ADC100 DC Arc Detector

The ADC100 system connects to a DC power generator in order to detect plasma arcing in real time. This provides the ability to interrupt a wafer process and notify engineers of potential hardware or product damage.

Features

  • Software integration to the tool through FabGuard Sensor Integration and Analysis System
  • Data collection at 250 kHz per channel
  • Custom cables connect to most DC generators
  • Detects arcs quickly with pre-defined analysis tools
  • Endpoint detection capability
  • Worldwide application support
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