
350-900PSG502Spare-Sensor DN 16 KF=230 055TTR 96 S Spare-Sensor DN16KF
350-901PSG502Spare-Sensor 1/8" NPT=230 058TTR 96 S Spare-Sensor 1/8" NPT
350-902PSG502Spare-Sensor DN 16 CF-R=230 056TTR 96 S Spare-Sensor DN16CF

 

All known TTR 91 and TTR 96 spare sensor heads can be replaced with INFICON PSG500 and PSG502 spare sensor heads. They are 100 % interchangable.

Benefits

  • 1:1 compatible to TTR 91 and TTR 96 Pirani Transmitter Series
  • Easy push button ATM and HV adjustment
  • Space saving rugged design
  • Aluminum housing
  • Mounts in any orientation
  • Stainless steel measuring cell with metal-sealed feedthrough
  • Logarithmic signal output for easy integration
  • 10 bar absolute overpressure with threaded connections
  • 250 °C bakeable version
  • Nickel filament option for corrosive applications
  • Ceramic feedthrough for extremely corrosive applications (PSG510 & PSG512)
  • Optional setpoints
  • RoHS compliance

Typical Applications

  • Controlling high vacuum ionization gauges
  • Fore vacuum pressure monitoring
  • Safety circuits in vacuum systems
  • General vacuum measurement and control in the fine and rough vacuum range

News

PSG500 / PSG502 Gauge series is compatible with TTR 91/ TTR 96 Vacuum Transmitters
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Specifications

Type PSG500 tungsten PSG500-S tungsten, setpoints PSG502-S nickel, setpoints
Measuring principle thermal conductance according to Pirani thermal conductance according to Pirani thermal conductance according to Pirani
Accuracy(N2)      
1 x 10-3 … 100 mbar % of reading ±15% ±15% ±15%
5 x 10-4 … 1 x 10-3 mbar % of reading ±50% ±50% ±50%
100 … 1000 mbar % of reading ±50% ±50% ±50%
Repeatability (air)      
1 x 10-3 … 100 mbar % of reading 2% 2% 2%
Output signal (measurement signal)      
Voltage range V 0 … +10.3 0 … +10.3 0 … +10.3
Measurement range V +1.9 … +10.0 +1.9 … +10.0 +1.9 … +10.0
Measurement range (air, 02, CO, N2) mbar 5 x 10-4 to 1000 5 x 10-4 to 1000 5 x 10-4 to 1000
Setpoint      
Number of setpoints none 2 2
Setting range mbar 2 x 10-3 … 500 2 x 10-3 … 500
Hysteresis % of reading 10% above lower threshold 10% above lower threshold
Relay contact 30 30
Relay contact: Switching time ms <20 <20
Supply voltage      
At gauge V (dc) +14 …+30 +14 …+30 +14 …+30
Ripple V (p-p) ≤1 ≤1 ≤1
Voltage vs. pressure logarithmic 1.286 Volts per decade logarithmic 1.286 Volts per decade logarithmic 1.286 Volts per decade
Internal volume      
DN 16 ISO-KF, DN 16 CF-R, 7/16-20 UNF cm³ (in.³) 1.5 (0.092) 1.5 (0.092) 1.5 (0.092)
DN 16 ISO-KF & DN 16 CF-R long tube cm³ (in.³) 10 (0.61) 10 (0.61) 10 (0.61)
1/8'' NPT , 4 VCR, 8 VCR, 1/2'' tube cm³ (in.³) 2 (0.122) 2 (0.122) 2 (0.122)
Admissible temperature      
Operation °C +5 … +60 +5 … +60 +5 … +60
Vacuum connection (1) °C 80 / 250 (2) 80 / 250 (2) 80 / 250 (2)
Storage °C -20 … +65 -20 … +65 -20 … +65
Weight      
DN 16 ISO-KF, 7/16-20 UNF g 80 80 80
DN 16 CF-R, 4 VCR g 100 100 100
1/8'' NPT, 1/2'' tube g 70 70 70
8 VCR, DN 16 ISO-KF long tube g 130 130 130
DN 16 CF-R long tube g 140 140 140
Error signal V 0 … +0.5 (filament rupture) 0 … +0.5 (filament rupture) 0 … +0.5 (filament rupture)
Output impedance 2 x 4.7 2 x 4.7 2 x 4.7
Minimum loaded impedance kΩ 10, short-circuit proof 10, short-circuit proof 10, short-circuit proof
Response time ms 80 80 80
Gauge identification kΩ 27.0, referenced to supply common 27.0, referenced to supply common 27.0, referenced to supply common
Adjustment one tactile switch for ATM and HV adjustment one tactile switch for ATM and HV adjustment one tactile switch for ATM and HV adjustment
Current consumption mA <500 (max. starting current) <500 (max. starting current) <500 (max. starting current)
Power consumption W ≤1 ≤1 ≤1
Electrical connection FCC 68 / RJ45 appliance connector, 8 poles, male FCC 68 / RJ45 appliance connector, 8 poles, male FCC 68 / RJ45 appliance connector, 8 poles, male
Sensor cable 8 poles plus shielding 8 poles plus shielding 8 poles plus shielding
Cable length m ≤100 (8 x 0.14 mm2) ≤100 (8 x 0.14 mm2) ≤100 (8 x 0.14 mm2)
Materials exposed to vacuum glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435 glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435 glass, Ni, NiFe, DIN 1.4301 / 1.4305 / 1.4435
Filament W W Ni
Admissible pressure bar (absolute) 10, limited to inert gases 10, limited to inert gases 10, limited to inert gases
Mounting orientation any any any
Degree of protection IP40 IP40 IP40

(1) In horizontal mounting orientation

(2) Long tube

Part Number

PSG500 tungsten
Part Number Description
350-060 PSG500 DN 16 ISO-KF.
350-061 PSG500 1/8" NPT
350-062 PSG500 DN 16 CF-R
350-068 PSG500 DN 16 CF-R, ext. body
350-920 PSG500 Spare Sensor DN 16 KF
350-921 PSG500 Spare Sensor 1/8" NPT
350-922 PSG500 Spare Sensor DN 16 CF-R
350-928 PSG500 Spare Sensor DN 16 CF-R,ext.body
PSG500-S tungsten, setpoints
Part Number Description
350-080 PSG500-S DN 16 ISO-KF
350-081 PSG500-S 1/8" NPT
350-087 PSG500-S DN 16 ISO-KF, ext. body
350-920 PSG500 Spare Sensor DN 16 KF
350-921 PSG500 Spare Sensor 1/8" NPT
350-922 PSG500 Spare Sensor DN 16 CF-R
350-928 PSG500 Spare Sensor DN 16 CF-R,ext.body
PSG502-S nickel, setpoints
Part Number Description
350-140 PSG502-S DN 16 ISO-KF
350-148 PSG502-S DN 16 CF-R, ext. body
350-900 PSG502 Spare Sensor DN 16 KF
350-901 PSG502 Spare Sensor 1/8" NPT
350-902 PSG502 Spare Sensor DN 16 CF-R

Accessories

PSG500 tungsten
Part Number Description
211-001 Clamping ring DN 10-16 ISO-KF
PSG500-S tungsten, setpoints
Part Number Description
211-001 Clamping ring DN 10-16 ISO-KF
PSG502-S nickel, setpoints
Part Number Description
211-001 Clamping ring DN 10-16 ISO-KF
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