Gemini™ ATM to Ultra-High Vacuum Gauge

 

The INFICON Gemini™ Inverted Magnetron Vacuum Gauge is the workhorse for all vacuum measurement applications (pending). Gemini combines two sensor systems into one small device to measure from atmosphere to 1x10 – 9 mbar. The patented ultra-low magnetic stray field design opens up a whole new range of applications. A unique interchangeable dual chamber sensor unit avoids cleaning cycles and reduces maintenance, making Gemini the most robust and economical vacuum gauge of its kind.

Gemini Cold Cathode and combination comes with fully integrated digital electronics, providing ultimate flexibility for system integration. Cold cathode and Pirani combination option provides seamless transition, reliability, practicality and flexibility across wide ranging applications.

Benefits

  • Long lifetime in harsh environments

  • Low magnetic stray field
  • Zero maintenance - replaceable insert
  • Super compact size
  • Reliable fast ignition
  • Corrosion proof feed through
  • Selectable measuring current

Typical Applications

  • Base pressure monitoring and control, from atmosphere to high vacuum in evaporation and sputter coating applications.
  • General vacuum measurement – industrial furnaces, architectural glass, semiconductor, refrigeration and air conditioning.
  • Analytical and R&D applications – mass spectrometry, electron microscopes, medical, ophthalmic, optical and high energy physics.

News

NEW generation of cold cathode/ cold cathode-pirani combination gauges is ready for order now !

  • MxG50x dimensions

Specifications

Type MAG50x MPG50x
Measurement system Cold cathode ionization measurement system (according to the inverted magnetron principle) Pirani and cold cathode ionization measurement system (according to the inverted magnetron principle)
Measurement range (air, N2) 1×10-9 … 1×10-2 1×10-9 … 1000
Accuracy (N2)    
1×10-8 … 1×10-2 mbar % of reading 30 30
1×10-2 … 100 mbar % of reading - 30
100 … 1000 mbar % of reading - 50
Repeatability (N2)    
1×10-8 … 1×10-2 mbar % of reading 5 -
1×10-8 … 100 mbar % of reading - 5
Mounting orientation any any
Admissable pressure bar (absolute) 10 (limited to inert gases <50°C) 10 (limited to inert gases <50°C)
Admissible temperature    
Operation (ambient) °C +5 ... +55 +5 ... +55
Bakeout at flange (1) °C <150 <150
Storage °C -40 ... +70 -40 ... +70
Filament temperature °C - 120
Relative humidity for 30 days a year    
1×10-7 … 1×10-2 mbar % <95 (non-condensing) <95 (non-condensing)
1×10-8 … 1×10-2 mbar % <70 (non-condensing) <70 (non-condensing)
Supply voltage    
At gauge (2) V (dc) +14.5 ... +30 +14.5 ... +30
Ripple V (p-p)

<1

<1

Power consumption W <2 <2
Fuse to be connected AT <1 <1
Voltage range    
analog output V 0 ... +10.5 0 ... +10.5
Measurement range    
3MAx-00x-0x0N V +1.5 ... +8.5 -
3MBx-00x-0x0P V - +1.398 ... +8.598
3MAx-00x-0x0Q V +0.667 ... +10 -
Voltage vs. pressure    
3MAx-00x-0x0N volts per decade 1 (logarithmic) -
3MBx-00x-0x0P volts per decade - 0.6 (logarithmic)
3MAx-00x-0x0Q volts per decade 1.33 (logaritmic) -
Error signal    
Error signal V

<+0.5

09.5 ... +10.5

Output impendance 2x10 2x10
Load impendance kΩ

>10 (short circuit-proof)

>10 (short circuit-proof)

Step response time    
p > 10-6 mbar ms

<10

<10

p = 10-8 mbar ms

~1

~1

Gauge identification kΩ 100 85
Status (pin 6)    
Pirani-only mode V - 0 (low)
Cold cathode ignited V +15 ... +30 -
Combined Pirani/ cold cathode mode 3) V - +15 ... +30 (high)
Electrical connection    
3Mxx-00x-000x FCC68, 8-pin, female FCC68, 8-pin, female
3Mxx-00x-010x D-sub, 9-pin, male D-sub, 9-pin, male
Sensor cable    
3Mxx-00x-000x 8-pin, shielded 8-pin, shielded
Cable lenght    
50 m cable m < 50 (8x0.14 mm2) < 50 (8x0.14 mm2)
75 m cable m < 75 (8x0.25 mm2) < 75 (8x0.25 mm2)
100 m cable m < 100 (8x0.34 mm2) < 100 (8x0.34 mm2)
300 m cable m < 300 (8x1.00 mm2) < 300 (8x1.00 mm2)
Operating voltage kV <3.3 <3.3
High operating current µA <500 <500
Low operating current µA <100 <100
Materials exposed to vacuum    
3Mx0-00x-0x0x Ni alloy, AI2O3, glass, stainless steels W, Ni alloy, AI2O3, glass, stainless steels
3Mx3-00x-0x0x Ni alloy, AI2O3, stainless steels Ni alloy, AI2O3, stainless steels
Internal volume cm³ 22.8 22.8
Weight    
DN 25 ISO-KF g

<280

<280

DN 40 ISO-KF g <320 <320
DN 40 CF-F & CF-R g <570 <570
Degree of protection IP 40 IP 40
Standards    
CE conformity

EMC (EN 61000-6-2, EN 61000-6-3), EN 61010-1 & RoHS

EMC (EN 61000-6-2, EN 61000-6-3), EN 61010-1 & RoHS

Maintenance none none

1) Without electronics.

2) The minimum voltage of the supply unit must be increased proportionally to the length of the sensor cable.

3) Cold cathode ignited.

Part Number

Gemini_PN.png

Accessories

MAG50x
Part Number Description
211-098 Centering ring with fine filter DN 25 KF
351-550 MxG50x Ignition tool set
MPG50x
Part Number Description
211-098 Centering ring with fine filter DN 25 KF
351-550 MxG50x Ignition tool set

Spare Parts

MAG50x
Part Number Description
351-500 MAG500 spare sensor, 25KF, SS
351-501 MAG504 spare sensor, 25KF, SS
351-512 MAG500 spare sensor, 40KF, SS
351-513 MAG504 spare sensor, 40KF, SS
351-524 MAG500 spare sensor, 40CF-F, SS
351-525 MAG504 spare sensor, 40CF-F, SS
351-536 MAG500 spare sensor, 40CF-R, SS
351-537 MAG504 spare sensor, 40CF-R, SS
351-995 MxG40x/50x Spare parts ignition aid (10)
351-555 Spare ion chamber ss
MPG50x
Part Number Description
351-506 MPG500 spare sensor, 25KF, SS
351-507 MPG504 spare sensor, 25KF, SS
351-518 MPG500 spare sensor, 40KF, SS
351-519 MPG504 spare sensor, 40KF, SS
351-530 MPG500 spare sensor, 40CF-F, SS
351-531 MPG504 spare sensor, 40CF-F, SS
351-542 MPG500 spare sensor, 40CF-R, SS
351-543 MPG504 spare sensor, 40CF-R, SS
351-995 MxG40x/50x Spare parts ignition aid (10)
351-555 Spare ion chamber ss
send to a friend